JPH0165129U - - Google Patents
Info
- Publication number
- JPH0165129U JPH0165129U JP1987160231U JP16023187U JPH0165129U JP H0165129 U JPH0165129 U JP H0165129U JP 1987160231 U JP1987160231 U JP 1987160231U JP 16023187 U JP16023187 U JP 16023187U JP H0165129 U JPH0165129 U JP H0165129U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- reaction tank
- window plate
- raw material
- material gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987160231U JPH0638420Y2 (ja) | 1987-10-20 | 1987-10-20 | 薄膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987160231U JPH0638420Y2 (ja) | 1987-10-20 | 1987-10-20 | 薄膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0165129U true JPH0165129U (OSRAM) | 1989-04-26 |
| JPH0638420Y2 JPH0638420Y2 (ja) | 1994-10-05 |
Family
ID=31442116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987160231U Expired - Lifetime JPH0638420Y2 (ja) | 1987-10-20 | 1987-10-20 | 薄膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0638420Y2 (OSRAM) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60152023A (ja) * | 1984-01-20 | 1985-08-10 | Hitachi Ltd | 光ｃｖｄ装置 |
| JPS6237918U (OSRAM) * | 1985-08-26 | 1987-03-06 |
-
1987
- 1987-10-20 JP JP1987160231U patent/JPH0638420Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60152023A (ja) * | 1984-01-20 | 1985-08-10 | Hitachi Ltd | 光ｃｖｄ装置 |
| JPS6237918U (OSRAM) * | 1985-08-26 | 1987-03-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0638420Y2 (ja) | 1994-10-05 |
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