JP2001236698A - Method and device for manufacture of heat insulating stamper - Google Patents

Abstract

PROBLEM TO BE SOLVED: To devise a new method of forming a liquid film to form a heat insulating layer in the production of a heat insulating stamper so that the consumption of the source material for the formation of the heat insulating layer is suppressed to the minimum to avoid the excess use, a mask for the formation of the heat insulating layer is made unnecessary, the process of forming the heat insulating layer is simplified to improve the work efficiency, a heat insulating stamper of high quality without irregularity in the inner circumference and outer circumference edges of the heat insulating layer can be easily manufactured at a low cost. SOLUTION: The solution 6 of the heat insulating source material is applied into many concentric circles or a spiral by moving the coating nozzle 5 of the solution 6 in the radial direction on a stamper master disk 1 while the stamper master disk 1 on which a duplicated nickel film of specified thickness is formed is rotated. Then the master disk 1 is left to stand and aged to spread the solution 6 of the heat insulating source material in the radial direction of the stamper 1 to form a smooth annular solution layer of the heat insulating source material with uniform thickness. Then the solution layer is hardened to form an annular heat insulating layer.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a CD / MD / MO /
Large-capacity optical recording media (optical disks) such as DVDs
The present invention relates to a method for manufacturing a stamper used for injection molding of a substrate, particularly a heat-insulating stamper having a short molding cycle. And a heat insulating layer can be efficiently formed.

[0002]

2. Description of the Related Art As a prior art relating to a heat insulating stamper,
Japanese Patent Application Laid-Open No. 6-259815 discloses a "master for an optical disk and a method for manufacturing the same".
No. 587 discloses an “optical disk substrate molding method”. The above-mentioned Japanese Patent Application Laid-Open No. 6-259815 discloses an "optical disk master and a method of manufacturing the same", which increases the hardness of the signal surface or the signal surface and the back surface of a stamper as a molding master for an optical disk substrate, and increases the friction between the molten resin and the resin. The purpose is to extend the life of the stamper and improve the quality of the optical disk at the time of molding by lowering the temperature and increasing the heat insulation properties. Polytetrafluoroethylene (PTFE) having a particle diameter of 0.1 μm or less
50-70 nm nickel plating film 14 containing 30%
It is formed with the thickness of. According to the description in the above-mentioned publication, this technique is based on the fact that the surface hardness of the master for molding an optical disk substrate is increased and the friction is reduced, so that the life of the master for an optical disk is extended, and the heat insulating property is increased, and the distance between the inner circumference and the outer circumference is increased. Since the mold properties can be made equal, the molding efficiency is increased, and therefore, an optical disk substrate having excellent optical characteristics and good appearance can be molded. In short, this is to form a heat insulating layer on the signal surface of the stamper to secure heat insulating property between the inner surface of the mold and the transfer surface of the stamper.

The "optical disk substrate molding method" disclosed in Japanese Patent Application Laid-Open No. H10-149587 is based on the recognition that the transferability decreases with distance from the gate in the conventional technology of injection molding of an optical disk substrate. In order to maintain the temperature of the boundary surface with the stamper surface high and uniform, a heat insulating layer made of ceramic is provided on the lower surface (back surface) of the stamper, and the thickness of the heat insulating layer is increased within a predetermined range or as the distance from the gate increases. In order to improve the transferability and its uniformity by keeping the temperature of the interface between the molten resin filled in the mold and the stamper high and uniform, the lower surface of the stamper has a low thermal conductivity such as zirconia. Is provided, and the thickness of the heat insulating layer is set to 0.
The thickness is changed in the range of 2 mm to 1.0 mm, or the thickness is set to 0.14 mm or more at the center of the substrate where the gate is provided, and to 0.2 mm or more at the outer periphery of the substrate. In short, in this device, a heat insulating layer is formed on the lower surface of the stamper to ensure heat insulation between the inner surface of the mold and the transfer surface of the stamper.

[0004]

2. Description of the Related Art As shown in FIG. 17, when a molten resin is filled in a cavity 172 formed by a molding die 171, the molten resin injected from a gate becomes:
While flowing into the interior of the cavity 172 along the stamper 174 mounted on the inner surface of the cavity 172, the skin layers 173a and 173b of the molten resin are cooled and hardened by the inner surface of the mold 171 to have fluidity. Lost. This tendency becomes remarkable as the mold temperature decreases, and the stamper 1
It is difficult to increase the transfer accuracy of the information recording surface 74 to the skin layer 173b. On the other hand, if the mold temperature is increased, the transfer accuracy of the information recording surface to the skin layer 173b can be improved, but the mold and the resin in the cavity (substrate of the optical disc)
For example, the cooling of the optical disc is delayed, so that the tact time of the optical disc substrate molding cycle cannot be increased, and the production efficiency decreases. Although it is not known as a prior art aiming at adjusting these two to improve transfer accuracy and prevent the substrate forming cycle tact from being lengthened, it is not known in Japanese Patent Application No. Hei 11 (1999) -112.
There is a structure of a heat insulating stamper of No. 298526 and a manufacturing method thereof (hereinafter, this is referred to as “prior art”).

As shown in FIG. 18, this prior art heat-insulating stamper 180 is provided between a transfer nickel layer 182 provided with a transfer surface (information recording surface) 181 and a nickel surface (covered nickel surface) 185 on the back surface. A heat insulating layer 183 made of a material is provided, and when a molten resin is injected and filled into a mold cavity, the temperature of the resin transfer surface (skin layer) with respect to a change in the mold temperature due to the heat insulating effect of the heat insulating layer 183. And the transfer temperature is sufficiently high even at a low mold temperature, so that high-accuracy transferability can be maintained. Also, the mold temperature can be lowered, so that the optical disk substrate molding cycle tact can be reduced. Can be up. The manufacturing process of the heat insulating stamper in the prior art will be briefly described with reference to FIGS. 1 (a) to 1 (d). In addition,
As a pre-stage of the step shown in FIG. 1, after a conductive film is formed on the concave / convex fine pattern 1a formed on the glass master 1, nickel electroforming is performed using the conductive film as a cathode to form a nickel layer 2a having a thickness of about 25 μm (described above). (Same as the transfer nickel layer). In FIG. 1A, reference numeral 10 denotes a finally obtained heat insulating stamper. FIG. 1 shows the nickel layer 2a.
Schematically shows the positional relationship between the masks 3a and 3b provided on the recording medium and the recording area of the heat insulating stamper 10. Area 10 5 mm inside innermost circumference of recording area of stamper 10
a, and masks 3a and 3b made of Teflon (PTFE: polytetrafluoroethylene) are formed in a region on the nickel layer 2a corresponding to a region 10b from the outermost periphery of the recording area to 5 mm outside to the outer edge. And nickel layer 2
By spin-coating or spray-coating the partially imidized linear polyamic acid solution on the surface of a, and heating and dehydrating cyclization to imidize the solution, FIG. 1 (b)
Is formed. After the masks 3a and 3b are removed from the laminate on which the polyimide heat insulating layer 4 is formed, a conductive film (not shown) is formed, and nickel electroforming is performed using the conductive film as a cathode as shown in FIG. Of the nickel layer 2b is deposited, and the nickel layer 2 (2a, 2
The total thickness of b) is 300 μm. Then, the nickel layer 2 including the polyimide heat insulating layer 4 is peeled off from the glass master 1 to obtain a heat insulating stamper 10 for molding an optical disk substrate shown in FIG. Insulated stamper 10
The concave / convex fine pattern 1 reproduced in a state where the concave / convex fine pattern 1a of the glass master 1 (master stamper master) is inverted.
a 'is formed. The manufactured heat insulating stamper 10 is mounted on a mold of an injection molding machine, and a cavity is filled with a molten resin to form an optical disk substrate. At this time, the mold temperature is set 10 to 20 ° C. lower than the normal temperature. Note that the thickness of the polyimide heat insulating layer 4 is 100 μm.
It is about. When the thickness of the polyimide heat-insulating layer 4 is 20 μm or more, high-accuracy transferability and tact-up of a substrate molding cycle can be simultaneously realized.

[0006]

[Problems Remaining in the Prior Art] The steps of forming the heat insulating layer 4 in the above prior art are as follows. In other words, a large amount of a raw material solution for forming a heat insulating layer is dripped after a mask is placed on the inner and outer peripheral portions, and the glass master is rotated at a low speed, spread by centrifugal force, and then rotated at a high speed. The raw material solution is shaken off to make the thickness uniform and smooth, and the inner and outer peripheral masks 3a and 3b are removed to form a donut-shaped raw material solution layer.
The heat insulating layer is generated by evaporating and curing the solvent of the raw material solution layer. The following problems remain in this heat insulating layer forming method in the prior art. 1. It is difficult to hold the mask attached to the inner and outer peripheral portions. 2. Maintenance of the mask (separation and cleaning of surplus material) is difficult. 3. Since 80% or more of the dripped raw material is shaken off as surplus, the raw material is wasted and the cost increases. 4. When removing the mask, the raw material solution adheres to the mask and pulls the thread, and the inner and outer edges of the donut-shaped raw material solution layer are disturbed (collapsed). 5. A steep edge having a height equivalent to the thickness of the mask is formed on the periphery of the heat insulating layer in a portion in contact with the mask, which has an adverse effect on the step of electroforming the nickel layer (coated nickel layer). give.

In the prior art described above, a heat insulating stamper is duplicated from a master stamper master made of a glass master. In some cases, a heat insulating stamper is duplicated using a mother stamper as a master, and the above-mentioned problem also applies to this case. That is. When duplicating the heat-insulating stamper from the mother stamper master, it is necessary to hold the mother stamper on the table of the duplicating device in a state where the mother stamper is distorted and the deformation is corrected. There is no technical problem. The “stamper master” in this specification refers to a master stamper master (based on a glass master)
Alternatively, it is a generic term for the mother stamper master.

[0008]

The first object of the present invention is to form a duplicated nickel film 2a of a predetermined thickness on a master stamper master having information recording grooves formed thereon or on the mother stamper master described above, and form a polyimide film thereon. Apply a heat-insulating raw material solution obtained by dissolving a heat-insulating raw material with low heat conductivity and high heat resistance in a solvent to form a donut-shaped heat-insulating raw material solution layer, and then heat to blow off the solvent component and harden to form a heat-insulating layer. And tightly adhere it to the nickel film 2a.
Further, a nickel electroformed coating layer 2 having a predetermined thickness is formed on the heat insulating layer.
b, the duplicated nickel film 2a is peeled off from the stamper master. In the method for manufacturing a heat insulating stamper, the amount of raw materials used for forming the heat insulating layer is reduced to the minimum necessary for forming the heat insulating layer. Eliminates waste of raw materials, eliminates the need for a mask when forming a heat-insulating layer, simplifies the work of forming a heat-insulating layer, improves work efficiency, and eliminates disturbance of the inner and outer edges of the heat-insulating layer, providing high-quality heat insulation. The first is to devise a novel liquid film forming method for forming the heat insulating layer so that the stamper can be manufactured easily and at low cost.
(Main issues).

