JPS62172036A - Plasma treating apparatus - Google Patents

Abstract

PURPOSE:An apparatus, equipped with a plasma treating means, provided in a vacuum treating vessel and having a structure selectively usable for both routes for one-side treatment or both-side treatment of a material to be treated and capable of stably processing the material even at a high speed without changing the vacuum degree and readily changing over the one-side and both- side treatment. CONSTITUTION:A material 23 to be treated is wound up around a shaft 4 constituting a delivery means 19 as a delivery roll 2 and then fed therefrom to a plasma irradiation means 22 having cathodes 6, 6, 6' and 6' and anodes 7 and 7' provided therein and carried out along a route 8 for treating only one side of the material 23 or transferred along a route 9 for treating both sides to complete the treatment in a state of the material 23 wound around a shaft 5 constituting a winding means 20 as a roll 3. The changeover of the routes 8 and 9 is carried out by using guide chains 8' and 9' placed on both ends of a transfer means 21 consisting of plural guide roll groups and tying one end of the material 23 to either one thereof.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an apparatus for plasma-treating a continuous body such as a sheet-like article such as a fabric or a film or a yarn article.

[Prior art and its problems]

BACKGROUND ART Conventionally, there has been a strong demand for hydrophobic synthetic fibers to be treated to prevent recontamination (darkening) due to washing of textile products (hereinafter abbreviated as SR treatment). The conventional method has been to apply a hydrophilic resin to the fiber surface to make the surface of the hydrophobic fiber hydrophilic and impart SR properties. However, such resin processing methods lack durability against washing during wear. In addition, the dye attached to the resin attached to the fiber surface migrates (promotes multi-line sublimation, reducing color fastness). Furthermore, since the hydrophilic resin used is generally a polyethylene glycol resin or a derivative thereof, the treated fabric has many drawbacks such as a strong waxy feel. Therefore, it has been desired to develop a technique that does not have such drawbacks and can impart SR properties to fiber fabrics, especially synthetic fiber fabrics, at low cost and on an industrial scale.

As a way to solve these problems, it has recently been discovered that instead of resin treatment, the fiber surface can be directly hydrophilized by plasma treatment, giving it an excellent SR property equivalent to or better than that of cotton. It's here.

However, various problems occur with plasma processing apparatuses that can continuously process continuous objects such as sheet-like materials and fibers, and many proposals have been made to improve these problems. Broadly speaking, there are two types: a type in which a sheet-like material is fed out from the atmosphere, introduced into a depressurized processing chamber with a continuous sealing mechanism, and then rolled up again in the atmosphere; There are two types: hatch continuous type, which is all carried out in one vacuum container; The former type, which has a continuous sealing mechanism, has the advantage of being able to downsize the vacuum processing chamber and being able to change the level without releasing the vacuum state, making it easy to work with, but it is not suitable for high-containing materials such as textiles. When processing airy sheet-like materials, volatile substances such as air contained in the sheet cannot be sufficiently removed by the sealing portion alone, and there is a problem with sealing performance when the processing speed increases.

In addition, in the latter batch continuous type processing machine, the means for feeding out and winding up sheet-like materials is built into the vacuum container, so the volume of the vacuum container becomes large, and it takes time to reach the desired degree of vacuum. There is a problem in that the processing efficiency becomes excessive and the processing efficiency decreases.

[Purpose of the invention]

The purpose of the present invention is to improve the above-mentioned drawbacks of conventional plasma processing equipment, and to take advantage of the features of a continuous batch system that allows processing under stable conditions without changing the degree of pressure reduction even during high-speed processing, and to reduce the volume of a vacuum vessel. Our goal is to provide a plasma processing device that can minimize the amount of water and have good workability, and that can extremely efficiently perform single-sided or double-sided processing of the object to be processed, which can be easily switched depending on the application. A processing device is provided.

[Structure of the invention]

The present invention has the following configuration to achieve the above object. That is, it is a plasma processing apparatus comprising a reduced pressure processing container, a feeding means, a winding means, a conveying means, and a plasma irradiation means for the object to be processed stored in the reduced pressure processing container, wherein the plasma irradiation means The present invention is characterized by a plasma processing apparatus having a structure that allows selective use of both a single-sided processing route and a double-sided processing route for processing objects.

The objects to be treated used in the present invention include fabrics such as woven fabrics, knitted fabrics, nonwoven fabrics, and webs, sheet-like articles such as films, foils, and papers, or composites thereof, or fabrics or sheets thereof. Materials coated with resin, yarn materials such as spun yarn and filament yarn, etc. can be used.

The present invention integrates a feeding means, a winding means, a conveying means, and a plasma irradiation means for the object to be processed in one reduced pressure processing container, thereby reducing the volume of the reduced pressure processing container. This makes it possible to create a compact plasma processing device with high workability and processing efficiency. Furthermore, the plasma irradiation means installed in the reduced-pressure processing container is configured so that it can process not only one side of the object to be processed, but also both sides at the same time. (path) is configured to be used selectively by a switching means that is linked with a processing object conveying means.

The plasma irradiation means used in the present invention may employ any conventionally known principle; however, preferably, a plurality of rod-shaped anodes are arranged between two plate-shaped cathodes facing each other. It is better to use a structure in which this arrangement is made.

