JPS62180527A - Manufacture of magnetic recording medium - Google Patents

Manufacture of magnetic recording medium

Info

Publication number
JPS62180527A
JPS62180527A JP2191786A JP2191786A JPS62180527A JP S62180527 A JPS62180527 A JP S62180527A JP 2191786 A JP2191786 A JP 2191786A JP 2191786 A JP2191786 A JP 2191786A JP S62180527 A JPS62180527 A JP S62180527A
Authority
JP
Japan
Prior art keywords
substrate
magnetic
point
rotational frequency
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2191786A
Other languages
Japanese (ja)
Inventor
Fumihiko Sawase
沢瀬 文彦
Fujio Maeda
前田 富士男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2191786A priority Critical patent/JPS62180527A/en
Publication of JPS62180527A publication Critical patent/JPS62180527A/en
Pending legal-status Critical Current

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  • Application Of Or Painting With Fluid Materials (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To obtain a high quality magnetic disk recording medium having specified capability stably and in a short time by changing process of controlling the film thickness uniformly independently from other processes in rotational frequency, time etc. CONSTITUTION:A motor M1 is started, and rotational frequency of a substrate 3 is raised, and supply of magnetic coating to the substrate face is started by a nozzle 5 when the rotational frequency arrived at about 50-150 RPM at a point A. The magnetic coating supplied at constant speed rotation to a point B is diffused slowly and uniformly over the whole face of the substrate 3 by centrifugal force. After termination of supply of the coating at the point B, rotational frequency of the substrate 3 is raised to about 300-600 RPM, and excess coating is flung away by strong centrifugal force. At the same time, process to adjust viscosity of the coating on the substrate and to control film thickness of inner periphery and outer periphery is performed from a point C to a point D. Then, rotational frequency of the substrate 3 is raised to about 1,000-1,800 RPM, and a thin film is formed by strong centrifugal force between points E and F. Thus, a very thin uniform film is obtained.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、磁気ディスク等記録媒体におけるサブストレ
ート面への磁気記録膜の形成手段のスピンコーティング
方式に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a spin coating method for forming a magnetic recording film on a substrate surface of a recording medium such as a magnetic disk.

本発明は、アルミニウム等の非磁性支持体の円板面に、
Fe、03等の磁性体を均一薄膜状、に塗布した。リジ
ッドディスク等の記録媒体における磁性膜のスピンコー
ティングに適用されるものである。
In the present invention, on the disk surface of a non-magnetic support such as aluminum,
A magnetic material such as Fe, 03, etc. was applied in a uniform thin film. It is applied to spin coating of magnetic films in recording media such as rigid disks.

〔発明の背景〕[Background of the invention]

従来、磁気ディスクのスピンコーティングにおいては、
ディスクは磁性塗料を非磁性支持体に付着させるための
低速回転工程と付着せしめた塗料の余分塗料と膜形成の
ための高速回転工程で磁性膜が形成されていた。
Conventionally, in spin coating of magnetic disks,
A magnetic film was formed on the disk by a low-speed rotation process for adhering magnetic paint to a non-magnetic support and a high-speed rotation process for removing excess paint from the adhered paint and forming a film.

しかしながら、磁気ディスク円板が高密度化するに伴な
い、磁性塗料の材料、組成等が変り、粘度が低粘度化す
る傾向にある。このため−従来の低速回転数と高速回転
数によるスピンコーチイブは、高密度な、高分解能、□
高オーバライド、しかも均一な高い出・力を1あわせ有
する磁気ディスクを得るには、生産性が低かった。すな
わち、第3図において、縦軸をディスクサブストレート
回転数RPM、横軸を時間SECとして、従来のスピン
コーディングカーブを示すと、時間Oからディスクが回
転を始めA点から6点まで低定速回転であり、そのうち
A点からB点まで、サブストレートに磁性塗料を供給し
、ついでB点から6点まで、サブストレート上の余分な
塗料を吹きとばし、かつサブストレート上の塗料の粘度
を高めていた。しかるのち、6点からD点まで回転を立
上げさらにE点まで継続し、磁性膜を形成し、F点で終
了させる方式であった。
However, as the density of magnetic disks increases, the materials, compositions, etc. of magnetic paints change, and the viscosity tends to decrease. For this reason - conventional spin coaches with low and high rotational speeds provide high density, high resolution, □
In order to obtain a magnetic disk having both high override and uniform high output and power, productivity was low. In other words, in Fig. 3, the vertical axis is the disk substrate rotational speed RPM, and the horizontal axis is the time SEC. If we show a conventional spin coding curve, the disk starts rotating at time O and continues at a low constant speed from point A to point 6. It is a rotation that supplies magnetic paint to the substrate from point A to point B, then blows away excess paint on the substrate from point B to point 6, and increases the viscosity of the paint on the substrate. was. Thereafter, the rotation was started from point 6 to point D, continued to point E, formed a magnetic film, and ended at point F.