[0009]

[Means taken to solve the first problem] Means taken to solve the first problem (Solution Means 1) is that a master stamper master or a mother stamper master having a predetermined information recording groove formed thereon. Forming a duplicated nickel film 2a having a predetermined thickness, and applying a heat insulating material solution obtained by dissolving a heat insulating material having low heat conductivity such as polyimide and high heat resistance in a solvent to form a donut-shaped heat insulating raw material solution layer thereon. The heat insulating raw material solution layer is formed and heated to remove the solvent component and harden to form a heat insulating layer. At the same time, the heat insulating layer is firmly adhered to the nickel film 2a. Assuming a method of manufacturing a heat-insulating stamper (a stamper having heat-insulating properties) in which a nickel electroformed coating layer 2b is laminated and the duplicated nickel film 2a is peeled off from the glass master 1 or the like. Are those composed by a) to (c). (A) While rotating the stamper master on which the duplicated nickel film having a predetermined thickness is laminated, the application nozzle of the heat-insulating raw material solution is moved in the radial direction on the stamper master, thereby forming a large number of concentric or spiral heat-insulating raw materials. Applying the solution, (b) leaving the stamper master coated with the heat-insulating raw material solution to stand still and curing, and spreading the heat-insulating raw material solution applied concentrically or spirally in the radial direction of the stamper master,
(C) forming a donut-shaped heat-insulating layer by hardening the heat-insulating raw-material solution layer;

[0010]

When the above-mentioned heat-insulating raw material solution has a high viscosity, a clear concentric circle or a spiral is drawn immediately after the application, but the usual heat-insulating raw material solution has a solvent of 80% to 9%.
Since the fluidity is large at 5%, the peak of the radial cross-sectional shape of each concentric or spiral coating ring is crushed immediately after coating, and the shape of the peak extends in the radial direction. For this reason, the peaks of the adjacent coating rings come into contact with each other to form a continuous corrugated liquid film. Immediately after the application, even if the adjacent crests are not in contact with each other, the crest shape gradually expands in the radial direction while gradually crushing, and the crests spread to form a similar corrugated liquid film. On the other hand, the average thickness of this liquid film is about 10 to 20 times the thickness of the intended heat insulating layer (for example, 0.2 to 2 times).
mm) and a relatively thick liquid film (or liquid layer), as the time elapses, a heat insulating raw material solution is generated due to a partial internal pressure difference within the liquid film due to gravity (a local internal pressure difference due to unevenness of the liquid film). Flow slowly from the peaks to the valleys and gradually extend in the radial direction, the film thickness is made uniform, and the surface is smoothed by the action of surface tension and the like. Therefore, by allowing this to stand and cure for the required period, the film thickness is uniform,
A smooth donut-shaped insulating material liquid layer is naturally formed. Then, by heating this and removing the solvent, a uniform and smooth heat insulating layer can be obtained. The applied heat-insulating raw material solution has its own fluidity (extensibility), internal pressure due to gravity applied to the heat-insulating raw material solution, and natural phenomena such as surface tension.
Since the thickness changes to a uniform and smooth liquid film, the heat insulating raw material solution is not shaken off by centrifugal force to make the thickness uniform and smooth. Will be used to form
Further, since the innermost circumference and the outermost circumference of the heat insulating raw material solution layer are formed by the innermost circumference and the outermost circumference of the application ring drawn by the application nozzle, these outlines are not formed by the mask. Further, no auxiliary means such as a mask for forming the contour is required, and the mounting and dismounting operations thereof are also unnecessary. Furthermore, the innermost periphery of the donut-shaped heat-insulating raw material solution layer, the edge of the outermost periphery extends in the radial direction and becomes a gentle and rounded slope, so that the edge can be raised or the edge can be raised Therefore, the coated nickel film including this edge is clearly laminated.

[0011]

As described above, it is possible to solve the above-described first problem by performing the above-described operation by the solving means 1. However, the solving means 1 is actually embodied. As for, the following problems remain. (1) Elimination of unevenness due to radial position of heat insulating raw material solution application amount per unit area. (2) Promotion of spreading of the heat-insulating raw material solution to shorten the time required for spreading the applied heat-insulating raw material solution (curing time). (3) The contour of the donut-shaped heat insulating layer is prevented from being disturbed. Although the above problems are independent problems, it is necessary to solve all of them to improve the effect of the present invention.

[0012]

The second, third, and fourth objects of the present invention are to construct means capable of effectively solving the above problem (1), (2), and (3). 3. A fourth problem.

[0013]

[Solution to Second Problem] Means for solving the second problem by rotation control of a stamper master and movement control of a coating nozzle in a radial direction for equalizing an application amount of a heat insulating raw material solution per unit area regardless of a radial position.

1-1. Means for Solving the Second Problem 1 Means for solving the second problem is to continuously rotate the stamper master at a constant speed, change the moving speed of the coating nozzle in the radial direction according to the radial position, thereby forming a spiral shape. The purpose is to vary the application pitch according to the radial position.

1-2. Means for Solving the Second Problem 2 Means for solving the second problem is to keep the moving speed of the coating nozzle in the radial direction constant, to continuously rotate the stamper master, and to set the rotating speed to the radial position of the coating nozzle. , And thereby the amount of the spirally-shaped heat-insulating raw material solution applied varies depending on the radial position.

1-3. Means for Solving the Second Problem 3 Means for solving the second problem 3 is that a stamper master is intermittently rotated at a constant speed, and a coating nozzle is intermittently moved in a radial direction to form a large number of concentric insulating material solutions. Is to change the rotational speed of the stamper master according to the radial position of the coating nozzle, thereby making the application amount of the heat insulating raw material solution applied concentrically different according to the radial position. .

1-4. Solution 4 of the Second Problem Solution 4 of the second problem is to intermittently rotate the stamper master and intermittently move the application nozzle in the radial direction to apply the heat insulating raw material solution in a large number of concentric circles. That is, the rotational speed of the stamper master is kept constant, and the radial movement pitch of the coating nozzle is changed according to the radial position, whereby the interval between the concentric coating rings is made different according to the radial position.

2. Means for solving the second problem by controlling the pouring out of the application nozzle to equalize the application amount per unit area of application of the heat-insulating raw material solution regardless of the radial position.

2-1. Means for Solving the Second Problem 5 Means for solving the second problem 5 is to continuously rotate a stamper master, continuously move a coating nozzle in a radial direction, and apply a heat insulating raw material solution in a spiral shape. Is to apply the heat-insulating raw material solution intermittently with a dotted line, and to vary the interval between the injections according to the radial position of the application nozzle.

2-2. Means for Solving the Second Problem 6 Means for solving the second problem 6 is to apply the heat insulating raw material solution in a large number of concentric circles by making the rotation speed of the stamper master continuous, intermittently moving the application nozzle in the radial direction, This is to intermittently dispense the solution from the application nozzle and apply the heat-insulating raw material solution in a broken line shape, and to vary the interval between the dispense according to the radial position of the application nozzle.

3. Means for solving the second problem by controlling the amount of the heat-insulating raw material solution to be discharged from the application nozzle per unit time so as to equalize the applied amount of the heat-insulating raw material solution per unit area regardless of the radial position.

3-1. Means for Solving the Second Problem 7 A means for solving the second problem is that the application nozzle is a nozzle having a single spout, and the amount of the heat-insulating raw material solution per unit time to be discharged is determined according to the radial position of the application nozzle. Change
Thus, the application amount of the heat-insulating raw material solution applied concentrically or spirally is made different depending on the radial position.

3-2. Means for Solving the Second Problem 8 Means for solving the second problem 8 is that a coating nozzle is a multiple nozzle provided with a large number of spouts, and the diameter of each spout varies depending on its radial position. The amount of heat raw material solution discharged from each spout per unit time was varied according to its radial position, whereby the amount of concentrically applied heat-insulating raw material solution was varied according to its radial position. That is.

3-3. Solution 9 of the second problem Solution 9 of the second problem is that the application nozzle is a multiple nozzle provided with a large number of spouts, and the intervals between the spouts are varied according to the radial position. The application interval of the heat-insulating raw material solution by the spout is varied depending on the radial position, whereby the application amount of the heat-insulating raw material solution applied concentrically is varied according to the radial position.

4. If the stamper master is not horizontal, the heat-insulating raw material solution moves to the lower side, which causes a bias in the film thickness of the heat-insulating raw material solution. Means for solving the second problem to solve the non-uniform film thickness due to the uneven film thickness by accurately holding the master stamper horizontally.

4-1. Solution 10 of the Second Problem Solution 10 of the second problem is to float a stamper master using a glass master, that is, a master stamper master on mercury in a mercury tank, and use the buoyancy and high viscosity of mercury. The purpose is to stably hold the master stamper master in an accurate horizontal state.

4-2. Means for Solving the Second Problem 11 Means for solving the second problem 11 is to float a float on a mercury in a mercury tank via a flexible thin film and mount a master stamper master or a mother stamper master on the float. is there. In implementing the solution 11, it is necessary to devise a method for matching the center of gravity of the float with the center of gravity of the stamper master. Further, the float may be floated directly on mercury.

4-3. Means for Solving the Second Problem 12 Means for Solving the Second Problem 12 is to float a float on high-viscosity oil in an oil tank, and to mount the stamper master on the float. In this case, it is also necessary to devise a method for matching the center of gravity of the float with the center of gravity of the stamper master. Further, the float may be levitated through the flexible membrane.

4-4. Means 13 for Solving the Second Problem Means 13 for solving the second problem is to levitate the support base to an electromagnetic force, and to keep the support base horizontal based on horizontality detection data by a horizontal sensor. Is to control the electromagnetic force.

[0030]

[Solution to the Third Problem] Means for Solving the Third Problem by Heating a Donut-shaped Insulated Raw Material Solution to Increase Its Fluidity

1-1. Means for Solving the Third Problem 1 Means for solving the third problem 1 is to provide an air nozzle on the surface of the heat-insulating raw material solution except for the innermost and outermost edges of the heat-insulating raw material solution applied in a donut shape. This is to blow hot air and heat. It should be noted that the above-mentioned heat-insulating raw material solution can be heated by radiant heat instead of heating with hot air to improve its fluidity.

2. Means for Solving the Third Problem by Applying High Frequency Vibration to a Donut-shaped Insulated Raw Material Solution to Increase Its Fluidity

2-1. Means for Solving the Third Problem 2 Means for solving the third problem 2 is to vibrate the support of the stamper master with an ultrasonic vibrator and apply ultrasonic vibration to the applied heat-insulating raw material solution.

2-2. Means for Solving the Third Problem 3 Means for solving the third problem 3 is to irradiate the surface of the heat insulating raw material solution applied in a donut shape with ultrasonic waves and apply ultrasonic vibration to the heat insulating raw material solution layer. . In this case, it is necessary to prevent the ultrasonic waves from being applied to the innermost and outermost edges of the heat-insulating raw material solution layer, but the ultrasonic irradiation range is relatively easily regulated.

3. Means for solving the third problem by irradiating high-frequency electromagnetic waves to a heat insulating raw material solution applied in a donut shape to increase its fluidity

3-1. Solution 4 of the Third Problem Solution 4 of the third problem is to irradiate the surface of the heat insulating raw material solution layer applied in a donut shape with a high-frequency electromagnetic wave (for example, a frequency of 2 GHz to 4 GHz), Is to heat. By controlling the intensity distribution of the electromagnetic wave, the heating intensity can be easily adjusted according to the radial position.

4. Means for solving the third problem by improving the wettability of the heat-insulating raw material solution applied surface to the heat-insulating raw material solution

4-1. Means for Solving the Third Problem 5 Means for solving the third problem 5 is to prepare the donut-shaped heat-insulating layer forming region of the duplicated nickel layer to increase the wettability of the surface of the region with the heat-insulating raw material solution. This improves the spreadability of the heat-insulating raw material solution on the back surface of the duplicated nickel layer, and promotes uniformity and smoothness of the liquid film thickness.

5. Means for Solving the Third Problem by Suppressing Evaporation of Solvent of Insulating Raw Material Solution

5-1. Means for Solving the Third Problem 6 Means for solving the third problem 6 is that a stamper master in which the atmosphere of a closed container is saturated with a solvent of a heat-insulating raw material solution and the heat-insulating raw material solution is applied in a donut shape is placed in the container. It is to be left standing and cured for a predetermined period. When the stamper master on which the heat-insulating raw material solution is applied in the form of a donut is left to cure in the above-described container, the solvent is evaporated from the heat-insulating raw material solution during the curing period because the atmosphere is saturated with the solvent of the heat-insulating raw material solution. Is suppressed. Therefore, the fluidity of the heat-insulating raw material solution does not decrease with the evaporation of the solvent, and during this time, the film thickness of the heat-insulating raw material solution layer is made uniform and smooth.

