JPS62184972U - - Google Patents
Info
- Publication number
- JPS62184972U JPS62184972U JP7331386U JP7331386U JPS62184972U JP S62184972 U JPS62184972 U JP S62184972U JP 7331386 U JP7331386 U JP 7331386U JP 7331386 U JP7331386 U JP 7331386U JP S62184972 U JPS62184972 U JP S62184972U
- Authority
- JP
- Japan
- Prior art keywords
- brush
- segment
- brush holder
- cup
- shaped rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
Landscapes
- Brushes (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7331386U JPH0230224Y2 (enExample) | 1986-05-15 | 1986-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7331386U JPH0230224Y2 (enExample) | 1986-05-15 | 1986-05-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62184972U true JPS62184972U (enExample) | 1987-11-25 |
| JPH0230224Y2 JPH0230224Y2 (enExample) | 1990-08-14 |
Family
ID=30917537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7331386U Expired JPH0230224Y2 (enExample) | 1986-05-15 | 1986-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0230224Y2 (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000326240A (ja) * | 1999-05-24 | 2000-11-28 | Yuichiro Niizaki | 研磨工具 |
| JP2007038328A (ja) * | 2005-08-02 | 2007-02-15 | Yuichiro Niizaki | 研磨ブラシおよび研磨ブラシ装置 |
| US7354337B2 (en) | 2005-08-30 | 2008-04-08 | Tokyo Seimitsu Co., Ltd. | Pad conditioner, pad conditioning method, and polishing apparatus |
| JP2017144487A (ja) * | 2016-02-15 | 2017-08-24 | 株式会社Ihi | 加工工具ホルダと精密仕上げロボットシステム |
| JP2019171526A (ja) * | 2018-03-29 | 2019-10-10 | 優一郎 新崎 | ブラシ |
-
1986
- 1986-05-15 JP JP7331386U patent/JPH0230224Y2/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000326240A (ja) * | 1999-05-24 | 2000-11-28 | Yuichiro Niizaki | 研磨工具 |
| JP2007038328A (ja) * | 2005-08-02 | 2007-02-15 | Yuichiro Niizaki | 研磨ブラシおよび研磨ブラシ装置 |
| US7354337B2 (en) | 2005-08-30 | 2008-04-08 | Tokyo Seimitsu Co., Ltd. | Pad conditioner, pad conditioning method, and polishing apparatus |
| US7731569B2 (en) | 2005-08-30 | 2010-06-08 | Tokyo Seimitsu Co., Ltd. | Pad conditioner, pad conditioning method, and polishing apparatus |
| JP2017144487A (ja) * | 2016-02-15 | 2017-08-24 | 株式会社Ihi | 加工工具ホルダと精密仕上げロボットシステム |
| JP2019171526A (ja) * | 2018-03-29 | 2019-10-10 | 優一郎 新崎 | ブラシ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0230224Y2 (enExample) | 1990-08-14 |