JPS62176711U - - Google Patents
Info
- Publication number
- JPS62176711U JPS62176711U JP6581486U JP6581486U JPS62176711U JP S62176711 U JPS62176711 U JP S62176711U JP 6581486 U JP6581486 U JP 6581486U JP 6581486 U JP6581486 U JP 6581486U JP S62176711 U JPS62176711 U JP S62176711U
- Authority
- JP
- Japan
- Prior art keywords
- optical
- solid
- measured
- image sensor
- state image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 11
- 239000005304 optical glass Substances 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Description
第１図は本考案に係る光学式形状測定装置の概
略構成説明図、第２図は非接触式形状測定装置の
原理説明図である。
１０……スポツト光投影手段、１２……スポツ
ト光軸、１４……被測定物、１６……光学的観測
手段、１８……集光レンズ、２０……イメージセ
ンサ、２１，２５……結像位置、２２……光軸、
２３……測定点、２４……光学ガラス。
FIG. 1 is a schematic diagram illustrating the configuration of an optical shape measuring device according to the present invention, and FIG. 2 is a diagram illustrating the principle of the non-contact shape measuring device. DESCRIPTION OF SYMBOLS 10... Spot light projection means, 12... Spot optical axis, 14... Measured object, 16... Optical observation means, 18... Condenser lens, 20... Image sensor, 21, 25... Image formation Position, 22...optical axis,
23...Measurement point, 24...Optical glass.
Claims (1)
光投影手段と被測定物表面からのスポツト光の反
射光を集光しその結像位置に固体撮像素子を配置
した光学的観測手段とを含み、前記結像位置は被
測定物のスポツト光軸方向の位置に応じて変化す
る光学式形状測定装置において、前記固体撮像素
子を前記光学的観測手段の光軸と直交する方向に
対して次式に基づき傾斜配置するとともに、 １／ｌ＋１／ｌ′＝１／ｆ （ただし、ｌ集光レンズ中心から被測定物の測
定点までの距離ｌ′は集光レンズ中心から結像位
置までの距離、ｆは集光レンズの焦点距離である
。） 前記固体撮像素子の前面に楔形の光学ガラスを
配置し、該光学ガラスにより反射光路を変更させ
て固体撮像素子への入射角がほぼ直交するように
したことを特徴とする光学式形状測定装置。[Scope of Claim for Utility Model Registration] Spot light projecting means for irradiating spot light onto the surface of an object to be measured, and an optical system that collects the reflected light of the spot light from the surface of the object to be measured and arranges a solid-state imaging device at the imaging position. an optical shape measuring device, wherein the imaging position changes depending on the position of the object to be measured in the spot optical axis direction, the solid-state image sensor is arranged perpendicularly to the optical axis of the optical observation means. In addition to slanting the position based on the following formula with respect to the direction, (The distance to the image position, f is the focal length of the condensing lens.) A wedge-shaped optical glass is arranged in front of the solid-state image sensor, and the reflected optical path is changed by the optical glass to change the angle of incidence on the solid-state image sensor. An optical shape measuring device characterized in that the two are substantially perpendicular to each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6581486U JPS62176711U (en) | 1986-04-28 | 1986-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6581486U JPS62176711U (en) | 1986-04-28 | 1986-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62176711U true JPS62176711U (en) | 1987-11-10 |
Family
ID=30903236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6581486U Pending JPS62176711U (en) | 1986-04-28 | 1986-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62176711U (en) |
-
1986
- 1986-04-28 JP JP6581486U patent/JPS62176711U/ja active Pending
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