この従来の方式では、前述の高密度な高分解能、しかも
、均一な高い出力をあわせ有する磁気ディスクを得るた
めには、長時間を必要とし、量産的に廉価で効率良く、
得ることができなかった6 なお、この種の技術として関連するものには例えば特開
昭57−27439号がある。
With this conventional method, it takes a long time to obtain a magnetic disk that has the above-mentioned high density and high resolution, as well as a uniform high output.
6. Related technology of this type includes, for example, Japanese Patent Application Laid-Open No. 57-27439.

〔発明の目的〕 本発明の目的は前述の問題点を解決し、高密度な、高分
解能しかも均一な高い出力をあわせ有する磁気ディスク
を、量産的に廉価に効率良く、生産する方法を提供する
ことにある。
[Object of the Invention] The object of the present invention is to solve the above-mentioned problems and provide a method for efficiently mass-producing magnetic disks having high density, high resolution, and uniform high output at low cost. There is a particular thing.

〔発明の概要〕[Summary of the invention]

本発明は前記のごとき、従来技術の隘路を一挙に解消し
て、高品質、高密度の磁気ディスク記録媒体を得る方式
に関するものであり、アルミニウム等のディスクサブス
トレートの内周部を支持して回転させ、前記サブストレ
ート面へ、磁性塗料を供給し、サブストレート面へ塗料
を均一に付着する際の低速回転工程と、その後、サブス
トレート面上の余分な塗料を振り飛ばすと同時に、サブ
ストレート面上の塗料の粘度を調整し、内周、外周の膜
厚を均一に制御する工程を設け、その後、高速回転によ
る強い遠心力にて薄膜を形成する方法において、膜厚を
均一に制御する工程を他の工程と、回転数1時間等を独
立に可変させることで、短時間に、すなわち量産的に安
定かつ高品質に所定の性能を有する磁気ディスク記録媒
体を得る、スピンコーティング方式である。
The present invention relates to a method for obtaining a high-quality, high-density magnetic disk recording medium by alleviating the bottlenecks of the prior art as described above. A low-speed rotation process in which the magnetic paint is supplied to the substrate surface and the paint is uniformly adhered to the substrate surface, and then, at the same time, the excess paint on the substrate surface is shaken off, and the magnetic paint is applied to the substrate surface. A process is established to adjust the viscosity of the paint on the surface and control the film thickness uniformly on the inner and outer peripheries, and then a thin film is formed using strong centrifugal force due to high-speed rotation, which controls the film thickness uniformly. It is a spin coating method that produces a magnetic disk recording medium with a predetermined performance in a short time, in mass production, stably and with high quality by varying the process independently from other processes and the rotation speed per hour, etc. .

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を第1図および第2図により説
明する。磁性塗料の回収用チャンバー1の中心にあって
可変速モータM1により回転する軸2に、アルミニウム
等のディスクサブストレート3を締具4により締付は固
定したのちモータM1により回転する。
An embodiment of the present invention will be described below with reference to FIGS. 1 and 2. A disk substrate 3 made of aluminum or the like is fastened and fixed by a fastener 4 to a shaft 2 located at the center of a magnetic paint recovery chamber 1 and rotated by a variable speed motor M1, and then rotated by the motor M1.

ディスクサブストレート3の両面には、磁性塗料を供給
するノズル5が設けられ、ノズル5は、M2による駆動
軸すに軸支されたアーム7の先端に取付けられており、
回転するサブストレート3に対し、まずアーム7が図中
、矢印のように外周から内周に向い、磁性塗料の供給を
行ない、スピンコーティングされる。前記装置による本
発明のスピンコーティング工程を第4図に示すところの
、縦軸をディスクサブストレート回転数RPM、横軸を
時間SeGとして。
Nozzles 5 for supplying magnetic paint are provided on both sides of the disk substrate 3, and the nozzles 5 are attached to the tip of an arm 7 that is supported by a drive shaft formed by M2.
First, the arm 7 is directed from the outer periphery to the inner periphery of the rotating substrate 3 as shown by the arrow in the figure, and a magnetic coating material is supplied to the rotating substrate 3 for spin coating. The spin coating process of the present invention using the above apparatus is shown in FIG. 4, with the vertical axis representing the disk substrate rotational speed RPM and the horizontal axis representing time SeG.

