JPS62182541U - - Google Patents
Info
- Publication number
- JPS62182541U JPS62182541U JP7053286U JP7053286U JPS62182541U JP S62182541 U JPS62182541 U JP S62182541U JP 7053286 U JP7053286 U JP 7053286U JP 7053286 U JP7053286 U JP 7053286U JP S62182541 U JPS62182541 U JP S62182541U
- Authority
- JP
- Japan
- Prior art keywords
- support substrate
- plate
- semiconductor manufacturing
- susceptor plate
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000004020 conductor Substances 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7053286U JPS62182541U (tr) | 1986-05-10 | 1986-05-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7053286U JPS62182541U (tr) | 1986-05-10 | 1986-05-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62182541U true JPS62182541U (tr) | 1987-11-19 |
Family
ID=30912256
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7053286U Pending JPS62182541U (tr) | 1986-05-10 | 1986-05-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62182541U (tr) |
-
1986
- 1986-05-10 JP JP7053286U patent/JPS62182541U/ja active Pending