JPS62186577A - 超伝導集積回路の製造方法 - Google Patents

超伝導集積回路の製造方法

Info

Publication number
JPS62186577A
JPS62186577A JP61027953A JP2795386A JPS62186577A JP S62186577 A JPS62186577 A JP S62186577A JP 61027953 A JP61027953 A JP 61027953A JP 2795386 A JP2795386 A JP 2795386A JP S62186577 A JPS62186577 A JP S62186577A
Authority
JP
Japan
Prior art keywords
film
thin film
wiring
resistor
superconducting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61027953A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03794B2 (enExample
Inventor
Takeshi Imamura
健 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61027953A priority Critical patent/JPS62186577A/ja
Publication of JPS62186577A publication Critical patent/JPS62186577A/ja
Publication of JPH03794B2 publication Critical patent/JPH03794B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • H01L23/53204—Conductive materials
    • H01L23/53285—Conductive materials containing superconducting materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP61027953A 1986-02-13 1986-02-13 超伝導集積回路の製造方法 Granted JPS62186577A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61027953A JPS62186577A (ja) 1986-02-13 1986-02-13 超伝導集積回路の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61027953A JPS62186577A (ja) 1986-02-13 1986-02-13 超伝導集積回路の製造方法

Publications (2)

Publication Number Publication Date
JPS62186577A true JPS62186577A (ja) 1987-08-14
JPH03794B2 JPH03794B2 (enExample) 1991-01-08

Family

ID=12235255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61027953A Granted JPS62186577A (ja) 1986-02-13 1986-02-13 超伝導集積回路の製造方法

Country Status (1)

Country Link
JP (1) JPS62186577A (enExample)

Also Published As

Publication number Publication date
JPH03794B2 (enExample) 1991-01-08

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term