JPS6433743U - - Google Patents
Info
- Publication number
- JPS6433743U JPS6433743U JP12776787U JP12776787U JPS6433743U JP S6433743 U JPS6433743 U JP S6433743U JP 12776787 U JP12776787 U JP 12776787U JP 12776787 U JP12776787 U JP 12776787U JP S6433743 U JPS6433743 U JP S6433743U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- semiconductor wafer
- hole
- semiconductor
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 2
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12776787U JPS6433743U (tr) | 1987-08-21 | 1987-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12776787U JPS6433743U (tr) | 1987-08-21 | 1987-08-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6433743U true JPS6433743U (tr) | 1989-03-02 |
Family
ID=31380489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12776787U Pending JPS6433743U (tr) | 1987-08-21 | 1987-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6433743U (tr) |
-
1987
- 1987-08-21 JP JP12776787U patent/JPS6433743U/ja active Pending