JPS62188134U - - Google Patents

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Publication number
JPS62188134U
JPS62188134U JP7527186U JP7527186U JPS62188134U JP S62188134 U JPS62188134 U JP S62188134U JP 7527186 U JP7527186 U JP 7527186U JP 7527186 U JP7527186 U JP 7527186U JP S62188134 U JPS62188134 U JP S62188134U
Authority
JP
Japan
Prior art keywords
information
storing
input
recalling
displaying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7527186U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7527186U priority Critical patent/JPS62188134U/ja
Publication of JPS62188134U publication Critical patent/JPS62188134U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例の装置構成図を示す
。 １……情報処理装置、２……表示装置、３……
記憶装置、４……入力装置、５……制御装置、６
……被制御装置。 FIG. 1 shows an apparatus configuration diagram of an embodiment of the present invention. 1... Information processing device, 2... Display device, 3...
Storage device, 4... Input device, 5... Control device, 6
...Controlled device.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] メンテナンス情報を処理する情報処理装置と、
前記情報を記憶しておく記憶装置と、前記情報の
記憶および呼び出しの操作をする入力装置と、前
記情報を表示したり、記憶させるために入力した
情報を確認するための表示装置を有することを特
徴とする半導体製造装置。 an information processing device that processes maintenance information;
A storage device for storing the information, an input device for storing and recalling the information, and a display device for displaying the information and confirming information input to be stored. Features of semiconductor manufacturing equipment.
JP7527186U 1986-05-21 1986-05-21 Pending JPS62188134U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7527186U JPS62188134U (en) 1986-05-21 1986-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7527186U JPS62188134U (en) 1986-05-21 1986-05-21

Publications (1)

Publication Number Publication Date
JPS62188134U true JPS62188134U (en) 1987-11-30

Family

ID=30921253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7527186U Pending JPS62188134U (en) 1986-05-21 1986-05-21

Country Status (1)

Country Link
JP (1) JPS62188134U (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5986439A (en) * 1982-11-05 1984-05-18 株式会社東芝 System maintenance method
JPS5991592A (en) * 1982-11-18 1984-05-26 株式会社東芝 Display system
JPS617906A (en) * 1984-06-22 1986-01-14 Ricoh Co Ltd Display device of device state
JPS6144428A (en) * 1984-08-09 1986-03-04 Canon Inc Manufacturing equipment of semiconductor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5986439A (en) * 1982-11-05 1984-05-18 株式会社東芝 System maintenance method
JPS5991592A (en) * 1982-11-18 1984-05-26 株式会社東芝 Display system
JPS617906A (en) * 1984-06-22 1986-01-14 Ricoh Co Ltd Display device of device state
JPS6144428A (en) * 1984-08-09 1986-03-04 Canon Inc Manufacturing equipment of semiconductor

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