JPS62180938U - - Google Patents
Info
- Publication number
- JPS62180938U JPS62180938U JP6822286U JP6822286U JPS62180938U JP S62180938 U JPS62180938 U JP S62180938U JP 6822286 U JP6822286 U JP 6822286U JP 6822286 U JP6822286 U JP 6822286U JP S62180938 U JPS62180938 U JP S62180938U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- ion beam
- etched
- sample
- beam milling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 10
- 238000010884 ion-beam technique Methods 0.000 claims description 5
- 238000003801 milling Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 238000004886 process control Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 3
- 238000001228 spectrum Methods 0.000 claims 2
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6822286U JPS62180938U (enrdf_load_stackoverflow) | 1986-05-08 | 1986-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6822286U JPS62180938U (enrdf_load_stackoverflow) | 1986-05-08 | 1986-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62180938U true JPS62180938U (enrdf_load_stackoverflow) | 1987-11-17 |
Family
ID=30907841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6822286U Pending JPS62180938U (enrdf_load_stackoverflow) | 1986-05-08 | 1986-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62180938U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000065306A1 (fr) * | 1999-04-21 | 2000-11-02 | Seiko Instruments Inc. | Technique de mesure de l'epaisseur d'un film |
-
1986
- 1986-05-08 JP JP6822286U patent/JPS62180938U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000065306A1 (fr) * | 1999-04-21 | 2000-11-02 | Seiko Instruments Inc. | Technique de mesure de l'epaisseur d'un film |
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