サブストレート回転数の時間による変化を表すカーブに
より説明する。まず、時間Oにおいて、モータM1を起
動し、サブストレート30回転数が上昇して、A点で約
50〜150RPMに達すれば、ノズル5による磁性塗
料のサブストレート面への供給を開始し、B点まで定速
回転(50〜150RPM)で供給される磁性塗料をサ
ブストレート3の全面にわたり遠心力により、ゆっくり
と平均的に塗料を拡散させる。B点で塗料供給が終った
後、サブストレート3の回転数を約300〜600RP
Mまで上げ、余分の塗料を強い遠心力により振り飛ばし
ながら、同時にサブストレート上の塗料の粘度を調整し
、内周、外周の膜厚を均一に制御する工程を6点からD
点まで行なう。その後、サブストレート3の回転数を約
1000〜1800RPMまで上げE点からF点の間、
強い遠心力にて、薄膜を形成する工程を過て、きわめて
薄い均一な膜を得ることができる。
This will be explained using a curve representing the change in substrate rotation speed over time. First, at time O, motor M1 is started, and when the substrate rotation speed increases by 30 RPM and reaches approximately 50 to 150 RPM at point A, the nozzle 5 starts supplying magnetic paint to the substrate surface, and B The magnetic paint is supplied at a constant speed (50 to 150 RPM) to a certain point, and is spread slowly and evenly over the entire surface of the substrate 3 by centrifugal force. After the paint supply is finished at point B, the rotation speed of substrate 3 is approximately 300 to 600 RP.
From 6 points to D, raise the temperature to M and shake off excess paint using strong centrifugal force, while at the same time adjusting the viscosity of the paint on the substrate and controlling the film thickness on the inner and outer peripheries to be uniform.
Go to the point. After that, increase the rotation speed of substrate 3 to about 1000 to 1800 RPM between point E and point F.
Through the process of forming a thin film using strong centrifugal force, an extremely thin and uniform film can be obtained.

〔発明の効果〕〔Effect of the invention〕

本発明のサブストレート面上の塗料の粘度を調整し、内
周、外周の膜厚を均一に制御する工程を他の工程と別の
回転数と時間を持つようにするスピンコーティング方式
によれば、出来上がりの磁性膜が均一できわめて薄く、
高密度、高分解能の高品質磁気ディスク円板が、短時間
に効率よく、量産的に得ることができる効果がある。
According to the spin coating method of the present invention, the process of adjusting the viscosity of the paint on the substrate surface and controlling the film thickness uniformly on the inner and outer peripheries has a different rotation speed and time from other processes. , the finished magnetic film is uniform and extremely thin,
This has the advantage that high-quality magnetic disks with high density and high resolution can be mass-produced in a short time and efficiently.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の一実施例の装置の正面図。 第2図は同じく側断面図、第3図は、従来の工程を示す
説明図、第4図は1本発明実施例の工程を示す説明図で
ある。 1・・・磁性塗料回収チャンバー、2・・・回転軸。 3・・−ディスクサブストレート、4・・・締付具、5
・・・ノズル、6・・・駆動軸、7・・・ノズル用アー
ム。 第4閃
FIG. 1 is a front view of an apparatus according to an embodiment of the present invention. FIG. 2 is a side sectional view, FIG. 3 is an explanatory diagram showing a conventional process, and FIG. 4 is an explanatory diagram showing a process according to an embodiment of the present invention. 1... Magnetic paint collection chamber, 2... Rotating shaft. 3...-disc substrate, 4... fastener, 5
... Nozzle, 6... Drive shaft, 7... Nozzle arm. 4th flash

Claims (1)

【特許請求の範囲】[Claims] 1、アルミニウム等の非磁性支持体の内周部を保持して
回転させ、前記の非磁性支持体上に磁性塗料を塗布し、
配向等を施すことにより、磁気記録層を設ける磁気記録
媒体の製造過程で、塗布工程において、磁性塗料を非磁
性支持体に供給し、付着せしめる低速回転工程の後、非
磁性支持体上の余分な塗料を振り飛ばすと同時に、非磁
性支持体上の塗料の粘度を調整し、内周、外周の膜厚を
均一に制御する中速回転工程を設け、その後、高速回転
による強い遠心力にて薄膜を形成する方法において、膜
厚を均一に制御する工程を他の工程と、回転数、時間等
を独立に可変させることを特徴とする磁性記録媒体の製
造方法。
1. Hold and rotate the inner periphery of a non-magnetic support such as aluminum, apply magnetic paint on the non-magnetic support,
In the manufacturing process of magnetic recording media in which a magnetic recording layer is provided by applying orientation, etc., in the coating process, after the low-speed rotation process in which magnetic paint is supplied to the non-magnetic support and adhered, the excess on the non-magnetic support is removed. At the same time, the viscosity of the paint on the non-magnetic support is adjusted, and the film thickness on the inner and outer peripheries is uniformly controlled. 1. A method for manufacturing a magnetic recording medium, characterized in that in a method for forming a thin film, the step of controlling the film thickness uniformly and other steps, the rotation speed, time, etc. are independently varied.
JP2191786A 1986-02-05 1986-02-05 Manufacture of magnetic recording medium Pending JPS62180527A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2191786A JPS62180527A (en) 1986-02-05 1986-02-05 Manufacture of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2191786A JPS62180527A (en) 1986-02-05 1986-02-05 Manufacture of magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS62180527A true JPS62180527A (en) 1987-08-07

Family

ID=12068431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2191786A Pending JPS62180527A (en) 1986-02-05 1986-02-05 Manufacture of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS62180527A (en)

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