JPS62173009U - - Google Patents
Info
- Publication number
- JPS62173009U JPS62173009U JP6112786U JP6112786U JPS62173009U JP S62173009 U JPS62173009 U JP S62173009U JP 6112786 U JP6112786 U JP 6112786U JP 6112786 U JP6112786 U JP 6112786U JP S62173009 U JPS62173009 U JP S62173009U
- Authority
- JP
- Japan
- Prior art keywords
- lattice
- optical
- pattern
- lattice pattern
- inspection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 5
- 238000001514 detection method Methods 0.000 claims 2
- 238000007689 inspection Methods 0.000 claims 2
- 230000003746 surface roughness Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6112786U JPS62173009U (pt) | 1986-04-23 | 1986-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6112786U JPS62173009U (pt) | 1986-04-23 | 1986-04-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62173009U true JPS62173009U (pt) | 1987-11-04 |
Family
ID=30894175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6112786U Pending JPS62173009U (pt) | 1986-04-23 | 1986-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62173009U (pt) |
-
1986
- 1986-04-23 JP JP6112786U patent/JPS62173009U/ja active Pending
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