JPH01145124U - - Google Patents
Info
- Publication number
- JPH01145124U JPH01145124U JP4245688U JP4245688U JPH01145124U JP H01145124 U JPH01145124 U JP H01145124U JP 4245688 U JP4245688 U JP 4245688U JP 4245688 U JP4245688 U JP 4245688U JP H01145124 U JPH01145124 U JP H01145124U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- tube
- cap part
- quartz tube
- impurities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012535 impurity Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4245688U JPH01145124U (th) | 1988-03-30 | 1988-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4245688U JPH01145124U (th) | 1988-03-30 | 1988-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01145124U true JPH01145124U (th) | 1989-10-05 |
Family
ID=31268864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4245688U Pending JPH01145124U (th) | 1988-03-30 | 1988-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01145124U (th) |
-
1988
- 1988-03-30 JP JP4245688U patent/JPH01145124U/ja active Pending