In order to treat one side or both sides individually or simultaneously using this type of plasma irradiation device, at least two devices of the same structure are arranged in parallel, in series, or facing each other, and guide rolls, etc. This is done by changing the bus by switching the transport means for the workpiece. The means for conveying the object to be processed is a guide bar 2. Any active rotation type or free rotation type configured with guide rollers, conveyor belts, etc. may be used. Bus switching is achieved by providing a suitable switching guide on part of the transport means. For example, it is possible to use a guide bar, a guide roller that moves, a guide member that nip the tip of the object to guide it to a required location, a chain member, or the like.

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view of the entire device according to the present invention, and FIG.
The figure is a plan view thereof. 3 is an enlarged side view of the plasma irradiation means portion of FIG. 1, and FIG. 4 is a front view thereof.

In FIG. 1 and FIG. 2, 1 is a reduced pressure processing container, and 12.13 is a container constituting a part of the reduced pressure processing container 1.
l] Indicates the door. 8 and 9 are the paths of the object to be processed 23, path 8 indicates the case where only one side of the object 23 to be processed is processed, and path 9 indicates the case where both sides are processed.

The reduced pressure processing container 1 is connected to a reduced pressure pump 10 via an exhaust pipe 14, and is maintained at a reduced pressure of about 10-'Torr.
The object to be treated 23 is subjected to low-temperature plasma treatment under this reduced pressure.

The workpiece 23 is wound up as a feeding roll 2 on a shaft 4 constituting a feeding means 19, and then wound as a roll 3 on a shaft 5 forming a winding means 20 via a path 8 or 9. It is completed when it is taken. The objects to be processed 23 are transported by driving the shafts 4 and/or 5 by the drive motor 11.

As can be seen from FIG. 1, in the plasma processing apparatus of the present invention, a feeding means 19 and a winding means 20 for the object to be processed 23 are arranged adjacent to each other as a pair in one reduced pressure processing container 1. Furthermore, since the plasma irradiation means 22 is disposed close to and facing the plasma irradiation means 22, the structure is compact. The conveying means 21 for the object to be processed is made up of a guide bar, a guide roll, a belt, etc., and is arranged between or near the feeding means 19, the plasma irradiation means 22, and the winding means 20.

The plasma irradiation means 22 includes two opposing plate-shaped cathodes 6.
, 6; 6', multiple rod-shaped anodes 7 between 6 degrees,
7" are arranged at intervals, and this rod-shaped anode 7
．． The object to be processed 23 is subjected to plasma processing while moving on both sides of 7.

At least two plasma irradiation means having such a configuration are arranged facing each other. As a result, when processing only one side of the workpiece 23, the workpiece 23 can be transported along the path 8, and when processing both sides, the workpiece 23 can be transported along the path 9. do it.

As described above, the workpiece 23 can be easily switched to the two paths 8 or 9 by using a guide chain. That is, in Figures 3 and 4, 8
', 9' represent guide chains for forming paths for single-sided processing and double-sided processing, respectively, and these guide chains 8', 9' represent conveyor chains consisting of a plurality of guide roll groups, as shown in Fig. 4. They are arranged at both ends of the means 21. To switch the path of the workpiece 23, after the workpiece 23 has been completely removed, one end of the workpiece 23 is tied to a guide chain 8' or 9° that forms the desired path 8 or 9. By rotating the guide chain 8' or 9', the workpiece 23 can be set on the desired path 8 or 9.

〔Effect of the invention〕

When processing highly air-containing sheet materials such as woven and knitted fabrics, non-woven fabrics, tows, fibers, coated materials, porous films, etc. using the lid of the present invention, the degree of depressurization in the residual pressure processing chamber due to changes in processing speed is particularly important. While maintaining the characteristic of a punch-type processing machine, which is that there is no change in the process, the workability, which is a drawback of punch-type processing machines, can be greatly improved. and n1j can simply be changed.

[Brief explanation of drawings]

FIG. 1 is a sectional view of the Blaze 7 processing apparatus according to the present invention, and FIG. 2 is a plan view thereof. Also, Figure 3 shows the first
FIG. 4 is an enlarged side view of a portion of the plasma irradiation means in the figure, and FIG. 4 is a front view thereof. 1... Decompression processing container, 2... Feeding roll, 3...
Winding roll, 4.5...rotating shaft, 6,6°...cathode, 7°7"...anode 2.8...(for single-sided processing) path, 9...(both-sided processing) route, 8゛...guide chain (for single-sided processing), 9''...guide chain (for double-sided processing), 19...feeding means, 20...winding means, 21... - Both feeding means, 22... plasma irradiation means.

Claims (1)

[Scope of Claims] 1. A plasma processing apparatus comprising a reduced pressure processing container, a feeding means, a winding means, a conveying means, and a plasma irradiation means for the object to be processed stored in the reduced pressure processing container, the plasma processing apparatus comprising: A plasma processing apparatus characterized in that the plasma irradiation means has a structure that allows selective use of both a single-sided processing path and a double-sided processing path of the object to be processed. 2. The plasma irradiation means is composed of two plate-shaped cathodes arranged opposite to each other and a plurality of rod-shaped anodes arranged between them, and at least two sets of plate-shaped anodes are arranged to face each other. The plasma processing apparatus according to scope 1. 3. The scope of claim 1, wherein a part of the conveyance means for the workpiece is provided with a guide means that allows the workpiece to be guided separately into a single-sided processing route and a double-sided processing route, respectively. The plasma processing apparatus described. 4. The plasma processing apparatus according to claim 3, wherein the guide means is a guide chain.