[0041]

[Solution to the Fourth Problem] Measures to more reliably prevent disturbance of the innermost and outermost edges of the heat-insulating raw material solution film applied in a donut shape.

1-1. Solution 1 of the 4th Problem Solution 1 of the 4th problem is that the cooling air is blown to the innermost and outermost edges of the heat-insulating raw material solution applied in a donut shape by an air nozzle. The innermost circumference, the fluidity of the edge of the outermost circumference is quickly reduced, thereby, the innermost circumference,
An object of the present invention is to suppress the radially inward and outward extensions of the outermost edge to prevent the edge from being disturbed.

1-2. Means for Solving the Fourth Problem 2 Means for solving the fourth problem is to mix a heat-insulating raw material solution with an ultraviolet-curable resin, and to form an innermost and outermost end of the doughnut-shaped insulating material solution. The purpose is to irradiate the edge with a light beam containing ultraviolet rays (light diameter of 1 to 3 mm) to quickly lower the fluidity of the innermost and outermost edges.

1-3. Solution 3 of the fourth problem Solution 3 of the fourth problem is to prepare the surface of the duplicated nickel layer outside the area of the donut-shaped heat-insulating raw material solution application surface to reduce the wettability of the surface to the heat-insulating raw material solution. It is a lowering. This prevents the heat-insulating raw material solution from spreading outside the donut-shaped region, and prevents the innermost and outermost edges from being disturbed.

1-4. Solution 4 of the fourth problem Solution 4 of the fourth problem is to apply a high-viscosity heat-insulating raw material solution to the outermost periphery and the innermost periphery of the donut-like heat-insulating material solution application surface of the duplicated nickel layer, Is that the outermost and innermost portions of the heat insulating raw material solution layer are made high viscosity layers. Thus, the outermost and innermost outer periphery of the heat insulating raw material solution is prevented from spreading outside the donut-shaped region, and the innermost and outermost edges are prevented from being disturbed. In addition, the above "high viscosity"
Means that the viscosity of the heat-insulating raw material solution was made slightly higher than the others by making the ratio of the solvent smaller (for example, 60 to 80%).

[0046]

Embodiment 1 Next, an embodiment will be described with reference to FIGS. The first embodiment is an example in which a stamper master (master stamper master) using the glass master 1 is used. The master stamper master (hereinafter, referred to as “glass master” in this section) 1 is rotated at a constant speed (for example, 30 rpm). From the application nozzle 5 to the heat insulating raw material solution 6 of the heat insulating layer
(Solvent 90%, specific gravity 1, viscosity 200 poise, temperature 23
C.), the application nozzle 5 is continuously moved in the direction of the arrow shown in the figure, and the heat insulating raw material solution 6 of the heat insulating layer is applied in a spiral shape. In this embodiment, the application nozzle 5 is moved from the outside in the radial direction to the inside.
In this method, the glass master 1 is mounted while the coating nozzle 5 is retracted, and the heat insulating raw material solution 6 is applied while the coating nozzle 5 is moved forward. After the application is completed, the glass master 1 is retracted again.
It is assumed that the work procedure is to change the application. However, when the above work procedure is changed, the application can be performed while moving from the inside in the radial direction to the outside in the radial direction.
The donut-shaped application area where the heat-insulating raw material solution 6 is spirally applied is determined by the range in which the coating nozzle 5 moves in the radial direction on the glass master 1 while the heat-insulating raw material solution 6 is being poured. In this example, the heat-insulating raw material solution layer having a thickness of 500 μm is formed at a discharge rate of 0.5 g per second per unit time. The glass master 1 on which the heat-insulating raw material solution 6 is applied in a spiral shape is allowed to stand for a while for a while. The heat-insulating raw material solution 6 has low viscosity and high fluidity. Crest of each spiral application ring (crest in radial cross section)
Quickly collapses and extends in the radial direction, and then the heat insulating raw material solutions in the adjacent mountains stick together to form a liquid layer. This liquid layer initially has a wavy waveform in the radial cross section, but flows further in the radial direction, and eventually becomes a smooth donut-like liquid layer having a uniform thickness. FIG. 3 shows a state in which the spirally applied heat-insulating raw material solution has become a smooth donut-like liquid layer having a uniform thickness.

Since the peripheral speed of the glass master (master stamper master) is high in the radially outward direction and slow in the radially inward direction, the rate of injecting the heat-insulating raw material solution from the coating nozzle 5 (per unit time) When the dispensing amount is constant, the coating line of the heat-insulating raw material solution becomes thicker as the coating nozzle 5 moves inward in the radial direction. On the other hand, if the moving speed of the application nozzle 5 in the radial direction is constant, the pitch of the spiral becomes constant. Therefore, as a result, the supply amount of the heat-insulating raw material solution per unit area of the application surface in the radially inward direction is larger in the radially inward direction than in the radially outward direction,
Therefore, the thickness of the liquid layer in the radially inward direction becomes thicker than that in the radially outward direction, so that the surface is smooth but the thickness becomes uneven in the radial direction.

To avoid the above-mentioned phenomenon in which the thickness of the heat-insulating raw material solution layer becomes non-uniform, the outflow speed (amount discharged per unit time) of the heat-insulating raw material solution from the application nozzle 5 according to the radial position is determined. One measure is to control, and the other measure is to change the rotation speed of the glass master 1 in accordance with the radial position of the coating nozzle 5, and to further control the outflow of the heat-insulating raw material solution from the coating nozzle 5. Another measure is to make it intermittent and to increase its pouring interval (the period during which pouring is stopped) to move radially inward. A spiral application by such a supply is shown in FIG.

Further, in order to prevent the thickness of the liquid layer from becoming non-uniform between the inner side and the outer side in the radial direction, the radial moving speed of the coating nozzle 5 is increased as the liquid layer moves in the radial direction. What is necessary is just to make the pitch of the spiral by the applied heat-insulating raw material solution larger radially inward. FIG. 5 shows the relationship between the radial moving speed of the coating nozzle and the radial coating position in this case. That is, as shown in FIG. 5, the position control is performed so that the moving speed in the radial direction of the application nozzle becomes faster as the application nozzle 5 moves to the center (the application nozzle 5).
Is inversely proportional to the radial position R of the application nozzle 5). As a result, the amount of the heat-insulating raw material solution applied per unit area becomes uniform, and it is possible to shorten the standing time until the thickness finally becomes a uniform and smooth liquid layer inside and outside in the radial direction. R2 in FIG. 5 indicates a radial position that is an outer peripheral end of the heat insulating layer, and R2 indicates a radial position that is an inner peripheral end of the heat insulating layer.

To avoid unevenness in the thickness of the liquid layer in the radial direction, the more the coating nozzle 5 moves in the radial direction, the higher the rotation speed of the glass master 1 (master stamper master). What is necessary is just to make the spiral coating line by the heat insulating raw material solution smaller inward in the radial direction. FIG. 6 shows the relationship between the radial position of the coating nozzle 5 and the rotation speed of the glass master 1 in this case. That is, as shown in FIG. 6, the rotation speed of the glass master is controlled so that the rotation speed of the glass master 1 increases as the application nozzle 5 moves toward the center (the rotation speed ω of the glass master 1 (It is inversely proportional to the radial position R of the nozzle 5). This equalizes the amount of heat-insulating raw material solution applied per unit area,
The curing time until the thickness finally becomes uniform and smooth in the radially inner and outer liquid layers can be shortened. FIG.
Then, the radial position where R2 is the outer peripheral end of the heat insulating layer,
R1 represents a radial position that is the inner peripheral end of the heat insulating layer.

Further, in order to avoid unevenness in the thickness of the liquid layer in the radial direction, the more the coating nozzle 5 moves in the radial direction, the more the amount of the heat-insulating raw material solution 6 discharged from the coating nozzle 5 per unit time. (Pourout amount) may be reduced.
FIG. 7 shows the relationship between the radial position of the application nozzle 5 and the discharge amount in this case. That is, as shown in FIG. 7, as the application nozzle 5 moves toward the center,
The ejection amount from the application nozzle 5 is controlled so that the ejection amount is reduced (the ejection amount P per unit time is directly proportional to the radial position R of the application nozzle 5). As a result, the discharge amount of the heat-insulating raw material solution per unit area becomes uniform, and the curing time until the thickness finally becomes a uniform and smooth liquid layer inward and outward in the radial direction can be shortened. In FIG.
R2 represents a radial position that is an outer peripheral end of the heat insulating layer, and R1 represents a radial position that is an inner peripheral end of the heat insulating layer.

[0052]

Embodiment 2 Embodiment 2 will be described with reference to FIG. In the second embodiment, the glass master 1 is moved at a constant speed (for example, 30 rpm).
m) to intermittently discharge the heat-insulating raw material solution 6 (solvent 90%, specific gravity 1, viscosity 200 poise, temperature 23 ° C.) from the coating nozzle 5, and further apply the coating nozzle 5 in the direction of the arrow shown in the figure. The heat insulating raw material solution is discharged from the coating nozzle 5 while the coating nozzle 5 is stopped moving during the radial movement of the coating nozzle 5, and the heat insulating raw material solution is discharged while the coating nozzle 5 is moving in the radial direction. The pouring from the application nozzle 5 is stopped, and the heat insulating raw material solution 6 is applied in a large number of concentric circles. That is, the movement control is performed so that the application nozzle 5 intermittently moves toward the center as shown in FIG. In synchronization with this, the heat insulating raw material solution 6 is discharged (poured out) from the coating nozzle for one round, whereby a plurality of concentric coating rings are formed. In this example,
The dispensed amount per unit time is 0.5 g per second.

After the concentric application of the heat-insulating raw material solution 6 in the predetermined donut-shaped area is completed, the heat-insulating raw material solution 6 is left as it is for a while. When applied, the individual applicator rings collapse in their ridges and extend radially, with adjacent applicator rings sticking together to form a liquid layer with a surface corrugation in the radial cross section. Thereafter, the heat-insulating raw material solution 6 moves in a radial direction from a high place to a low place with time, so that the surface becomes smooth and a donut-like liquid layer having a uniform thickness and a smooth shape as shown in FIG. 3 is obtained. In this example, a heat insulating raw material solution layer having a thickness of 500 μm is finally formed.

In the second embodiment as well, in the same manner as in the first embodiment, the amount of the liquid ejected from the coating nozzle 5 per unit time is kept constant and the rotation speed of the glass master is kept constant.
There is a problem in that the applied amount of the heat-insulating raw material solution per unit area in the radially inward direction is not equal to that in the radially outward direction. This problem can be solved by appropriately adjusting the amount of pouring from the coating nozzle 5 per unit time or the rotation speed of the glass master according to the radial position of the coating nozzle 5.

When adjusting the amount of the heat-insulating raw material solution to be discharged from the coating nozzle 5 according to the radial position, the coating nozzle 5
FIG. 7 shows the relationship between the radial position and the discharge amount (pour out amount) of the heat-insulating raw material solution per unit time. That is, as shown in FIG. 7, as the application nozzle 5 moves toward the center, the ejection amount is controlled so that the ejection amount per unit time from the application nozzle 5 decreases (the ejection amount P per unit time). Is directly proportional to the radial position R of the application nozzle 5). As a result, the discharge amount of the heat-insulating raw material solution per unit area to be applied becomes uniform, and the curing time until a liquid layer having a uniform thickness and finally a smooth liquid layer can be shortened.
Here, the radial position that is the outer peripheral end of the heat insulating layer is R2, and the radial position that is the inner peripheral end of the heat insulating layer is R1.

