JPS62173031A - Production of component member for electric or electronic device subjected to surface working - Google Patents

Abstract

PURPOSE:To manufacture the electric or electronic device which is stable and has a long life electrically, optically and photoconductively by placing a surface cleaned base body member on a rotary holding means and by performing the rotary transfer of plural rotary cylinder having uneven shape with their press- fitting to the surface thereof. CONSTITUTION:The aluminum base body cylinder 102 that the surface is cleaned by a trichlene, etc. is inserted into a rotary holding cylinder 101. The uneven shape is transferred on the surface of the base body cylinder 102 uniformly by press-fitting and turning the rotary cylinder 103, 104, 105 with the uneven shape having a displacement on the surface thereof. This uneven surface has no flaw nor foam, etc. and is stable uniformly and structurally as well, stabilizing uniformly the manufactured electric or electronic device 102 electrically, optically and photoconductively and enabling to let it have durability and long life.

Description

[Detailed Description of the Invention] [Technical Field to Which the Invention Pertains] The present invention is directed to surface-processing a metal body to produce a substrate suitable for use as a constituent member of an electric or electronic device, particularly an electrophotographic photoreceptor, etc. Regarding the method.

[Description of prior art]

Metal bodies in the shape of plates, cylinders, endless belts, etc. are used as substrates (support bodies) of photoconductive members such as electrophotographic photoreceptors, and these metal bodies have a surface shape suitable for the purpose. Therefore, the surfaces of these metal bodies are subjected to various cutting and polishing processes.

As the metal body, an aluminum alloy is generally used as the most suitable one, and the surface thereof is subjected to the above-described processing to obtain a desired surface, and a light-receiving layer according to the purpose is formed on the surface.

However, according to the conventional cutting method or polishing method, 5i-Al-Fe system, Fe-Al system,
Intermetallic compounds such as TiB2, AA+, Mg, Ti,
Si, H2 with intervening oxides of Si, Fe, etc.
In addition to the presence of vacancies, surface defects such as grain boundary steps may occur between adjacent A1 structures with different crystal orientations.

Furthermore, when applying an aluminum alloy to a substrate, an extremely clean surface is used, and the surface of an aluminum alloy with such a surface condition remains active even under an ultra-high vacuum of 1.0 mmHg. Therefore, an oxide film with a thickness of about 30×K is formed.

Where these problems exist, the substrate obtained by surface processing using conventional cutting or polishing methods (d) will eventually cause various problems and defects in the functionality of photoconductive members manufactured using it. becomes.

For example, in the case of an electrophotographic photoreceptor, the photoreceptive layer formed on the substrate may have poor uniformity or uniformity, or may have poor electrical, optical, and/or photoconductive properties. In many cases, the image becomes uneven, resulting in defects in the image and ultimately rendering the image unusable. This point is remarkable when the photoreceptive layer is formed of silicon or a non-single crystal material mainly composed of silicon.

[Purpose of the invention]

The main purpose of the present invention is to process the surface of a metal body by eliminating the various physical problems caused by the above-mentioned conventional processing methods and the problem of the formation of an oxide film on the surface of the substrate, and to produce electrical or electronic devices. It is an object of the present invention to provide a method for manufacturing a substrate suitable for use as a constituent member, particularly for an electrophotographic photoreceptor or the like.

Another object of the present invention is to form a desired photoreceptive layer on the processed surface of the substrate obtained by the above-mentioned method, so that the electrical, optical, and photoconductive properties are substantially always stable. It has excellent light fatigue resistance, no deterioration phenomenon even after repeated use, excellent durability and moisture resistance, and no or almost no residual potential is observed. An object of the present invention is to provide a method for producing a substrate (support) suitable for producing a light-receiving member having a light-receiving layer made of amorphous silicon a-sl(H,x) containing atoms (X).

[Structure and effects of the invention]

