JPH0446546U - - Google Patents

Info

Publication number
JPH0446546U
JPH0446546U JP8770290U JP8770290U JPH0446546U JP H0446546 U JPH0446546 U JP H0446546U JP 8770290 U JP8770290 U JP 8770290U JP 8770290 U JP8770290 U JP 8770290U JP H0446546 U JPH0446546 U JP H0446546U
Authority
JP
Japan
Prior art keywords
wafer
rotating shaft
wafers
shaft
wafer carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8770290U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8770290U priority Critical patent/JPH0446546U/ja
Publication of JPH0446546U publication Critical patent/JPH0446546U/ja
Pending legal-status Critical Current

Links

JP8770290U 1990-08-22 1990-08-22 Pending JPH0446546U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8770290U JPH0446546U (enrdf_load_stackoverflow) 1990-08-22 1990-08-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8770290U JPH0446546U (enrdf_load_stackoverflow) 1990-08-22 1990-08-22

Publications (1)

Publication Number Publication Date
JPH0446546U true JPH0446546U (enrdf_load_stackoverflow) 1992-04-21

Family

ID=31820295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8770290U Pending JPH0446546U (enrdf_load_stackoverflow) 1990-08-22 1990-08-22

Country Status (1)

Country Link
JP (1) JPH0446546U (enrdf_load_stackoverflow)

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