FIG. 9 shows the relationship between the radial position of the coating nozzle 5 and the rotational angular velocity of the glass master when the rotation speed of the glass master is adjusted in accordance with the radial position of the coating nozzle 5. That is, as shown in FIG. 9, the rotation speed of the glass master 1 is controlled so that the rotation speed of the glass master 1 increases as the coating nozzle 5 moves toward the center (the rotation angular velocity ω of the glass master 1 is (It is inversely proportional to the radial position R of the application nozzle 5). Further, while the rotation speed of the glass master 1 is kept constant, the heat-insulating raw material solution 6
The application time of the heat-insulating raw material solution is shortened after the application ring of FIG. FIG. 9 shows the relationship between the radial position of the application nozzle 5 and the ejection time T in this case, and FIG. 9 shows that one ejection time T is directly proportional to the radial position R of the application nozzle 5. I have. By adjusting the discharge time T in this manner, the discharge amount of the heat-insulating raw material solution per unit area becomes uniform in the donut-shaped application area, and the time required until a liquid layer having a uniform thickness and finally a smooth liquid layer is reduced. can do. In FIG. 9, R2 represents a radial position that is an outer peripheral end of the heat insulating layer, and R1 represents a radial position that is an inner peripheral end of the heat insulating layer.

[0057]

Embodiment 3 Embodiment 3 is an example of a measure for preventing the innermost and outermost contours of a donut-shaped insulating layer raw material liquid layer from being disturbed by the insulating layer raw material solution. In other words, only the innermost and outermost peripheral portions are applied by a dedicated application nozzle, and the heat-insulating layer raw material solution having a higher viscosity than other portions is applied by the dedicated application nozzle. The innermost and outermost peripheral portions of the donut-shaped heat-insulating raw material liquid layer have a higher viscosity (lower fluidity) than the other portions, so that the edges of the innermost and outermost peripheral portions are not disturbed and the contour is not disturbed. .

Another measure is to slightly cool the innermost and outermost portions to make the fluidity thereof smaller than that of the other portions, thereby avoiding the contour from being disturbed. . That is, as shown in FIG. 10, a cooling air nozzle 7 that blows air at a temperature lower than the ambient temperature is provided only on the outermost and innermost portions of the portion where the donut-shaped heat insulating layer 4 is formed, and the glass master 1 is rotated. This is to blow cold air for a predetermined time. Since the innermost and outermost portions also need to be extended to a predetermined thickness, the above-mentioned cooling is performed at a temperature that does not impair the required radially extensibility of the innermost and outermost portions. It is necessary to carry out with the air volume and the method suitable for it. In the embodiment of FIG. 10, the air nozzle 7 is slightly inclined in the radial direction, and the inner side surfaces of the innermost peripheral portion and the outermost peripheral portion,
Alternatively, the cooling air can be intensively blown to the outer side surface.

As another measure for preventing the contour of the donut-shaped raw material solution liquid layer from being disturbed, the innermost periphery and the outermost periphery of the raw material solution liquid layer are irradiated with a laser beam to increase the viscosity of this portion. It is. That is, a thermosetting resin is mixed into the heat insulating raw material solution, and as shown in FIG. 12A, the innermost circumference and the outermost circumference of the donut-shaped heat insulating raw material solution liquid layer (the outermost circumference of the portion where the heat insulating layer 4 is formed). By irradiating the laser beam 9 containing ultraviolet rays to the edge of the outermost and innermost circumferences, the outermost and innermost edges are slightly hardened, and the fluidity of the edges is reduced. By doing so, the edge of the donut-shaped heat-insulating raw material solution layer quickly hardens and becomes less turbulent. Fig. 12
Since the outermost and innermost edges are fixed as in (B), a contour without disturbance is formed.

Still another measure is to prepare the surface of the portion outside the donut-like region forming the liquid layer of the heat-insulating raw material solution to reduce the wettability of the heat-insulating raw material solution to this surface,
This is to prevent the heat insulating raw material solution from rolling out of the region. That is, as shown in FIG. 14, a heat insulating material is provided in a region radially inward or outward (hatched in FIG. 14) of the donut-like region forming the heat insulating layer 4 with respect to the nickel surface formed on the glass master 1. A thin film 12 of a material (for example, Teflon or the like) that reduces the wettability of a solution is laminated by a sputtering method or an evaporation method. It is desirable to apply the innermost heat-insulating raw material solution coating ring and the outermost heat-insulating raw material solution coating ring at a position slightly shifted (for example, about 2 mm) from the region where the wettability is reduced. Then, even if the innermost and outermost heat-insulating raw material solutions extend somewhat in the radial direction toward the prepared surface, further spreading is prevented by the surface having reduced wettability. Will be.

[0061]

Embodiment 4 In Embodiment 4, the time required for promoting the spreading of the heat insulating material solution applied concentrically or spirally and allowing the solution to stand and cure for uniformity and smoothness of the liquid layer thickness. One of the measures is to blow hot air to improve the fluidity of the heat-insulating raw material solution.
That is, as shown in FIG. 11, air at a temperature higher than the ambient temperature is applied to the portion surrounded by the outermost and innermost circumferences of the donut-shaped heat insulating raw material solution layer (the liquid layer forming the heat insulating layer 4) by the glass master 1. Air nozzle 8 for a predetermined time while rotating
It is sprayed with. In this case, the temperature of the hot air is a temperature that slightly increases the fluidity of the heat insulating raw material solution (for example, 3 ° C.).
0 to 50 ° C). If the temperature of the hot air is too high, the solvent of the raw material solution evaporates remarkably, which causes the fluidity of the heat-insulating raw material solution to be hindered.

As another measure, irradiation of radiant heat or irradiation of high-frequency electromagnetic waves can be used instead of the above-mentioned heating with hot air. However, in the case of irradiation with radiant heat or high-frequency electromagnetic waves, it is necessary to devise so that the innermost and outermost edges of the donut-shaped heat-insulating raw material solution layer are not heated.

Another measure is to improve the spreadability of the heat-insulating raw material solution by increasing the wettability of the heat-insulating raw material solution by subjecting the coated surface of the duplicated nickel thin film to which the heat-insulating raw material solution is applied to a lower treatment. That is, as shown in FIG. 13, a material (for example, paraffin) that improves the wettability only in the donut-shaped region (hatched portion in FIG. 13) where the heat insulating layer 4 is formed with respect to the duplicated nickel surface formed on the glass master 1 And the like) are laminated by a sputtering method or a vapor deposition method. It is necessary to clarify the inner and outer edges of the thin film 11 made of a material having good wettability. However, when the thin film 11 is stacked by sputtering or vapor deposition, the stacked surface is masked. There is no problem because the edges of the stack can be defined without any problems. Irradiating ultraviolet rays in an atmosphere of ozone O ₃ to roughen the donut-shaped region of the duplicated nickel thin film is another method for improving wettability.

Still another measure is to saturate the curing atmosphere with a solvent to suppress the evaporation of the solvent in the heat-insulating raw material solution layer during the curing, thereby preventing a decrease in spreadability due to the evaporation of the solvent, and thereby, throughout the curing period. The thickness of the liquid layer is made uniform and smooth. That is, as shown in FIG. 15, a container 15 containing a solvent 14 used for dissolving the raw materials of the heat insulating layer 4 is placed in a closed container 13. As a result, the atmosphere in the container 13 where the glass master is allowed to stand and cure is maintained in a saturated state of the solvent 14, so that evaporation of the solvent from the heat insulating raw material solution 6 is suppressed during the curing period.

Further, another measure is to vibrate the glass master plate at high frequency during the curing period, and apply high frequency micro-vibration to the applied heat insulating raw material solution 6 to improve its fluidity. For this purpose, a table on which the glass master 1 on which the heat insulating raw material solution is applied in a donut shape is mounted may be vibrated by an ultrasonic vibrator or the like. The vibration frequency in this case is desirably about 28 KHz. However, the vibration time depends on the fluidity of the heat-insulating raw material solution 6, the thickness of the liquid layer, etc., and the viscosity of the heat-insulating raw material solution is 200 poises.
In this example where the thickness of the liquid layer is 500 μm, it may be about 30 seconds.

Further, as another measure, an ultrasonic wave is applied to the upper surface of the donut-shaped insulating material solution layer, and high-frequency vibration is directly applied to the liquid layer by the ultrasonic wave to improve the fluidity. Can also.

As described above, when the fluidity of the heat insulating material solution layer is increased to promote and promote the uniformity and smoothness of the liquid layer thickness, the innermost circumference and the innermost circumference of the donut-shaped heat insulating material solution layer are required. More care must be taken to prevent disturbance of the outer edges. In this case, it is one method to improve the fluidity by forming an annular barrier formed by curing the heat insulating material solution on the innermost and outermost circumferences, for example, performing warm air heating and ultrasonic vibration. is there.

[0068]

Embodiment 5 When a glass master 1 on which a heat insulating raw material solution is applied in a donut shape is fixed to a normal master fixing jig 16 and allowed to stand (FIG. 16A), the master fixing jig 16 is placed horizontally. It is not certain whether it is fixed or not. If it is not horizontal, the thickness of the heat insulating material solution layer is biased due to the influence of gravity, and as a result, the heat insulating layer 4 is uneven in thickness due to its radial position. The fifth embodiment is an example of a support mechanism that holds the glass master horizontally during the curing period in order to prevent the thickness of the heat insulating material solution layer from being shifted due to the radial position due to gravity.
One is to use the buoyancy of the liquid. That is, as shown in FIG. 16B, the glass master 1 is levitated in a mercury container 18 filled with mercury 17 and allowed to stand. Although the specific gravity of glass is about 2.5, but the specific gravity of mercury is about 13.5, it can be levitated in a state where the sinking depth of the glass master is reduced. Even if the mercury container 18 is not placed horizontally, the surface of the mercury 17 is always horizontal, so that the glass master 1 is kept horizontal. Also, since mercury is highly viscous, the horizontal support of the glass master is stable. In this example, for simplicity, the glass master was directly floated on mercury. However, in practice, a float (support) may be floated on mercury, and the glass master 1 may be placed on the float.

As another support mechanism, a float (support table) may be levitated in oil having a relatively high viscosity, and a glass master may be placed on the float. In this case, since the specific gravity of the oil is not large, it is natural that it is necessary to select the size of the float so as to secure sufficient buoyancy. It is desirable to suppress the sway of the float.

Still another supporting mechanism is that the supporting table is electromagnetically supported at three or more supporting points and floated, the level is detected by a sensor, and the electromagnetic supporting force of the supporting point is determined based on the detected data. Is to adjust. That is, as shown in FIG. 19, one support T is elastically supported by an elastic support B such as soft rubber or a spring, and a permanent magnet M is fixed to a lower surface of a corner of the support T, and an electromagnet EM is provided below the permanent magnet M. Are arranged, and the support T is levitated and supported by magnetic repulsion. When a large number of glass masters are placed on the support T for curing, the support area of the support T is large, and it is relatively easy to increase the level detection accuracy and level control accuracy. This support mechanism is effective.

