JPS62157147U - - Google Patents

Info

Publication number
JPS62157147U
JPS62157147U JP4400386U JP4400386U JPS62157147U JP S62157147 U JPS62157147 U JP S62157147U JP 4400386 U JP4400386 U JP 4400386U JP 4400386 U JP4400386 U JP 4400386U JP S62157147 U JPS62157147 U JP S62157147U
Authority
JP
Japan
Prior art keywords
wafer
boat
loaded
heat treatment
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4400386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4400386U priority Critical patent/JPS62157147U/ja
Publication of JPS62157147U publication Critical patent/JPS62157147U/ja
Pending legal-status Critical Current

Links

JP4400386U 1986-03-27 1986-03-27 Pending JPS62157147U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4400386U JPS62157147U (enrdf_load_stackoverflow) 1986-03-27 1986-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4400386U JPS62157147U (enrdf_load_stackoverflow) 1986-03-27 1986-03-27

Publications (1)

Publication Number Publication Date
JPS62157147U true JPS62157147U (enrdf_load_stackoverflow) 1987-10-06

Family

ID=30861401

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4400386U Pending JPS62157147U (enrdf_load_stackoverflow) 1986-03-27 1986-03-27

Country Status (1)

Country Link
JP (1) JPS62157147U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5715419A (en) * 1980-06-30 1982-01-26 Heraeus Schott Quarzschmelze Supporting draining board made of quartz glass

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5715419A (en) * 1980-06-30 1982-01-26 Heraeus Schott Quarzschmelze Supporting draining board made of quartz glass

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