The present inventors have created a substrate (support) for electrical or electronic devices, particularly electrophotographic photoreceptors, which has an optimal surface shape and is free from the problems caused by the conventional surface processing methods described above. We have conducted extensive research to develop a system that has a rotating cylinder that holds the base member in the center, each of which has a certain curvature (R) around it, and when it is pressed against the surface of the base member, the surface A device is used in which three rotating cylinders having male molds on the surface that form trace depressions are arranged at regular intervals, and a cylindrical base member made of aluminum alloy is placed on the rotating cylinder holding the base member. After smoothing the surface and immediately cleaning the processed surface with an organic solvent (mainly trichloroethane), the three rotating cylinders are fitted with their male surfaces on the cylindrical base member. When the base member is rotated while being strongly pressed against the surface, the surface of the base member has trace depressions of a predetermined shape formed on the entire surface of the base member. It was found that there was no intermetallic compound, metal oxide, etc., no vacancies, and no surface defects such as grain boundary steps occurred.
A photoreceptive layer mainly composed of a-8i (H, In use, the light-receiving member is formed by light passing through the light-receiving layer being reflected at the layer interface and the surface of the support, where they interfere. The present inventors have obtained knowledge that effectively prevents striped images from forming on images and makes the output images of extremely high quality.Based on this knowledge, further research has been conducted to complete the present invention. I forced it. That is, the present invention places a cylindrical base member on a cylindrical base member rotation holding means,
The rotating cylinders are arranged at predetermined intervals on the outer periphery of the base member, each having male molds arranged in a predetermined manner on the surface thereof to form an uneven shape on the surface of the base member. The male mold on the surface of each rotating cylinder is in surface pressure contact with the surface of the cylindrical base member to form a vestigial depression in the male mold shape on the surface without leaving any flat surface. An electric or electronic anode whose main feature is to rotate an object arranged so that all of the trace depressions formed are eccentric while being pressed against the surface of the base member on the cylindrical base member holding means. The present invention provides a method for producing a support suitable for use in ζ chairs, especially electrophotographic photoreceptors.

I) The support produced by the method of the present invention and having spherical trace depressions evenly on the surface has no intermetallic compounds, metal oxides, etc. in the metal structure, and no intervening pores. Furthermore, there are no surface defects such as grain boundary steps.

By the way, the method of the present invention can be applied to any type of support member, and therefore, these support members may be electrically conductive or electrically insulating.

Examples of the conductive support include NiOr, stainless steel, Al, Or, Mo, Au, Nb, Ta,
■, Ti, “Pt.

Examples include metals such as pb and alloys thereof.

As the electrically insulating support, r IJ ester, polyethylene, polycarbonate, cellulose, acetate,
Examples include films or sheets of synthetic resins such as polypropylene, polyvinyl chloride, polyvinylidene chloride, polystyrene, and polyamide, glass, ceramics, and paper. It is preferable that at least one surface of these electrically insulating supports is conductively treated, and a light-receiving layer is provided on the conductively treated surface side.

For example, if it is glass, Ni0r, AA
, Or, Mo, Au, Ir, Nb, Ta1
V, Ti, Pt, Pd.

■n203.5n02, ■To (engineering n203+ 5n
Conductivity can be imparted by providing a thin film consisting of NiC!02) or a synthetic resin film such as NiC! r, Al, Ag, P
b, Zn, Ni, Au.

Or, Mo, Ir, Nb, Ta, V, Tl,
A thin film of metal such as Pt is provided on the surface by vacuum evaporation, electron beam evaporation, SQ tuttering, etc., or the surface is laminated with the metal to impart conductivity to the surface.

The shape of the support can be any shape such as a cylinder, a belt, a plate, etc., and the shape can be determined as appropriate depending on the purpose and desire. For example, if the light-receiving member is used as an electrophotographic image forming member, it is desirable to use an endless belt or a cylindrical shape for continuous high-speed copying. The thickness of the support is appropriately determined so as to form a desired light-receiving member, but if flexibility is required as a light-receiving member, the thickness should be determined within a range that allows the support to fully perform its function. It can be made as thin as possible. However, from the viewpoint of manufacturing and handling of the support, mechanical strength, etc., the thickness is usually set to 10μ or more.

The details of the method of the present invention will be explained below using drawings as necessary. FIG. 1 schematically shows an example of a preferred apparatus used for carrying out the method of the present invention, and FIGS. In addition, it is a diagram illustrating the arrangement of spherical male molds that form trace depressions on the surface of the substrate,
FIGS. 3(A) to 3(0) are explanatory diagrams of the process of forming spherical trace depressions using a rotating cylinder for forming spherical trace depressions on the surface of the base member.

The device shown in FIG. 1 omits a housing portion, and 101 is a base holding cylinder whose center is fixed to a rotating shaft 101' which is rotatably supported by an earthen wall and a lower wall (not shown). 102 is a cylindrical base member placed and fixed on the surface of the base holding cylinder 101. 103.104.105 is
A highly rigid rotating cylinder made of metal such as iron, SυS, brass, or nickel is used to form a spherical trace depression on the surface of the cylindrical base member, and each of the rotating cylinders has an axis rotatably attached to the soil wall and the lower wall. supported (currently not shown), a rotating shaft 103'
, 104', and 105'.

The shaft support portions of each of the rotating shafts 103' to 105' on the earthen wall and the lower wall are fitted into sliding grooves provided on the earthen wall and the lower wall so that the tips of the rotating shafts can freely slide in the front and back direction. combined,
Moreover, an external sliding adjusting means position adjusting arm is connected to the tip of the shaft, whereby the position of the rotating shaft can be adjusted to adjust the cylindrical shape of the rotating cylinder for forming the spherical trace depression. The degree of suppression of the surface of the base member can be adjusted as desired. (This part is not shown) Base holding cylinder 101, rotating cylinder 1 for forming spherical trace depressions
．． 03 to 105 are all rotated, and their rotation is caused by the base holding cylinder 1.01 or
The rotating cylinders 103 and 104 or more or all of these cylinders are driven by a driving means (not shown).