[0071]

[Example of Coating Form] The form of application of the heat-insulating raw material solution by the coating nozzle varies depending on the viscosity (fluidity) of the heat-insulating raw material solution, the thickness of the formed heat-insulating raw material solution layer, the coating pitch, and the like. Are schematically shown in FIGS. 20 (a), 20 (b) and 20 (c). FIG.
0 (a) shows a case where the fluidity of the heat-insulating raw material solution is high, and the mountain of the heat-insulating raw material solution is greatly collapsed at the moment of application, forming a flat mountain shape with a widened skirt. In this case, the bottom of the crest of one heat-insulating raw material solution greatly overlaps with the bottom of the crest of the subsequently applied heat-insulating raw material solution, and a relatively flat continuous corrugated liquid layer is formed immediately after the application. Become. In such a case, it is possible to increase the application pitch per unit time from the application nozzle and to increase the application pitch, and uniformity and smoothness of the thickness can be completed in a relatively short time.

FIG. 20 (b) shows that the fluidity of the heat-insulating raw material solution is smaller than that of the case of FIG. 20 (a). The shape (solid line in the figure) is stopped, and a case is shown where the peaks are separated from each other. In this case as well, the hills gradually collapse with the passage of time, and the skirts widen, and the skirts eventually come into contact to form a continuous uneven liquid layer (dashed line in the figure). After that,
The movement of the heat-insulating raw material solution is accelerated by the internal pressure difference (due to the drop between the peak and the valley), and the uniformity and smoothness of the thickness progress relatively quickly.

FIG. 20 (c) shows that the fluidity of the heat-insulating raw material solution is smaller than in the case of FIG. 20 (b).
The case where the mountain of the heat-insulating raw material solution is almost collapsed and the shape of the mountain which is relatively high is stopped is shown. In this case, the amount of pour per unit time from the application nozzle is reduced and the application pitch is made dense. In this case, the heat-insulating raw material solution layer having relatively small irregularities is formed immediately after the application.
When the fluidity is high and it is difficult to make the thickness uniform and smooth, the fluidity may be improved by heating, vibrating, or the like.

[0074]

Embodiment 6 A rotary table on which a master stamper master or a mother stamper master (generally referred to as a stamper master) is mounted and rotated, and a drive mechanism of the rotary table need not be special, as in the above-mentioned prior art. . Also, the application nozzle and its radial drive mechanism need not be special. In the example shown in FIG. 21, the diameter d of the spout of the nozzle head 100 is 2 mm, which is 1 m in diameter.
The tip of the m needle 101 is inserted, and the needle 101 is moved in the axial direction by the adjusting device 102 to adjust the amount of the heat-insulating raw material solution flowing out of the application nozzle 99 per unit time. In this example, the effective sectional area of the nozzle port is adjusted by inserting and removing the needle 101, but the effective sectional area of the nozzle port is not changed, and the unit pressure of the heat-insulating raw material solution is adjusted by adjusting the discharge pressure of the heat-insulating raw material solution. It is also possible to adjust the amount of outflow per hit. However, the above-described embodiment is optimal for increasing the adjustment accuracy of the outflow amount. The stem 110 of the nozzle head 99 is
Slidably inserted into the horizontal hole of the stem 110
Is driven in the horizontal direction by a drive pinion 112 meshing with the rack. A supply pipe 113 is slidably inserted into the stem 110, and the heat-insulating raw material solution is supplied from the supply pipe 113. Since the horizontal movement stroke of the nozzle head 99 is not large, if a flexible hose is connected to the outer end of the stem 110, a sliding type expansion and contraction joint between the supply pipe 113 and the stem 110 is unnecessary.

The specific control mechanism of the apparatus for applying a heat insulating raw material solution according to the present invention does not need to be special. An example of the system is conceptually shown in FIG. That is, the rotation speed of the table driving device 200 is controlled by the table control device 201, the application nozzle driving device 202 is controlled by the movement control device 203, and the application nozzle adjusting device 204 is controlled by the ejection control device 205. Since the rotation speed of the table, the rotation / stop and the horizontal movement speed of the coating nozzle, the movement / stop and the dispensing amount per unit time from the coating nozzle, and the discharge / stop are related to each other, the above-described table control device 201, movement control device 203, dispensing control device 2
05 is controlled by the main controller 300. For example, when the heat-insulating raw material solution is applied concentrically, the table controller 201 controls the rotation speed and rotation / stop of the table in accordance with a command from the main controller 300 based on the program, and further, based on the program. Main controller 3
In response to a command from 00, the movement control device 203 controls the movement / stop and movement stroke of the application nozzle in the horizontal direction,
Further, based on a program, the injection control device 205 controls the injection / stop of the application nozzle and the injection amount per unit time in accordance with a command from the main control device 300. Thus, the heat-insulating raw material solution is applied at a predetermined interval and at a predetermined application amount per unit area.

[0076]

[Effects] The effects of the present invention are summarized below for each main claim. 1. The invention according to claim 1 is an invention according to claim 1, which is a basic invention, in which a heat insulating raw material solution is supplied while rotating the stamper master (master stamper master or mother stamper master) on which the duplicated nickel film having a predetermined thickness is laminated. The application nozzle is moved in the radial direction on the stamper master, and a large number of concentric or spiral heat-insulating raw material solutions are applied to the back surface of the duplicated nickel film, and the stamper master on which the heat-insulating raw material solution has been applied is allowed to stand. The heat insulating raw material solution applied concentrically or spirally is spread in the radial direction of the stamper master to form a donut-shaped and smooth heat insulating raw material solution layer, which is cured to form a donut-shaped A method of manufacturing a heat insulating stamper, comprising forming a heat insulating layer. The invention according to claim 1 simplifies the manufacturing operation of the heat insulating stamper because the applied heat insulating raw material solution is used for forming the heat insulating layer without waste, and a mask is not required, and the labor for mounting and removing the mask can be omitted. As a result, the production efficiency can be significantly improved. In addition, since the rotation control of the stamper master, the radial movement control of the application nozzle, and the control of the injection of the heat-insulating material solution are performed mechanically and electrically, the spiral or concentric application of the heat-insulating material solution must be performed manually. It is done very simply. Therefore, it is possible to completely automate the process of forming the heat insulating layer. Therefore, the invention according to claim 1 eliminates waste of heat insulating raw materials, eliminates the need for a mask,
The simplification and complete automation of the heat insulating layer forming operation can significantly reduce the manufacturing cost of the heat insulating stamper.

Further, the innermost and outermost edges of the donut-shaped heat-insulating layer are not formed by a mask.
Since the applied heat-insulating raw material solution is formed naturally by extending outward in the radial direction, the innermost and outermost edges are disturbed (if a mask is used, it is disturbed by the mask removing operation). There is no. In addition, since this edge has a gentle hem shape when viewed microscopically, there is no steep step, and therefore, the electroformed laminate of the coated nickel layer is formed smoothly also at the above-mentioned edge of the heat insulating layer. You. On the other hand, in the prior art in which the above-mentioned edge of the heat insulating layer is stepped, the coated nickel electroformed laminate is not formed smoothly at this step portion, and therefore, the layer is broken at this edge portion and the heat insulating layer is not formed. Although there is a possibility that the edge is exposed and becomes a defective product, according to the invention according to claim 1, as described above, the electroformed laminate of the coated nickel layer is formed smoothly also at the edge of the heat insulating layer. Therefore, the above problem does not occur at all, and the product yield increases accordingly.

2. Regarding the invention according to claim 2 According to the invention according to claim 2, in the method for manufacturing a heat-insulating stamper according to claim 1, the application amount of the heat-insulating raw material solution per unit area of application is made uniform regardless of the radial position. Thus, the invention is characterized in that the rotation control of the master stamper master or the mother stamper master and the radial movement of the application nozzle are controlled. If the dispensing amount per unit area of the heat-insulating raw material solution by the application nozzle differs depending on the radial position, it is inevitable that the thickness of the heat-insulating raw material solution layer is biased depending on the radial position. Becomes uneven depending on the radial position. The invention according to claim 2 is for equalizing the amount of the heat-insulating raw material solution injected per unit area by the application nozzle,
The thickness of the heat insulating raw material solution layer does not become uneven depending on the radial position.

3. According to a third aspect of the present invention, in the method for manufacturing an insulated stamper according to the second aspect, the stamper master is continuously rotated at a constant speed, and the radial moving speed of the application nozzle is changed according to the radial position. And the spiral application pitch is varied depending on the radial position. This makes it possible to equalize the amount of the heat-insulating raw material solution that is ejected per unit area by the application nozzle with extremely simple control of adjusting the moving speed of the application nozzle in the radial direction.

4. According to a fourth aspect of the present invention, in the method for manufacturing a heat-insulating stamper according to the second aspect, the moving speed of the application nozzle in the radial direction is kept constant, the stamper master is continuously rotated, and the rotational speed is applied. It is characterized in that the amount is changed according to the radial position of the nozzle, and thereby the amount of the heat-insulating raw material solution applied in a spiral shape is varied according to the radial position. This makes it possible to equalize the amount of the heat-insulating raw material solution to be poured out per unit area by the application nozzle with extremely simple control of changing the rotation speed of the stamper master according to the radial position of the application nozzle.

5. Regarding the invention according to claim 5, the invention according to claim 5 is a method according to claim 2, wherein the stamper master is intermittently rotated at a constant speed and the coating nozzle is moved intermittently in a radial direction to thereby obtain a large number of pieces. Concerning the application of the insulating material solution concentrically, the rotational speed of the stamper master is changed according to the radial position of the application nozzle, and the application amount of the insulating material material applied concentrically is varied according to the radial position. It is characterized by having. This allows the application nozzle to rotate intermittently in the radial direction while intermittently rotating the stamper master while changing the rotation speed of the stamper master in accordance with the radial position of the coating nozzle. The amount of the raw material solution to be poured out per unit area can be equalized.

6. Regarding the invention according to claim 6, the invention according to claim 6 is the method for manufacturing a heat-insulating stamper according to claim 2, wherein the stamper master is intermittently rotated and the application nozzle is intermittently moved in the radial direction to form a large number of concentric circles. In applying the heat-insulating raw material solution, the rotation speed of the glass master or the like is kept constant, and the moving pitch of the coating nozzle in the radial direction is changed in accordance with the radial position. It is characterized in that it differs depending on the direction position. This allows the stamper master to rotate intermittently and intermittently move the application nozzle in the radial direction while changing the radial movement pitch of the application nozzle in accordance with the radial position. Can be equalized per unit area.

7. According to a seventh aspect of the present invention, in the method for manufacturing a heat insulating stamper according to the first aspect, a coating nozzle is provided such that a coating amount of a heat insulating raw material solution per coating unit area is uniform regardless of a radial position. Is controlled according to the radial position. This makes it possible to equalize the amount of the heat-insulating raw material solution discharged from the application nozzle per unit area by extremely simple control of controlling the supply from the application nozzle according to the radial position.

8. Regarding the invention according to claim 8, the invention according to claim 8 is the method for manufacturing a heat-insulating stamper according to claim 7, wherein the stamper master is continuously rotated, the coating nozzle is continuously moved in the radial direction, and the application nozzle is spirally applied, The present invention is characterized in that the heat-insulating raw material solution is applied in a broken line shape by intermittently pouring from the application nozzle, and the interval of the above-mentioned pouring is changed according to the radial position of the application nozzle.
This makes it possible to keep the rotation speed of the stamper master and the moving speed of the coating nozzle in the radial direction constant while intermittently pouring from the coating nozzle and change the pouring interval according to the radial position. The amount of the heat-insulating raw material solution to be poured out per unit area by the application nozzle can be made uniform by appropriate control.

9. According to a ninth aspect of the present invention, in the method for manufacturing a heat-insulating stamper according to the seventh aspect, the stamper master is continuously rotated, and the coating nozzle is intermittently moved in the radial direction to apply a large number of concentric circles. Then, the heat-insulating raw material solution is applied in a broken line shape by intermittently pouring from the application nozzle, and the interval of the pouring is changed according to the radial position of the application nozzle. With this, the rotation speed of the stamper master is kept constant and the radial movement of the coating nozzle is intermittent,
With the simple control of intermittent pouring from the coating nozzle and changing the pouring interval in accordance with the radial position of the coating nozzle, the amount of the heat-insulating raw material solution discharged by the coating nozzle per unit area is evenly distributed. can do.

