JPS61200240U - - Google Patents
Info
- Publication number
- JPS61200240U JPS61200240U JP8432985U JP8432985U JPS61200240U JP S61200240 U JPS61200240 U JP S61200240U JP 8432985 U JP8432985 U JP 8432985U JP 8432985 U JP8432985 U JP 8432985U JP S61200240 U JPS61200240 U JP S61200240U
- Authority
- JP
- Japan
- Prior art keywords
- plating layer
- silicon substrate
- photoresist pattern
- etching
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8432985U JPS61200240U (tr) | 1985-06-04 | 1985-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8432985U JPS61200240U (tr) | 1985-06-04 | 1985-06-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61200240U true JPS61200240U (tr) | 1986-12-15 |
Family
ID=30633755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8432985U Pending JPS61200240U (tr) | 1985-06-04 | 1985-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61200240U (tr) |
-
1985
- 1985-06-04 JP JP8432985U patent/JPS61200240U/ja active Pending