JPS62178528U - - Google Patents

Info

Publication number
JPS62178528U
JPS62178528U JP6664186U JP6664186U JPS62178528U JP S62178528 U JPS62178528 U JP S62178528U JP 6664186 U JP6664186 U JP 6664186U JP 6664186 U JP6664186 U JP 6664186U JP S62178528 U JPS62178528 U JP S62178528U
Authority
JP
Japan
Prior art keywords
susceptor
wafers
wafer
forming apparatus
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6664186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6664186U priority Critical patent/JPS62178528U/ja
Publication of JPS62178528U publication Critical patent/JPS62178528U/ja
Pending legal-status Critical Current

Links

JP6664186U 1986-04-30 1986-04-30 Pending JPS62178528U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6664186U JPS62178528U (enrdf_load_stackoverflow) 1986-04-30 1986-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6664186U JPS62178528U (enrdf_load_stackoverflow) 1986-04-30 1986-04-30

Publications (1)

Publication Number Publication Date
JPS62178528U true JPS62178528U (enrdf_load_stackoverflow) 1987-11-12

Family

ID=30904836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6664186U Pending JPS62178528U (enrdf_load_stackoverflow) 1986-04-30 1986-04-30

Country Status (1)

Country Link
JP (1) JPS62178528U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285084A (en) * 1976-01-09 1977-07-15 Hitachi Ltd Base support
JPS5352370A (en) * 1976-10-25 1978-05-12 Hitachi Ltd Wafer susceptor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285084A (en) * 1976-01-09 1977-07-15 Hitachi Ltd Base support
JPS5352370A (en) * 1976-10-25 1978-05-12 Hitachi Ltd Wafer susceptor

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