10. About the invention according to claim 10 The invention according to claim 10 is a method for manufacturing a heat-insulating stamper according to claim 1, wherein the coating amount of the heat-insulating raw material solution is equalized regardless of the radial position. The present invention is characterized in that the amount of the heat insulating raw material solution discharged from the nozzle per unit time is controlled. Thus, the amount of the heat-insulating raw material solution per unit area discharged by the application nozzle can be made uniform only by controlling the amount of the heat-insulating raw material solution discharged from the application nozzle per unit time.

11. Regarding the invention according to claim 11, the invention according to claim 11 is the method for manufacturing a heat insulating stamper according to claim 10, wherein the application nozzle is a nozzle with a single spout, and the amount of the heat insulating raw material solution discharged per unit time is reduced. It is characterized in that it is changed according to the radial position of the application nozzle, whereby the amount of the heat-insulating raw material solution applied concentrically or spirally is varied according to the radial position. In this way, the amount of the insulating raw material solution discharged from the coating nozzle per unit area can be made uniform by simply controlling the amount of the insulating raw material solution that is discharged from the single coating nozzle per unit time. be able to.

12. Regarding the invention according to claim 12, the invention according to claim 12 is the method for manufacturing a heat-insulating stamper according to claim 10, wherein the application nozzle is a multiple nozzle having a large number of outlets having different diameters, and the diameter of each outlet is reduced. Depending on its radial position, the amount of heat raw material solution discharged from each spout per unit time is changed according to its radial position, whereby the heat raw material solution applied concentrically is changed. It is characterized in that the amount of application is varied according to the radial position. According to the present invention, since the amount of heat source material solution discharged from each spout per unit time can be varied according to its radial position by the structure of the coating nozzle, the heat source material solution applied concentrically is coated. It is possible to equalize the amount of the heat-insulating raw material solution injected per unit area by the application nozzle without performing any special control for adjusting the amount.

13. The invention according to claim 13 is an invention according to claim 13, in the method for manufacturing a heat-insulating stamper according to claim 10, wherein the application nozzle is a multiple nozzle having a plurality of spouts, and the interval between the spouts is set in the radial direction. The method is characterized in that the heat source material solution applied concentrically is made different according to the position in the radial direction. According to the present invention, the amount of heat source material solution to be discharged from each spout per unit time can be varied according to the radial position of the heat source material solution by the structure of the application nozzle. Therefore, the amount of the heat-insulating raw material solution to be discharged per unit area by the application nozzle can be made uniform without performing any special control.

14. Regarding the invention according to claim 14, the invention according to claim 14 is characterized in that, in the method for manufacturing a heat insulating stamper according to claim 1, the thickness of the heat insulating raw material solution layer generated because the master stamper master or the mother stamper master is not horizontal is uniform. As a result, the stamper master is accurately held horizontally. If the master stamper master or the mother stamper master is not held accurately and horizontally, the applied heat-insulating raw material solution moves to the lower side, the lower one becomes thicker, and the higher one becomes thicker. It is inevitable that the thickness of the raw material solution layer becomes non-uniform depending on the radial position. However, the present invention mechanically and automatically holds the stamper master horizontally so that the thickness of the heat-insulating raw material solution layer due to the inclination can be reduced. Non-uniformity due to the radial position can be reliably avoided.

15. Regarding the invention according to claim 15, the invention according to claim 15 is the method for manufacturing a heat insulating stamper according to claim 14, wherein the master stamper master using the glass master is floated on mercury, and the large buoyancy and high viscosity of mercury are utilized. The present invention is characterized in that the glass master is stably held in an accurate horizontal state. Since the master stamper master using the glass master is held horizontally using the large buoyancy of mercury, the horizontal holding mechanism of the master stamper master is simple, and the stamper master can be stably held with extremely high horizontal accuracy. Can be.

16. Regarding the invention according to claim 16, the invention according to claim 16 is the method for manufacturing an insulated stamper according to claim 15, wherein a float is floated on mercury in a mercury tank via a flexible thin film, and the master stamper master or The present invention is characterized in that a mother stamper master is placed. The present invention does not float the stamper master directly on mercury, but floats it on the mercury via the flexible film. Therefore, there is no possibility that mercury adheres to the stamper master and the handling is easy and easy. .

17. The invention according to claim 17 is a method according to claim 14, wherein the float is floated in a high-viscosity oil tank, and the master stamper master or the mother stamper master is mounted on the float. It is characterized by the following. Although the specific gravity of the oil is smaller than that of the glass master, a sufficient buoyancy can be secured by interposing a float, and the stamper master can be held in an accurate horizontal state by the buoyancy of the oil.

18. Regarding the invention according to claim 18, the invention according to claim 18 is the method for manufacturing a heat-insulating stamper according to claim 14, wherein the support base is levitated by electromagnetic force, and the electromagnetic force is reduced based on horizontality detection data by a horizontal sensor. It is characterized in that the support is adjusted so as to be kept horizontal. The present invention electromagnetically holds the support base in a horizontal state based on horizontal detection data obtained by a horizontal sensor. Therefore, a relatively large support base and a support base with a stamper master mounted thereon are provided. Irrespective of the position of the center of gravity of the camera, it can be accurately maintained in a horizontal state.

19. Regarding the invention according to claim 19 The invention according to claim 19 is characterized in that, in the method for manufacturing a heat insulating stamper according to claim 1, the applied heat insulating raw material solution is heated to increase its fluidity. is there. Regardless of the heating method and heating means, by heating the doughnut-shaped heat-insulating raw material solution layer to improve its fluidity, uniformity of the thickness of the heat-insulating raw material solution layer and promotion of smoothing are promoted. In addition, the curing time for making the thickness uniform and smooth can be shortened, and the production efficiency can be improved.

20. According to a twentieth aspect of the present invention, in the method of manufacturing a heat insulating stamper according to the nineteenth aspect, the surface of the applied heat insulating raw material solution is removed except for the innermost and outermost portions of the donut-shaped heat insulating raw material solution layer. And heated by blowing hot air through an air nozzle. Since the present invention is based on a simple heating mechanism using hot air blown by an air nozzle, the manufacturing cost of the apparatus is low, and the adjustment of the amount of hot air to be blown and the temperature of hot air are simple. Adjustment can be easily performed.

21. Regarding the invention according to claim 21, the invention according to claim 21 is characterized in that, in the method for manufacturing a heat-insulated stamper according to claim 1, the support table on which the master stamper master or the mother stamper master is placed is vibrated by an ultrasonic vibrator, The method is characterized in that ultrasonic vibration is applied to the applied heat insulating raw material solution layer. Since high-frequency vibration is applied to the entire heat-insulating raw material solution layer to impart fluidity, uniformity and smoothness of the thickness of the heat-insulating raw material solution layer are promoted. Therefore, it is possible to improve the production efficiency by shortening the curing period for making the thickness uniform and smooth.

22. The invention according to claim 22 is a method according to claim 1, wherein the surface of the applied heat-insulating raw material solution layer is irradiated with ultrasonic waves, and the heat-insulating raw material solution layer is irradiated with ultrasonic waves. It is characterized by applying vibration. Since ultrasonic waves are applied to the surface of the heat-insulating raw material solution layer and ultrasonic vibration is applied to it, the control of ultrasonic vibration is easy, the ultrasonic vibration mechanism is simple, and the stamper master support A special support mechanism is not required and a simple support mechanism is required.

23. According to a twenty-third aspect of the present invention, in the method of manufacturing a heat-insulating stamper according to the twenty-second aspect, the ultrasonic wave is prevented from being applied to the innermost and outermost edges of the heat-insulating raw material solution layer. It is characterized by the following. By irradiating ultrasonic waves to the innermost and outermost edges of the heat insulating raw material solution layer, the fluidity of the innermost and outermost edges is increased, thereby preventing the edges from being disturbed. Can be avoided.

24. According to a twenty-fourth aspect of the present invention, in the method for manufacturing a heat-insulating stamper according to the nineteenth aspect, the surface of the applied heat-insulating raw material solution layer is irradiated with a high-frequency electromagnetic wave to thereby provide the heat-insulating raw material. It is characterized in that the solution layer is heated. Since heating is performed by irradiating a high-frequency electromagnetic wave, the entire heat-insulating raw material solution layer is quickly heated, and the fluidity of the whole is rapidly improved. Therefore, the curing time for making the thickness uniform and smooth can be shortened, and the production efficiency can be improved. In addition, since the adjustment of the irradiation range of the high-frequency electromagnetic wave is performed relatively accurately, disturbance of the innermost and outermost edges of the heat-insulating raw material solution layer due to the irradiation of the high-frequency electromagnetic wave to the outermost edge is prevented beforehand. Can be avoided.

25. According to a twenty-fifth aspect of the present invention, in the method for manufacturing a heat insulating stamper according to the twenty-fourth aspect, the intensity distribution of the high-frequency electromagnetic waves is controlled to easily adjust the heating intensity in accordance with the radial position. It is characterized by doing so. The applied donut-shaped heat-insulating raw material solution layer has a different degree of spreading depending on its radial position, but by adjusting the irradiation intensity distribution of the high-frequency electromagnetic wave in accordance with this difference, the desired heating is achieved. An intensity distribution can be realized.

26. According to a twenty-sixth aspect of the present invention, in the method for manufacturing a heat-insulating stamper according to the first aspect, the surface of the donut-shaped heat-insulating layer forming region of the duplicated nickel layer is pretreated to wettability to the heat-insulating raw material solution. It is characterized in that Thereby, since the heat insulating raw material solution is smoothly spread along the surface of the duplicated nickel layer in the donut-shaped region, the thickness of the heat insulating raw material solution layer is made uniform, and the curing time for smoothing is shortened. Production efficiency can be improved.

27. According to a twenty-seventh aspect of the present invention, in the method for manufacturing a heat-insulating stamper according to the first aspect, the atmosphere of the sealed container is saturated with a solvent of the heat-insulating raw material solution, and the heat-insulating raw material solution is applied in a donut shape. The master is placed in the container and cured for a predetermined time. Since the atmosphere in the closed container is saturated with the solvent, evaporation of the solvent of the heat-insulating raw material solution during the curing period is suppressed. Therefore, a decrease in the fluidity of the heat-insulating raw material solution due to the evaporation of the solvent is avoided, and during the curing period, the high fluidity of the heat-insulating raw material solution is maintained, and the uniformity and smoothness of the thickness of the heat-insulating raw material solution layer are promptly achieved. You. Therefore, the curing time can be shortened and the production efficiency can be improved.

28. The invention according to claim 28 is a method according to claim 1, wherein in the method for manufacturing a heat insulating stamper according to claim 1, cooling air is blown by an air nozzle at an innermost circumference and an outermost circumference of the applied donut-shaped heat-insulating raw material solution. To quickly reduce the fluidity of the innermost and outermost edges, thereby suppressing radially inward and outward extensions of the inner and outer edges of the donut-shaped heat-insulating raw material solution layer. Thus, the edge is prevented from being disturbed. By quickly curing the innermost and outermost edges of the donut-shaped insulating raw material solution and reducing its fluidity, the above-mentioned innermost and outermost edges due to natural spreading are effectively prevented from being disturbed. Is done.

