JPS62175559U - - Google Patents
Info
- Publication number
- JPS62175559U JPS62175559U JP6285686U JP6285686U JPS62175559U JP S62175559 U JPS62175559 U JP S62175559U JP 6285686 U JP6285686 U JP 6285686U JP 6285686 U JP6285686 U JP 6285686U JP S62175559 U JPS62175559 U JP S62175559U
- Authority
- JP
- Japan
- Prior art keywords
- extraction electrode
- plasma
- ion beam
- beam generator
- generation means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 5
- 238000010884 ion-beam technique Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6285686U JPS62175559U (en:Method) | 1986-04-25 | 1986-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6285686U JPS62175559U (en:Method) | 1986-04-25 | 1986-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62175559U true JPS62175559U (en:Method) | 1987-11-07 |
Family
ID=30897537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6285686U Pending JPS62175559U (en:Method) | 1986-04-25 | 1986-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62175559U (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010519710A (ja) * | 2007-02-26 | 2010-06-03 | ビーコ・インスツルメンツ・インコーポレーテッド | イオン源およびイオン源の電磁石を動作させる方法 |
-
1986
- 1986-04-25 JP JP6285686U patent/JPS62175559U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010519710A (ja) * | 2007-02-26 | 2010-06-03 | ビーコ・インスツルメンツ・インコーポレーテッド | イオン源およびイオン源の電磁石を動作させる方法 |
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