JPS62174213U - - Google Patents
Info
- Publication number
- JPS62174213U JPS62174213U JP6337986U JP6337986U JPS62174213U JP S62174213 U JPS62174213 U JP S62174213U JP 6337986 U JP6337986 U JP 6337986U JP 6337986 U JP6337986 U JP 6337986U JP S62174213 U JPS62174213 U JP S62174213U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- distance
- center
- condenser lens
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000003384 imaging method Methods 0.000 claims description 5
- 238000005259 measurement Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Description
第１図は本考案に係る光学式形状測定装置の概
略構成説明図、第２図、第３図及び第４図は他の
実施例を示す構成説明図、第５図は形状測定装置
の原理説明図である。
１０……スポツト光投影手段、１００……光膜
投影手段、１２……スポツト光軸、１４……被測
定物、１６……光学的観測手段、１８……集光レ
ンズ、２０，１２０，２２０，３２０……イメー
ジセンサ、２１……結像位置、２２……レンズ光
軸、２３……測定点。
Fig. 1 is a schematic structural explanatory diagram of an optical shape measuring device according to the present invention, Fig. 2, Fig. 3, and Fig. 4 are structural explanatory diagrams showing other embodiments, and Fig. 5 is a principle of the shape measuring device. It is an explanatory diagram. DESCRIPTION OF SYMBOLS 10... Spot light projection means, 100... Light film projection means, 12... Spot optical axis, 14... Measured object, 16... Optical observation means, 18... Condensing lens, 20, 120, 220 , 320... Image sensor, 21... Imaging position, 22... Lens optical axis, 23... Measurement point.
Claims (1)
光投影手段と被測定物表面からのスポツト光の反
射光を集光しその結像位置に固体撮像素子を配置
した光学的観測手段とを含み、前記結像位置は被
測定物のスポツト光軸方向の位置に応じて変化す
る光学的形状測定装置において、前記固体撮像素
子は前記光学的観測手段の光軸と直交する方向に
対して次式に基づき傾斜配置されて成ること １／ｌ＋１／ｌ′＝１／ｆ （ただし、ｌは集光レンズ中心から被測定物の
測定点までの距離、ｌ′は集光レンズ中心から結
像位置までの距離、ｆは集光レンズの焦点距離で
ある。）を特徴とする光学式形状測定装置。[Scope of Claim for Utility Model Registration] Spot light projection means for irradiating spot light onto the surface of an object to be measured, and an optical system that collects the reflected light of the spot light from the surface of the object and arranges a solid-state imaging device at the imaging position. an optical shape measuring device, wherein the imaging position changes depending on the position of the object to be measured in the optical axis direction of the spot, wherein the solid-state image sensor is perpendicular to the optical axis of the optical observation means. be arranged at an angle based on the following formula with respect to the direction: 1/l+1/l'=1/f (where, l is the distance from the center of the condenser lens to the measurement point of the object to be measured, and l' is the distance from the center of the condenser lens to the measurement point of the object to be measured, and (distance from the center to the imaging position, f is the focal length of the condenser lens).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6337986U JPS62174213U (en) | 1986-04-25 | 1986-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6337986U JPS62174213U (en) | 1986-04-25 | 1986-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62174213U true JPS62174213U (en) | 1987-11-05 |
Family
ID=30898548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6337986U Pending JPS62174213U (en) | 1986-04-25 | 1986-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62174213U (en) |
-
1986
- 1986-04-25 JP JP6337986U patent/JPS62174213U/ja active Pending
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