29. According to a twenty-ninth aspect of the present invention, in the method for manufacturing a heat insulating stamper according to the first aspect, an ultraviolet curable resin is mixed in the heat insulating raw material solution, and the innermost periphery of the applied heat insulating raw material solution is mixed. ,
The outermost edge is irradiated with a light beam containing ultraviolet rays, whereby the fluidity of the innermost surface and the outermost surface is rapidly reduced. Since the irradiation range of the light beam can be easily regulated, the flowability of the innermost and outermost edges of the heat-insulating raw material solution can be reduced in a limited and rapid manner by this light beam irradiation. Therefore, disturbance due to the extension of the innermost and outermost edges can be effectively prevented.

30. Regarding the invention according to claim 30 The invention according to claim 30 is a method of manufacturing a heat-insulating stamper according to claim 1, wherein the inside of the donut-shaped heat-insulating layer forming region of the duplicated nickel layer is treated in the radial direction and the outside in the radial direction by heat treatment. It is characterized in that the spreadability of the raw material solution is reduced. Since the heat insulating raw material solution layer in the donut-shaped region is prevented from spreading outside the region, disturbance due to uneven spreading of the innermost and outermost edges of the heat insulating raw material solution layer is prevented.

31. Regarding the invention according to claim 31, The invention according to claim 31 is the method for manufacturing a heat-insulating stamper according to claim 1, wherein a high-viscosity heat-insulating raw material is provided on the outermost and innermost circumferences of the donut-shaped region to which the heat-insulating raw material solution layer is applied. A solution is applied, and the outermost and innermost circumferences are formed as high-viscosity layers. The highly viscous layer is highly viscous on the outermost and innermost circumferences of the heat insulating raw material solution layer, and therefore has a small spreadability in the radial direction. Therefore, the outermost circumference due to uneven spreading of the insulating raw material solution layer applied in a donut shape,
Disturbance of the innermost peripheral edge is prevented.

32. Regarding the invention according to claim 32 According to the invention according to claim 32, a duplicate nickel film having a predetermined thickness is formed on a master stamper master or a mother stamper master on which a predetermined information recording groove has been formed, and a heat-sensitive material such as polyimide is formed thereon. Apply a heat-insulating raw material solution in which a heat-insulating raw material with low conductivity and high heat resistance is dissolved in a solvent to form a donut-shaped heat-insulating raw material solution layer. This is firmly adhered to the duplicated nickel film, furthermore, a nickel electroformed coating layer 2b of a predetermined thickness is laminated on the heat insulating layer and the duplicated nickel film is peeled off from the master. An application nozzle for applying the heat-insulating raw material solution to the duplicate nickel film while rotating the master on which the duplicate nickel film having a predetermined thickness is laminated. A moving means for moving the coating nozzle in the radial direction on the master is provided. The invention according to claim 31 has the same effect as the above-mentioned effect of the invention according to claim 1, and can manufacture a high-quality heat insulating stamper at low cost.

33. Regarding the invention according to claim 33 The invention according to claim 33 is the apparatus for manufacturing an insulated stamper according to claim 32, characterized by comprising a control means for controlling rotation and rotation speed of the stamper master. . Thus, simply by controlling the rotation and the rotation speed of the stamper master, the heat-insulating raw material solution applied amount per unit area is made uniform regardless of the radial position, and the heat-insulating raw material solution layer caused by the uneven application amount is obtained. Can be avoided due to the radial position.

34. Regarding the invention according to Claim 34 The invention according to Claim 34 is the manufacturing apparatus for an insulated stamper according to Claim 32, further comprising control means for controlling the movement and the movement speed of the movement means of the heat-insulating raw material solution application nozzle. It is a feature. Thus, simply by controlling the radial movement and the moving speed of the heat-insulating raw material solution application nozzle, the heat-insulating raw material solution application amount per unit area is made uniform regardless of the radial position, thereby causing the above-mentioned uneven application amount. It is possible to avoid bias due to the radial position of the heat insulating raw material solution layer.

35. Regarding the invention according to claim 35 The invention according to claim 35 is characterized in that, in the apparatus for manufacturing an insulated stamper according to claim 33, there is provided control means for controlling the movement and movement speed of the movement means of the heat-insulating raw material solution application nozzle. It is a feature. Thereby, the application amount per unit area according to the position in the radial direction can be more precisely and uniformly made.

36. The invention according to Claim 36 The invention according to Claim 36 is the apparatus for manufacturing a heat-insulating stamper according to Claim 32, further comprising control means for controlling the amount of the heat-insulating raw material solution to be discharged from the heat-insulating raw material solution application nozzle per unit time. It is characterized by having. This makes it possible to equalize the applied amount of the heat-insulating raw material solution per unit area irrespective of the position in the radial direction simply by controlling the amount discharged from the application nozzle per unit time.

37. Regarding the invention of claim 37 The invention of claim 37 is the invention of claim 33 or claim 34
The manufacturing apparatus of the heat insulating stamper of the above is characterized by comprising a control means for controlling the amount of the heat insulating raw material solution discharged from the heat insulating raw material solution application nozzle per unit time. Thereby, the application amount per unit area according to the position in the radial direction can be more precisely and uniformly made.

38. Regarding the invention according to claim 38 According to the invention according to claim 38, a duplicate nickel film having a predetermined thickness is formed on a master stamper master or mother stamper master on which a predetermined information recording groove is formed, and a polyimide or the like is formed thereon. Apply a heat-insulating raw material solution obtained by dissolving a heat-insulating raw material with low thermal conductivity and high heat resistance in a solvent to form a donut-shaped heat-insulating raw material solution layer. At the same time, a nickel electroformed coating layer 2b having a predetermined thickness is laminated on the heat insulating layer, and the duplicate nickel film is peeled off from the master to produce a predetermined thickness. While rotating the master on which the duplicate nickel film is laminated, the application nozzle of the heat-insulating raw material solution is moved in the radial direction on the master, and the replication is performed. A large number of concentric or spiral heat-insulating raw material solutions are applied to the back surface of the nickel film, and the stamper master on which the heat-insulating raw material solutions are applied is left to cure, and is concentrically or spirally applied. Is spread in the radial direction of the stamper master to generate a donut-shaped and smooth heat-insulating raw material solution layer, which is cured to have a donut-shaped heat-insulating layer. In the heat insulating stamper of the present invention, since the innermost and outermost edges of the donut-shaped heat insulating layer are not steep and have a gentle slope, the nickel coating film in the next nickel electroforming step is smooth. Formed with high precision. Therefore, the nickel coating film is a normal high-quality heat insulating stamper. Therefore, a high-quality optical disc substrate transferred with high accuracy can be efficiently manufactured by the heat insulating stamper, and the product yield is improved.

[Brief description of the drawings]

1 (a) and 1 (b) are conceptual diagrams showing a manufacturing process of a heat insulating stamper according to the prior art.

FIG. 2 is a perspective view of a heat insulating raw material solution applied state in Example 1.

FIG. 3 is a perspective view showing a state where a heat insulating raw material solution layer is formed in Example 1.

FIG. 4 is a perspective view of another heat insulating raw material solution applied state in Example 1.

FIG. 5 is a diagram showing a relationship between a radial position of an application nozzle and a moving speed in a radial direction in the first embodiment.

FIG. 6 is a diagram illustrating a relationship between a radial position of a coating nozzle and a rotation speed of a stamper master according to the first embodiment.

FIG. 7 is a diagram showing the relationship between the radial position of the application nozzle and the amount of the heat-insulating raw material solution discharged from the application nozzle per unit time in Example 1.

FIG. 8 is a perspective view of a heat insulating raw material solution applied state in Example 2.

FIG. 9 shows the relationship between the radial position of the coating nozzle and the rotation speed of the stamper master in Example 2, the radial position of the coating nozzle in Example 2, and the heat-insulating raw material solution injection from the coating nozzle per unit time. It is a figure which shows the relationship with output.

FIG. 10 is a perspective view showing an air-cooled state by air nozzles at the innermost and outermost edges of the heat-insulating raw material solution layer in Example 3.

FIG. 11 is a perspective view showing a state in which a heat-insulating raw material solution layer is heated with hot air by an air nozzle in Example 4.

FIG. 12A is a cross-sectional view showing a state in which a light beam is applied to the innermost periphery and the outermost periphery of the heat-insulating raw material solution layer,
(B) is a sectional view schematically showing a state in which the innermost and outermost edges of the heat-insulating raw material solution layer are hardened by light beam irradiation.

FIG. 13 is a perspective view of a stamper master according to a fourth embodiment, showing a state in which a donut-shaped region to which a heat-insulating raw material solution is applied has been subjected to a treatment for increasing wettability.

FIG. 14 is a perspective view of a stamper master showing a state in which a process for reducing wettability has been performed on the inner surface and the outer surface in the radial direction outside the donut-shaped region to which the heat-insulating raw material solution is applied.

FIG. 15 is a perspective view of an example of a container for curing a donut-shaped region coated with a heat insulating raw material solution.

16A is a cross-sectional view schematically showing the horizontality of the stamper master and the deviation of the thickness of the heat-insulating raw material solution layer in Example 5, and FIG. 16B is a cross-sectional view of the stamper master using the buoyancy of mercury. FIG. 7 is a cross-sectional view schematically showing a horizontal holding state of holding the camera.

FIG. 17 is a cross-sectional view showing a state in which a molten resin is filled in a cavity of an optical disk molding die.

FIG. 18 is a sectional view of a conventional heat insulating stamper.

FIG. 19 is a perspective view of a horizontal holding example in which a stamper master is horizontally held by an electromagnetic force according to the fifth embodiment.

FIGS. 20 (a), (b) and (c) are cross-sectional views schematically showing forms of a heat-insulating raw material solution immediately after being applied by an application nozzle.

FIG. 21 is a sectional view of an embodiment of a coating nozzle and a moving device thereof.

FIG. 22 is a conceptual diagram of an example of a heat insulating raw material solution application system.

[Explanation of symbols]

1: glass master (master stamper master) 1a, 1a ': concave / convex fine pattern 2, 2a, 2b: nickel layer (2a: first nickel, 2b: second nickel) 3a: inner peripheral mask 3b: outer peripheral mask 4: heat insulating layer 5: Coating nozzle 6: Raw material of heat insulating layer 7: Air nozzle for cooling 8: Air nozzle for heating 9: Laser beam 10: Heat insulating stamper 10a: Area 5 mm inside the innermost circumference of the recording area 10b: 5 mm outside the outermost circumference of the recording area 11: Thin film made of a material that improves wettability 12: Thin film made of a material that deteriorates wettability 13: Sealed space 14: Solvent 15: Container without lid 16: Fixing jig 17: Mercury 18: Mercury container 181: Transfer surface 182: Transfer nickel layer 183: Heat insulation layer 185: Nickel layer (coated nickel layer) 200: Te Table driving device 201: table control device 202: coating nozzle driving device 203: coating nozzle movement control device 204: coating nozzle adjustment device 205: pouring control device

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 4F202 AE02 AF01 AG01 AG05 AG19 AH38 AJ02 AJ03 AR08 CA11 CB01 CD04 CD07 CD22 CK43 CL01 CN01 5D121 CA01 CA03 CA05 CB01 CB03 CB07 CB08 DD05 DD07 EE22 EE23 GG07

Claims (39)