For the cylinders to be rotated by the drive means, the rotational axis of the cylinder that causes the rotation is connected to the drive means via a shaft or other drive transmission means. (
Note that if the drive transmission means is a shaft, the shaft may also serve as the position adjustment arm described above.

The surfaces of the rotating cylinders 103 to 1.05 have spherical male molds arranged in such a manner that when the surfaces of the rotating cylinders are pressed against the surface of the base member, predetermined spherical trace depressions are formed on the surface of the base member. There is. A preferable surface-treated substrate manufactured by the method of the present invention is one in which spherical trace depressions having a predetermined curvature are formed on the surface of the substrate member without leaving any flat surface. 105
The globular male mold on the surface of is required to be of a specific arrangement form.

By the way, although the number of rotating cylinders is three in the example shown in FIG.
It may be a book or three or more books. Therefore, the number of rotating cylinders is determined so that spherical trace depressions with a predetermined curvature are uniformly formed on the surface of the base member installed at the center of the device, without leaving any flat surface. Naturally, various matters such as the diameter of the rotating cylinder and the diameter or size of the base member on the base holding cylinder are relevant.

In the case of the example shown in FIG. 1, the number of rotating cylinders is three, 1.03 to 1.05; in this case, the base member on the base holding cylinder 101 is cylindrical (102); As shown in FIG. 3, the spherical trace depressions formed by pressing the surface of the rotating cylinder against the surface of the cylindrical base member are as shown in <A) depending on the rotating cylinder ]03. The rotating cylinders 103 to 105 each have a spherical male arrangement as shown in (B) depending on the rotating cylinder 104 and as shown in (C) depending on the rotating cylinder 105.

As shown in FIG. 2, the spherical male molds on the surface of the rotating cylinder are schematically arranged in the arrangement shown in FIG. 2(A) in the front view, and in the arrangement shown in FIG. 2(B) in the side view. These can be easily produced by an etching method for forming a resist, by cutting a female mold in advance, and using a pressure molding method from the female mold, by an electrostatic casting method, or the like.

The method of the present invention selects a plurality of rotary cylinders having a specific spherical male arrangement on their surfaces, adjusts the degree of compression of each rotary cylinder during the pressing operation, and further presses the related cylinders including the base holding cylinder. The method of the present invention is particularly suitable for manufacturing substrates for photoreceptor drums in electrophotography. be.

Although not shown, the male shape on the surface of the rotating cylinder may not be spherical, but may be of any suitable shape, such as an elliptical spherical shape.
In either case, the surface-treated substrate produced will have the desired surface having the desired dents throughout.

As the surface processing base member used in the method of the present invention, any of the above-mentioned materials can be adopted, but
If it has a highly clean surface such as an aluminum alloy, the surface is active even under ultra-high vacuum, so an oxide film about 30X thick will be formed. When carrying out the method of the present invention using such a substrate member, the cylindrical substrate holding means 1
．． When mounting and fixing on 01, use the following general formula.

(However, n represents an integer from 3 to 40.) or its solution in an organic solvent such as trichloroethane is coated on the surface of the base member, or It is supplied to the surface of the base member from the stage of mounting and fixing to the stage of pressing operation, thereby cutting off the surface from contact with the surrounding gas, and as a result, the surface is processed to a desired state without causing the above-mentioned surface changes to the surface. A base member can be obtained.

The method of the invention generally operates as follows. That is, first, a cylindrical base member is prepared, and its outer surface is smoothed by means such as a lathe. When the member is made of aluminum alloy, the above-mentioned polybutylene/liquid may be used during the smoothing treatment.

The thus obtained cylindrical substrate with a smooth surface is placed and fixed 102 on a substrate holding cylinder 101 . On the other hand, three rotary cylinders having spherical male array surfaces suitable for forming spherical trace depressions on their surfaces are selected according to the scale of the cylindrical substrate and set in the apparatus 103, 104, 105. When this is done, the three rotating cylinders are brought into contact with the surface of the cylindrical base, and at that point the driving means and the pressing means are operated, and at this time, the degree of suppression of the three cylinders is changed, respectively. After operating at a predetermined number of rotations, the operation of the driving means and the pressing means is stopped, the rotating cylinders 103 and 104 are separated from the cylindrical base 102, and the surface-treated cylindrical base is taken out.

In addition, if the cylindrical substrate is made of the above-mentioned aluminum alloy or the like, the above-mentioned HoIJ butene liquid may be supplied to the surface of the substrate from the time of introduction into the system until the end of the suppression operation. .

