JPS62174212U - - Google Patents
Info
- Publication number
- JPS62174212U JPS62174212U JP6276386U JP6276386U JPS62174212U JP S62174212 U JPS62174212 U JP S62174212U JP 6276386 U JP6276386 U JP 6276386U JP 6276386 U JP6276386 U JP 6276386U JP S62174212 U JPS62174212 U JP S62174212U
- Authority
- JP
- Japan
- Prior art keywords
- output
- light source
- photodetector
- measured
- different surfaces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6276386U JPS62174212U (enExample) | 1986-04-25 | 1986-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6276386U JPS62174212U (enExample) | 1986-04-25 | 1986-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62174212U true JPS62174212U (enExample) | 1987-11-05 |
Family
ID=30897350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6276386U Pending JPS62174212U (enExample) | 1986-04-25 | 1986-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62174212U (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59225308A (ja) * | 1983-06-06 | 1984-12-18 | Hitachi Ltd | 微小間隔測定装置 |
| JPS60124823A (ja) * | 1983-12-09 | 1985-07-03 | Hitachi Ltd | エツチング・モニタ方法 |
| JPS60131408A (ja) * | 1983-12-21 | 1985-07-13 | Hitachi Ltd | 微小隙間測定装置 |
-
1986
- 1986-04-25 JP JP6276386U patent/JPS62174212U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59225308A (ja) * | 1983-06-06 | 1984-12-18 | Hitachi Ltd | 微小間隔測定装置 |
| JPS60124823A (ja) * | 1983-12-09 | 1985-07-03 | Hitachi Ltd | エツチング・モニタ方法 |
| JPS60131408A (ja) * | 1983-12-21 | 1985-07-13 | Hitachi Ltd | 微小隙間測定装置 |