JPS62186359U - - Google Patents
Info
- Publication number
- JPS62186359U JPS62186359U JP7268286U JP7268286U JPS62186359U JP S62186359 U JPS62186359 U JP S62186359U JP 7268286 U JP7268286 U JP 7268286U JP 7268286 U JP7268286 U JP 7268286U JP S62186359 U JPS62186359 U JP S62186359U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- focusing lens
- voltage
- sources
- electrostatic focusing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004949 mass spectrometry Methods 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 claims 2
- 238000010884 ion-beam technique Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7268286U JPS62186359U (cs) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7268286U JPS62186359U (cs) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186359U true JPS62186359U (cs) | 1987-11-27 |
Family
ID=30916349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7268286U Pending JPS62186359U (cs) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186359U (cs) |
-
1986
- 1986-05-16 JP JP7268286U patent/JPS62186359U/ja active Pending
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