JPS62188134U - - Google Patents
Info
- Publication number
- JPS62188134U JPS62188134U JP7527186U JP7527186U JPS62188134U JP S62188134 U JPS62188134 U JP S62188134U JP 7527186 U JP7527186 U JP 7527186U JP 7527186 U JP7527186 U JP 7527186U JP S62188134 U JPS62188134 U JP S62188134U
- Authority
- JP
- Japan
- Prior art keywords
- information
- storing
- input
- recalling
- displaying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010365 information processing Effects 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Control By Computers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7527186U JPS62188134U (fr) | 1986-05-21 | 1986-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7527186U JPS62188134U (fr) | 1986-05-21 | 1986-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62188134U true JPS62188134U (fr) | 1987-11-30 |
Family
ID=30921253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7527186U Pending JPS62188134U (fr) | 1986-05-21 | 1986-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62188134U (fr) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5986439A (ja) * | 1982-11-05 | 1984-05-18 | 株式会社東芝 | システム・メンテナンス方法 |
| JPS5991592A (ja) * | 1982-11-18 | 1984-05-26 | 株式会社東芝 | 表示方式 |
| JPS617906A (ja) * | 1984-06-22 | 1986-01-14 | Ricoh Co Ltd | 装置状態の表示装置 |
| JPS6144428A (ja) * | 1984-08-09 | 1986-03-04 | Canon Inc | 半導体製造装置 |
-
1986
- 1986-05-21 JP JP7527186U patent/JPS62188134U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5986439A (ja) * | 1982-11-05 | 1984-05-18 | 株式会社東芝 | システム・メンテナンス方法 |
| JPS5991592A (ja) * | 1982-11-18 | 1984-05-26 | 株式会社東芝 | 表示方式 |
| JPS617906A (ja) * | 1984-06-22 | 1986-01-14 | Ricoh Co Ltd | 装置状態の表示装置 |
| JPS6144428A (ja) * | 1984-08-09 | 1986-03-04 | Canon Inc | 半導体製造装置 |
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