JPS6217483Y2 - - Google Patents
Info
- Publication number
- JPS6217483Y2 JPS6217483Y2 JP5086782U JP5086782U JPS6217483Y2 JP S6217483 Y2 JPS6217483 Y2 JP S6217483Y2 JP 5086782 U JP5086782 U JP 5086782U JP 5086782 U JP5086782 U JP 5086782U JP S6217483 Y2 JPS6217483 Y2 JP S6217483Y2
- Authority
- JP
- Japan
- Prior art keywords
- solution
- container
- lid
- high temperature
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004381 surface treatment Methods 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 4
- 239000000243 solution Substances 0.000 description 23
- 238000012545 processing Methods 0.000 description 13
- 238000005530 etching Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000012670 alkaline solution Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000005068 transpiration Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 239000003929 acidic solution Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
Landscapes
- Coating With Molten Metal (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5086782U JPS58151667U (ja) | 1982-04-06 | 1982-04-06 | 高温処理槽 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5086782U JPS58151667U (ja) | 1982-04-06 | 1982-04-06 | 高温処理槽 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58151667U JPS58151667U (ja) | 1983-10-11 |
| JPS6217483Y2 true JPS6217483Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-05-06 |
Family
ID=30061644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5086782U Granted JPS58151667U (ja) | 1982-04-06 | 1982-04-06 | 高温処理槽 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58151667U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1982
- 1982-04-06 JP JP5086782U patent/JPS58151667U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58151667U (ja) | 1983-10-11 |