JPS62186430U - - Google Patents

Info

Publication number
JPS62186430U
JPS62186430U JP7438886U JP7438886U JPS62186430U JP S62186430 U JPS62186430 U JP S62186430U JP 7438886 U JP7438886 U JP 7438886U JP 7438886 U JP7438886 U JP 7438886U JP S62186430 U JPS62186430 U JP S62186430U
Authority
JP
Japan
Prior art keywords
grooves
springs
utility
mounting table
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7438886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7438886U priority Critical patent/JPS62186430U/ja
Publication of JPS62186430U publication Critical patent/JPS62186430U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP7438886U 1986-05-17 1986-05-17 Pending JPS62186430U (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7438886U JPS62186430U (https=) 1986-05-17 1986-05-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7438886U JPS62186430U (https=) 1986-05-17 1986-05-17

Publications (1)

Publication Number Publication Date
JPS62186430U true JPS62186430U (https=) 1987-11-27

Family

ID=30919555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7438886U Pending JPS62186430U (https=) 1986-05-17 1986-05-17

Country Status (1)

Country Link
JP (1) JPS62186430U (https=)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03255984A (ja) * 1989-12-14 1991-11-14 Abb Atom Ab 沸騰水型原子炉の燃料集合体
JPH1050810A (ja) * 1997-04-07 1998-02-20 Nikon Corp 基板の吸着装置及び露光装置
JP2003174078A (ja) * 2001-12-05 2003-06-20 Adtec Engineeng Co Ltd 保持装置
JP2003332410A (ja) * 2002-05-17 2003-11-21 Tokyo Seimitsu Co Ltd 真空吸着装置
JP2019193958A (ja) * 2018-05-01 2019-11-07 株式会社ミツトヨ 真空チャック及び真空チャック用オートバルブ
CN113478417A (zh) * 2021-08-19 2021-10-08 深圳市邦晟科技有限公司 自适应吸盘

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03255984A (ja) * 1989-12-14 1991-11-14 Abb Atom Ab 沸騰水型原子炉の燃料集合体
JPH1050810A (ja) * 1997-04-07 1998-02-20 Nikon Corp 基板の吸着装置及び露光装置
JP2003174078A (ja) * 2001-12-05 2003-06-20 Adtec Engineeng Co Ltd 保持装置
JP2003332410A (ja) * 2002-05-17 2003-11-21 Tokyo Seimitsu Co Ltd 真空吸着装置
JP2019193958A (ja) * 2018-05-01 2019-11-07 株式会社ミツトヨ 真空チャック及び真空チャック用オートバルブ
CN113478417A (zh) * 2021-08-19 2021-10-08 深圳市邦晟科技有限公司 自适应吸盘

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