JPS62181534U - - Google Patents

Info

Publication number
JPS62181534U
JPS62181534U JP6877986U JP6877986U JPS62181534U JP S62181534 U JPS62181534 U JP S62181534U JP 6877986 U JP6877986 U JP 6877986U JP 6877986 U JP6877986 U JP 6877986U JP S62181534 U JPS62181534 U JP S62181534U
Authority
JP
Japan
Prior art keywords
base
wafer
rotating shaft
photo sensor
wafer carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6877986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH052501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986068779U priority Critical patent/JPH052501Y2/ja
Publication of JPS62181534U publication Critical patent/JPS62181534U/ja
Application granted granted Critical
Publication of JPH052501Y2 publication Critical patent/JPH052501Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1986068779U 1986-05-09 1986-05-09 Expired - Lifetime JPH052501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986068779U JPH052501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-09 1986-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986068779U JPH052501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-09 1986-05-09

Publications (2)

Publication Number Publication Date
JPS62181534U true JPS62181534U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-11-18
JPH052501Y2 JPH052501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-21

Family

ID=30908911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986068779U Expired - Lifetime JPH052501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-09 1986-05-09

Country Status (1)

Country Link
JP (1) JPH052501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63252831A (ja) * 1987-04-07 1988-10-19 Taiyo Yuden Co Ltd 板体収納マガジンと板体収納方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59103436U (ja) * 1982-12-27 1984-07-12 株式会社東芝 半導体ウエハ用ボ−ト
JPS6072241A (ja) * 1983-09-28 1985-04-24 Mitsubishi Electric Corp 半導体ウエハ−供給装置
JPS60252542A (ja) * 1984-05-28 1985-12-13 Nippon Telegr & Teleph Corp <Ntt> カセツト変換装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59103436U (ja) * 1982-12-27 1984-07-12 株式会社東芝 半導体ウエハ用ボ−ト
JPS6072241A (ja) * 1983-09-28 1985-04-24 Mitsubishi Electric Corp 半導体ウエハ−供給装置
JPS60252542A (ja) * 1984-05-28 1985-12-13 Nippon Telegr & Teleph Corp <Ntt> カセツト変換装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63252831A (ja) * 1987-04-07 1988-10-19 Taiyo Yuden Co Ltd 板体収納マガジンと板体収納方法

Also Published As

Publication number Publication date
JPH052501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-21

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