JPS62144058U - - Google Patents

Info

Publication number
JPS62144058U
JPS62144058U JP3063786U JP3063786U JPS62144058U JP S62144058 U JPS62144058 U JP S62144058U JP 3063786 U JP3063786 U JP 3063786U JP 3063786 U JP3063786 U JP 3063786U JP S62144058 U JPS62144058 U JP S62144058U
Authority
JP
Japan
Prior art keywords
disk
wafer
cooling
wafer holder
cooling plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3063786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3063786U priority Critical patent/JPS62144058U/ja
Publication of JPS62144058U publication Critical patent/JPS62144058U/ja
Pending legal-status Critical Current

Links

JP3063786U 1986-03-05 1986-03-05 Pending JPS62144058U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3063786U JPS62144058U (enrdf_load_stackoverflow) 1986-03-05 1986-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3063786U JPS62144058U (enrdf_load_stackoverflow) 1986-03-05 1986-03-05

Publications (1)

Publication Number Publication Date
JPS62144058U true JPS62144058U (enrdf_load_stackoverflow) 1987-09-11

Family

ID=30835631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3063786U Pending JPS62144058U (enrdf_load_stackoverflow) 1986-03-05 1986-03-05

Country Status (1)

Country Link
JP (1) JPS62144058U (enrdf_load_stackoverflow)

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