JPH01129823U - - Google Patents
Info
- Publication number
- JPH01129823U JPH01129823U JP2422288U JP2422288U JPH01129823U JP H01129823 U JPH01129823 U JP H01129823U JP 2422288 U JP2422288 U JP 2422288U JP 2422288 U JP2422288 U JP 2422288U JP H01129823 U JPH01129823 U JP H01129823U
- Authority
- JP
- Japan
- Prior art keywords
- alignment mark
- device pattern
- flat part
- pattern formed
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 2
- 238000005530 etching Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000013039 cover film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2422288U JPH01129823U (tr) | 1988-02-25 | 1988-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2422288U JPH01129823U (tr) | 1988-02-25 | 1988-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129823U true JPH01129823U (tr) | 1989-09-04 |
Family
ID=31243890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2422288U Pending JPH01129823U (tr) | 1988-02-25 | 1988-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129823U (tr) |
-
1988
- 1988-02-25 JP JP2422288U patent/JPH01129823U/ja active Pending