JPS62186422U - - Google Patents
Info
- Publication number
- JPS62186422U JPS62186422U JP7552986U JP7552986U JPS62186422U JP S62186422 U JPS62186422 U JP S62186422U JP 7552986 U JP7552986 U JP 7552986U JP 7552986 U JP7552986 U JP 7552986U JP S62186422 U JPS62186422 U JP S62186422U
- Authority
- JP
- Japan
- Prior art keywords
- cvd apparatus
- light source
- support substrate
- reaction chamber
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7552986U JPS62186422U (OSRAM) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7552986U JPS62186422U (OSRAM) | 1986-05-20 | 1986-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186422U true JPS62186422U (OSRAM) | 1987-11-27 |
Family
ID=30921755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7552986U Pending JPS62186422U (OSRAM) | 1986-05-20 | 1986-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186422U (OSRAM) |
-
1986
- 1986-05-20 JP JP7552986U patent/JPS62186422U/ja active Pending
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