JPS62183136A - ウエハ治具のポケツト巾判定方法 - Google Patents

ウエハ治具のポケツト巾判定方法

Info

Publication number
JPS62183136A
JPS62183136A JP2472986A JP2472986A JPS62183136A JP S62183136 A JPS62183136 A JP S62183136A JP 2472986 A JP2472986 A JP 2472986A JP 2472986 A JP2472986 A JP 2472986A JP S62183136 A JPS62183136 A JP S62183136A
Authority
JP
Japan
Prior art keywords
pocket
width
disk
predetermined
wafer jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2472986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573057B2 (enExample
Inventor
Toshio Yamada
敏雄 山田
Shinji Takahashi
高橋　新二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Valqua Industries Ltd
Nihon Valqua Kogyo KK
Original Assignee
Nippon Valqua Industries Ltd
Nihon Valqua Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Valqua Industries Ltd, Nihon Valqua Kogyo KK filed Critical Nippon Valqua Industries Ltd
Priority to JP2472986A priority Critical patent/JPS62183136A/ja
Publication of JPS62183136A publication Critical patent/JPS62183136A/ja
Publication of JPH0573057B2 publication Critical patent/JPH0573057B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2472986A 1986-02-06 1986-02-06 ウエハ治具のポケツト巾判定方法 Granted JPS62183136A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2472986A JPS62183136A (ja) 1986-02-06 1986-02-06 ウエハ治具のポケツト巾判定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2472986A JPS62183136A (ja) 1986-02-06 1986-02-06 ウエハ治具のポケツト巾判定方法

Publications (2)

Publication Number Publication Date
JPS62183136A true JPS62183136A (ja) 1987-08-11
JPH0573057B2 JPH0573057B2 (enExample) 1993-10-13

Family

ID=12146239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2472986A Granted JPS62183136A (ja) 1986-02-06 1986-02-06 ウエハ治具のポケツト巾判定方法

Country Status (1)

Country Link
JP (1) JPS62183136A (enExample)

Also Published As

Publication number Publication date
JPH0573057B2 (enExample) 1993-10-13

Similar Documents

Publication Publication Date Title
US4135884A (en) Gamma stick
US20020011005A1 (en) Apparatus and method for measuring spherical article
US2847765A (en) Level protractor tool
JP3588878B2 (ja) 円弧の径寸法測定装置
JPS62183136A (ja) ウエハ治具のポケツト巾判定方法
CN108426511A (zh) 一种弧面台阶孔的深度测量工具
CN108050914B (zh) 一种零件轴组合检测量具及检测方法
JPS59131101A (ja) 端面ゲ−ジ
CN216308853U (zh) 一种橡胶子口直径的塞规检具
CN208907781U (zh) 多孔零件位置度检具
CN112833824A (zh) 一种油套管横向断面面积和断面缺陷的计算方法
CN221859418U (zh) 一种多功能检测治具
CN207214969U (zh) 一种孔织带检验量具
CN209371949U (zh) 一种手机中壳斜槽宽度测量检具
JPS56101540A (en) Adhesion test machine
Bilik et al. Proba"-type electromagnetic inspection instruments.
JPH0454538Y2 (enExample)
JPS58187702U (ja) ゲ−ジ
KR19980027771U (ko) 측정 게이지
JPH0517501U (ja) 軸長チエツク用ゲージ
SU1641200A3 (ru) Устройство дл измерени силы и массы
Masini et al. Description of the aerometric method for particle size distribution determinations and its possible use in ceramics
Yakovlev et al. Induction method for inspection of mass portion of iron in ore from crush-enriching plants
JPH05322728A (ja) ４点曲げ試験治具
JPH0193732U (enExample)