JPH0573057B2 - - Google Patents

Info

Publication number
JPH0573057B2
JPH0573057B2 JP2472986A JP2472986A JPH0573057B2 JP H0573057 B2 JPH0573057 B2 JP H0573057B2 JP 2472986 A JP2472986 A JP 2472986A JP 2472986 A JP2472986 A JP 2472986A JP H0573057 B2 JPH0573057 B2 JP H0573057B2
Authority
JP
Japan
Prior art keywords
pocket
width
curved plate
predetermined
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2472986A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62183136A (ja
Inventor
Toshio Yamada
Shinji Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Valqua Kogyo KK
Original Assignee
Nihon Valqua Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Valqua Kogyo KK filed Critical Nihon Valqua Kogyo KK
Priority to JP2472986A priority Critical patent/JPS62183136A/ja
Publication of JPS62183136A publication Critical patent/JPS62183136A/ja
Publication of JPH0573057B2 publication Critical patent/JPH0573057B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2472986A 1986-02-06 1986-02-06 ウエハ治具のポケツト巾判定方法 Granted JPS62183136A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2472986A JPS62183136A (ja) 1986-02-06 1986-02-06 ウエハ治具のポケツト巾判定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2472986A JPS62183136A (ja) 1986-02-06 1986-02-06 ウエハ治具のポケツト巾判定方法

Publications (2)

Publication Number Publication Date
JPS62183136A JPS62183136A (ja) 1987-08-11
JPH0573057B2 true JPH0573057B2 (enExample) 1993-10-13

Family

ID=12146239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2472986A Granted JPS62183136A (ja) 1986-02-06 1986-02-06 ウエハ治具のポケツト巾判定方法

Country Status (1)

Country Link
JP (1) JPS62183136A (enExample)

Also Published As

Publication number Publication date
JPS62183136A (ja) 1987-08-11

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