According to the method of the present invention operated as described above, a substrate suitable for a constituent member of an electric or electronic device, particularly an electrophotographic photoreceptor, can be efficiently and easily produced.

The method of the present invention will be further explained with reference to Examples below.
The present invention is not limited thereby.

Example 1 Using a lathe 1. Feed rate 0.07 using OR bite
6 mm/r, e, v, main rotation speed 2620 r
The surface of the cylindrical aluminum base member was smoothed with , p, m to create a cylindrical base member with a length L) of 358 mm and a diameter (R) of 80 mm, and immediately subjected to trichloroethane ultrasonic cleaning and then the same steam cleaning. The obtained product was mounted and fixed on the substrate holding cylinder 101, and on the other hand, as the rotating circle 1iJ1o3 to 105, a third spherical male type with R=0.25+nm was formed.
(A) Rotating cylinder (103) on the array surface shown in the figure, 3rd (B)
The rotating cylinder (104) with the array surface shown in the figure and the rotating cylinder (105) with the array surface shown in FIG. 3(C) were used.

Then, the degree of suppression of the rotating cylinders 103 and 104 on the surface of the cylindrical base 102 is set to 11. .

i<g/C7rL, 10.0 kliJ/cnL, 9
．． 0 kg/cm, and the rotational speed of the cylindrical base 102 is set to 2.
The pressing means and the driving means were operated at the following settings: r, p, m, and operated for 3 hours. Thereafter, the operation was stopped, the cylindrical substrate was taken out of the system, and its surface was observed with an optical microscope, and it was found that spherical trace depressions were formed all over the plane. This was introduced into a film forming chamber using a glow discharge method, and a film was formed thereon under the conditions listed in the table below to produce an electrophotographic photoreceptor doratom.

Table material gas Flow i (scaM) Power (W) Layer thickness (
μm) B, H60,3 The obtained photoreceptor drum was transferred to Canon Laser Copier NP.
Set to 9030, wavelength 780 nm, spot diameter 80
Image exposure was performed by irradiating a μm laser, development and transfer were performed to obtain an image, and when the resulting image was observed, it was found that it was a blurred image with almost no interference fringes. .

Example 2 The spherical male mold is set to R=0.75, and the degree of suppression of the rotating cylinders 103 to 105 is set to 15.0 kg/m in linear pressure.
, x4. A cylindrical surface-treated substrate was obtained in the same manner as in Example 1, except that the weight was changed to 7.0 kg, 13.0 kg, and 971 kg. When the surface was observed with an optical microscope, it was found that spherical trace depressions were formed all over the flat surface.

A film was formed on this in the same manner as in Example 1 to produce an electrophotographic photoreceptor drum, and an image was formed and evaluated. As a result, it was found to be excellent as in Example 1. .

[Brief explanation of drawings]

FIG. 1 schematically shows an example of an apparatus used to carry out the method of the present invention. FIGS. 2(A) and 2(B) show the steps used in the present invention,
FIG. 3 is an explanatory diagram of the arrangement of the spherical male molds on the surface for forming spherical trace depressions on the surface of the base member of a rotating cylinder having the spherical male molds arranged in a predetermined manner on the surface thereof. Third (A)
The figures to (C) are explanatory diagrams of the process of forming a spherical trace depression using a rotating cylinder for forming trace depressions on the surface of the base member. Regarding FIG. 1, 101...Base member holding rotating cylinder, 101'...
Rotating shaft, 102...Base member, 103.104.1
05... Rotating cylinder, 103', 104', 105'.
... Rotation axis Figure 1 Figure 2A Figure 2B Figure 3 (A) (B) (C) Procedural amendment (method) % formula % 1. Indication of case Patent Application No. 11.047 No. 11.047 of 1985 , Name of the invention, Method for manufacturing surface-treated components of electric or electronic devices 3, Relationship to the case of the person making the amendment Patent applicant address: 3-30-2 Shimomaruko, Ota-ku, Tokyo Name
(ioo) Canon Co., Ltd. 4, Agent Address: Kojimachi Green Building, 3-12-6 Kojimachi, Chiyoda-ku, Tokyo

Claims (2)

[Claims] (1) A base member is placed on a rotating holding means, and male molds (which form an uneven shape) are arranged in a predetermined state on the surface of the base member from the outer peripheral position of the base member. A plurality of rotating cylinders arranged at predetermined intervals are brought into pressure contact with the surface of the base member, and under the pressure contact condition, the rotation holding means and all of the rotating cylinders are driven through a driving means. 1. A method for producing a surface-treated electrical or electronic device component, which comprises rotating the component by rotating the component. (2) The manufacturing method according to claim (1), wherein the electronic device component is a substrate for an electrophotographic photoreceptor.