JPS62186151U - - Google Patents
Info
- Publication number
- JPS62186151U JPS62186151U JP7388286U JP7388286U JPS62186151U JP S62186151 U JPS62186151 U JP S62186151U JP 7388286 U JP7388286 U JP 7388286U JP 7388286 U JP7388286 U JP 7388286U JP S62186151 U JPS62186151 U JP S62186151U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- exposed object
- pattern holder
- light
- exposure apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7388286U JPS62186151U (da) | 1986-05-19 | 1986-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7388286U JPS62186151U (da) | 1986-05-19 | 1986-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186151U true JPS62186151U (da) | 1987-11-26 |
Family
ID=30918603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7388286U Pending JPS62186151U (da) | 1986-05-19 | 1986-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186151U (da) |
-
1986
- 1986-05-19 JP JP7388286U patent/JPS62186151U/ja active Pending
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