[Claims] 1. A heat-insulating raw material having a low thermal conductivity and a high heat resistance, such as polyimide, on which a duplicate nickel film having a predetermined thickness is formed on a master stamper master or a mother stamper master having information recording grooves formed thereon. Is applied in a solvent to form a donut-shaped insulating raw material solution layer, which is heated and the solvent component is blown off to cure and form a heat insulating layer, which is firmly adhered to the duplicated nickel film. In addition, in the method for manufacturing a heat insulating stamper in which a nickel electroformed coating layer having a predetermined thickness is laminated on the heat insulating layer and the duplicate nickel film is peeled off from the stamper master, the duplicate nickel film having a predetermined thickness is formed. While rotating the stamper master provided, the application nozzle of the heat-insulating raw material solution was moved in the radial direction on the master, so that a large number of A number of concentric or spiral coatings of the heat-insulating raw material solution are applied, and the stamper master on which the heat-insulating raw material solution is applied is left to cure, and the heat-insulating raw material solution applied concentrically or spirally is coated on the stamper master. A method for producing a heat-insulating stamper, comprising: forming a donut-shaped heat-insulating raw material solution layer having a uniform thickness and smoothness by extending in a radial direction; and curing the heat-insulating raw material solution layer to form a donut-shaped heat insulating layer. 2. Controlling the rotation of the master stamper master or mother stamper master or controlling the radial movement of the coating nozzle so that the amount of the heat-insulating raw material solution applied per unit area is uniform regardless of the radial position. Claim 1
Manufacturing method of thermal insulation stamper. 3. The master stamper master or mother stamper master is continuously rotated at a constant speed, and the radial moving speed of the coating nozzle is changed in accordance with the radial position, whereby the spiral coating pitch is shifted to the radial position. 3. The method of manufacturing a heat insulating stamper according to claim 2, wherein the heat insulating stamper is made different depending on the condition. 4. A constant moving speed of a coating nozzle in a radial direction, a master stamper master or a mother stamper master is continuously rotated, and the rotation speed is changed in accordance with a radial position of the coating nozzle, thereby forming a spiral shape. 3. The method for manufacturing a heat insulating stamper according to claim 2, wherein the amount of the heat insulating raw material solution to be applied is varied according to the radial position. 5. A method according to claim 1, wherein the master stamper master or the mother stamper master is intermittently rotated at a constant speed and the application nozzle is intermittently moved in the radial direction to apply the heat insulating raw material solution in a number of concentric circles. 3. The heat insulation according to claim 2, wherein the rotation speed is changed according to the radial position of the application nozzle, whereby the amount of the heat-insulating raw material solution applied concentrically is changed according to the radial position. Manufacturing method of stamper. 6. A master stamper master or a mother stamper master is intermittently rotated and an application nozzle is intermittently moved in a radial direction to apply a plurality of concentric insulating material solutions. The rotating speed is kept constant, and the radial movement pitch of the coating nozzle is changed according to the radial position, whereby the interval between the concentric coating rings is made different according to the radial position. 2. A method for manufacturing a heat insulating stamper. 7. The method according to claim 1, wherein the injection of the heat-insulating raw material solution from the application nozzle is controlled so that the application amount per unit area is uniform regardless of the radial position. 8. A master stamper master or a mother stamper master is continuously rotated to continuously apply a heat insulating raw material solution by continuously moving a coating nozzle in a radial direction, and intermittently discharge the coating nozzle from the coating nozzle. 8. The method for manufacturing a heat insulating stamper according to claim 7, wherein the raw material solution is applied in a broken line shape, and the interval of the pouring is changed according to the radial position of the application nozzle. 9. A master stamper master or a mother stamper master is continuously rotated to intermittently move a coating nozzle in a radial direction to apply a large number of concentric circles of a heat insulating raw material solution and to intermittently discharge the coating nozzle from the coating nozzle. 8. The method for manufacturing a heat insulating stamper according to claim 7, wherein the heat insulating raw material solution is applied in a dashed shape by means of a dashed line, and the interval of the pouring is changed according to the radial position of the application nozzle. 10. The amount of the heat-insulating raw material solution discharged from the application nozzle per unit time is controlled so that the coating amount per unit area of the heat-insulating raw material solution is uniform regardless of the radial position. Item 10. A method for manufacturing a heat insulating stamper according to item 1. 11. A coating nozzle having a single spout, wherein the amount of the heat-insulating raw material solution to be discharged per unit time is changed according to the radial position of the coating nozzle, whereby the coating is performed concentrically or spirally. 11. The method for manufacturing a heat insulating stamper according to claim 10, wherein the amount of the applied heat insulating raw material solution is varied according to the radial position. 12. The application nozzle is a multiple nozzle having a number of spouts, and the diameter of each spout varies according to its radial position, so that the heat-insulating raw material solution is injected from each spout per unit time. 11. The production of a heat insulating stamper according to claim 10, wherein the output amount varies depending on the radial position, whereby the application amount of the concentrically applied insulating material solution varies depending on the radial position. Method. 13. The coating nozzle is a multiple nozzle having a plurality of spouts, and the intervals between the spouts are varied according to the radial position thereof, so that the coating interval of the heat-insulating raw material solution by each spout is equal to the radius. 11. The method according to claim 10, wherein the application amount of the heat-insulating raw material solution applied concentrically varies according to the radial position.
Manufacturing method of thermal insulation stamper. 14. The stamper master is accurately held horizontally by horizontal holding means so as to eliminate unevenness in the thickness of the heat insulating raw material solution layer caused by the master stamper master or mother stamper master being not horizontal. The method for manufacturing a heat insulating stamper according to claim 1. 15. A master stamper master is floated on mercury in a mercury tank, and the master stamper master is stably held in an accurate horizontal state by the buoyancy and high viscosity of mercury. Manufacturing method of thermal insulation stamper. 16. A method of manufacturing a heat insulating stamper according to claim 15, wherein a float is floated on mercury in a mercury tank via a flexible thin film, and a master stamper master or a mother stamper master is placed on the float. . 17. The method for manufacturing a heat insulating stamper according to claim 14, wherein the float is floated on the high viscosity oil in the oil tank, and the stamper master is placed on the float. 18. The method according to claim 14, wherein the support of the stamper master is levitated by electromagnetic force, and the electromagnetic force is controlled based on horizontal detection data from a horizontal sensor so as to keep the support horizontal. Manufacturing method of thermal insulation stamper. 19. The method of manufacturing an insulated stamper according to claim 1, wherein the heat insulating raw material solution applied in a donut shape is heated to increase its fluidity. 20. The heat insulation material solution coated in a donut shape, except for the innermost and outermost edges, is heated by blowing hot air onto the surface of the heat insulation material solution with an air nozzle. Item 20. A method for manufacturing a heat-insulating stamper according to item 19. 21. The method of manufacturing a heat insulating stamper according to claim 1, wherein the support of the master stamper master or the mother stamper master is vibrated by an ultrasonic vibrator to apply ultrasonic vibration to the applied heat insulating raw material solution. Method. 22. The method for manufacturing a heat insulating stamper according to claim 1, wherein ultrasonic waves are applied to the surface of the heat insulating raw material solution applied in a donut shape to apply ultrasonic vibration to the heat insulating raw material solution layer. 23. The method for manufacturing a heat insulating stamper according to claim 22, wherein the ultrasonic irradiation range is regulated so that the innermost and outermost edges of the heat insulating raw material solution layer are not irradiated with the ultrasonic waves. 24. The method for manufacturing a heat insulating stamper according to claim 19, wherein the surface of the heat insulating raw material solution applied in a donut shape is irradiated with high-frequency electromagnetic waves to electromagnetically heat the heat insulating raw material solution. 25. The method according to claim 24, wherein the intensity distribution of the high-frequency electromagnetic wave is controlled to adjust the heating intensity in accordance with the radial position. 26. The method for manufacturing a heat insulating stamper according to claim 1, wherein the doughnut-shaped heat insulating layer forming region of the duplicated nickel layer is pretreated to increase the wettability of the surface of the region with the heat insulating raw material solution. 27. An atmosphere in a closed container is saturated with a solvent of a heat-insulating raw material solution, and a master stamper master or a mother stamper master coated with the heat-insulating raw material solution is left in the container for curing for a predetermined time. The method for manufacturing a heat insulating stamper according to claim 1. 28. Cooling air is blown to the innermost and outermost edges of the heat insulating raw material solution applied in a donut shape by an air nozzle to quickly increase the fluidity of the innermost and outermost edges. 2. The method according to claim 1, wherein the innermost and outermost edges of the heat-insulating raw material solution are prevented from spreading radially inward and outward, thereby preventing the edge from being disturbed. Manufacturing method of thermal insulation stamper. 29. A heat-insulating raw material solution mixed with an ultraviolet curable resin, and the innermost and outermost edges of the doughnut-shaped heat insulating raw material solution are irradiated with a light beam containing ultraviolet rays. 2. The method according to claim 1, wherein the fluidity of the innermost peripheral surface and the outermost peripheral surface is rapidly reduced. 30. The method according to claim 1, wherein the surface of the duplicated nickel layer outside the area coated with the donut-shaped heat-insulating raw material solution is prepared to reduce the wettability of the surface with the heat-insulating raw material solution. Manufacturing method of heat insulating stamper. 31. A highly viscous heat-insulating raw material solution is applied to the outermost and innermost surfaces of the donut-shaped heat-insulating raw material solution applied surface of the duplicated nickel layer, and the innermost circumference of the donut-shaped heat-insulating raw material solution is applied. 2. The method for manufacturing a heat insulating stamper according to claim 1, wherein the outermost peripheral portion is a high viscosity layer. 32. A heat-insulating raw material having a low thermal conductivity and a high heat resistance, such as polyimide, on which a duplicate nickel film having a predetermined thickness is formed on a master stamper master or mother stamper master having information recording grooves formed thereon. Is applied in a solvent to form a donut-shaped heat-insulating raw material solution layer, which is heated and blown off to cure the solvent component to form a heat-insulating layer, which is firmly attached to the duplicated nickel film. A heat-insulating stamper manufacturing apparatus in which a nickel electroformed coating layer 2b having a predetermined thickness is laminated on the heat insulation layer, and the duplicate nickel film is peeled off from the master. A coating nozzle for rotating the stamper master on which the film is laminated to apply the heat-insulating raw material solution to the duplicated nickel film; Apparatus for manufacturing a heat insulating stamper, characterized in that it comprises a moving means for moving radially. 33. The apparatus according to claim 32, further comprising control means for controlling rotation and rotation speed of the master stamper master or the mother stamper master. 34. An apparatus according to claim 32, further comprising control means for controlling a movement and a moving speed of said moving means of said coating nozzle. 35. An apparatus according to claim 33, further comprising control means for controlling the movement and the moving speed of said means for moving said application nozzle. 36. The apparatus for manufacturing a heat insulating stamper according to claim 32, further comprising control means for controlling an amount of the heat insulating raw material solution discharged from said application nozzle per unit time. 37. The apparatus for manufacturing an insulated stamper according to claim 33, further comprising control means for controlling an amount of the heat-insulated raw material solution discharged from said application nozzle per unit time. 38. A duplicate nickel film having a predetermined thickness is formed on a master stamper master or mother stamper master having information recording grooves formed thereon, and a heat insulating raw material having a low thermal conductivity and a high heat resistance, such as polyimide, is formed thereon. Apply a heat insulating raw material solution dissolved in to form a donut-shaped heat insulating raw material solution layer,
This is heated to remove the solvent component and harden to form a heat-insulating layer. The heat-insulating layer is firmly adhered to the duplicated nickel film. Further, a nickel electroformed coating layer 2b having a predetermined thickness is laminated on the heat-insulating layer. In a heat-insulating stamper manufactured by peeling the duplicate nickel film from the master, while rotating the stamper master laminated with the replica nickel film of a predetermined thickness, the application nozzle of the heat-insulating raw material solution is radially moved on the master. Moving, applying a large number of concentric or spiral heat insulating raw material solutions to the back surface of the duplicated nickel film, leaving the stamper master coated with the heat insulating raw material solution to cure, and concentrically or spirally forming The applied heat-insulating raw material solution is spread in the radial direction of the stamper master to form a donut-shaped smooth heat-insulating raw material solution layer. Having a donut-shaped heat insulating layer formed by curing a layer, heat insulating stamper. 39. A heat insulating stamper manufactured by the heat insulating stamper manufacturing apparatus according to claim 32.