JPS62174235A - Plasma treatment apparatus for long object - Google Patents

Abstract

PURPOSE:To perform plasma treatment of one or both surfaces of an object at a high speed under stable conditions, by providing a feeding means, a winding means, a carrying means and a plasma radiation means in one vacuum treatment vessel. CONSTITUTION:An object 23 to be treated, wound around a feed roll 2 about a rotary shaft 4 disposed in a vacuum treatment vessel 1, is fed through a group of guide rollers 16 and 17 which constitute a carrying means 21 to a plasma radiation means 22 comprising two pairs of cathode plates 6, 6 or 6', 6' and a plurality of anodes 7 to perform plasma treatment of one surface of the object 23. This object is wound around a rotary shaft 5 in the form of winding roll. The object 23 fed from the roll 2 is fed through a roller 16 between electrodes 6 and 7 to effect treatment of one surface, fed through a guide roller 15 between electrodes 6' and 7' to effect treatment of the other surface and wound around a rotary shaft in the form of a winding roll 3.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an apparatus for plasma treating continuous elongated materials such as sheet-like materials such as fabrics and films, and yarn materials.

[Prior art and its problems]

BACKGROUND ART Conventionally, there has been a strong demand for hydrophobic synthetic fibers to be treated to prevent recontamination (darkening) due to washing of textile products (hereinafter abbreviated as SR treatment). The conventional method has been to apply a hydrophilic resin to the fiber surface to make the surface of the hydrophobic fiber hydrophilic and impart SR properties. However, such resin processing methods lack durability against washing during wear. In addition, since it promotes transfer sublimation in which the dye dyed onto the resin attached to the fiber surface is transferred, the color fastness is reduced. In addition, since the hydrophilic resin used is generally a polyethylene glycol resin or a derivative thereof, the treated fabric has many drawbacks such as a strong waxy feel.
It has been desired to develop a technique that does not have such drawbacks and can impart SR properties to fiber fabrics, especially synthetic fiber fabrics, at low cost on an industrial scale.

As a way to solve these problems, it has recently been discovered that instead of resin treatment, the fiber surface can be directly hydrophilized by plasma treatment, giving it an excellent SR property equivalent to or better than that of cotton. It's here.

However, various problems occur with plasma processing apparatuses that can continuously process continuous objects such as sheet-like materials and fibers, and many proposals have been made to improve these problems. Broadly speaking, there are two types: a type in which a sheet-like material is fed out from the atmosphere, introduced into a depressurized processing chamber with a continuous sealing mechanism, and then rolled up again in the atmosphere; There are two types: batch continuous type, which is all carried out in one vacuum vessel; The former type with a continuous sealing mechanism has advantages such as being able to downsize the vacuum processing chamber and being able to change the level without releasing the vacuum state, making it easy to work with. When processing a sheet-like object, volatile substances such as air contained in the sheet cannot be sufficiently removed by the sealing portion alone, and there is a problem in sealing performance when processing speed increases.

In addition, in the latter batch continuous type processing machine, the feeding means and winding means for sheet-like materials are built into the reduced pressure processing container, so the volume of the reduced pressure container increases, and until the desired degree of reduced pressure is reached. The problem is that the time taken is too long and the processing efficiency is reduced.

[Purpose of the invention]

The purpose of the present invention is to improve the above-mentioned drawbacks of conventional plasma processing equipment, and to take advantage of the features of a continuous batch system that allows processing under stable conditions without changing the degree of vacuum even during high-speed processing, and to reduce the volume of a vacuum processing vessel. The purpose of the present invention is to provide a plasma processing apparatus that can minimize the amount of time required to process a workpiece, and can perform single-sided processing and double-sided processing of an object to be processed depending on the purpose using the same processing apparatus.

[Structure of the invention]

The present invention has the following configuration to achieve the above object. That is, it is a plasma processing apparatus having a reduced pressure processing container, a feeding means, a winding means, and a plasma irradiation means for the object to be processed housed in the reduced pressure processing container, wherein the plasma irradiation means has a plurality of opposing An electrode is composed of a flat cathode and one or more rod-shaped anodes sandwiched between the flat cathode, and at least two or more units of this electrode configuration are provided at both ends of these electrodes. The present invention is characterized by a plasma processing apparatus for long objects in which a group of guide rolls forms a path for processing one side of the object to be processed, and a group of guide rolls forms a path for processing both sides of the object.

The objects to be treated used in the present invention include fabrics such as woven fabrics, knitted fabrics, nonwoven fabrics, and webs, sheet-like objects such as films, foils, and papers, or composites thereof, or fabrics and sheet-like objects such as these. Materials coated with resin or the like, as well as yarn materials such as spun yarn and filament I yarn, are applicable.

The present invention integrates a feeding means, a winding means, a conveyance means, and a plasma irradiation means for the object to be processed in one reduced pressure processing container. By minimizing the volume of the equipment and making it more compact, we can save energy, improve work efficiency, and improve processing efficiency. Furthermore, when processing a long object, there are cases where plasma irradiation is performed only on one side of the long object,
The structure is such that it is possible to freely select whether to perform it on both sides at the same time.

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view of a plasma processing apparatus for long objects according to the present invention, FIG. 2 is a plan view thereof, and FIG. 3 is an enlarged view of a plasma processing section. In FIGS. 1 and 2, the symbol 1 is a vacuum processing container, and the reference numeral 12 and 13 is a movable door constituting a part of the vacuum processing container 1. As shown in FIG. 8 and 9 are paths of the long object to be processed 23, path 8 shows the case where only one side of the object 23 to be processed is processed, and path 9 shows the case where both sides are processed.

The reduced pressure processing container 1 is connected to a reduced pressure pump 10 via an exhaust pipe 14 and is maintained at a reduced pressure of about 10-' Torr, and the object to be processed 23 is subjected to low-temperature plasma processing under this reduced pressure.

The workpiece 23 is wound up as a feeding roll 2 on a rotating shaft 4 constituting a feeding means 19, and from that state is wound up on a rotating shaft 5 forming a winding means 20 via a path 8 or 9. It is wound up into a roll 3 and completed. The objects to be processed 23 are transported by driving the rotating shafts 4 and/or 5 by the drive motor 11.

The conveyance means 21 for the long workpiece 23 is composed of guide rollers, guide bars, etc., and a part or all of these can also be rotated by the motor 11 via an appropriate transmission system.

Here, the rotating shafts 4 and 5 have workpieces 2 on their respective shafts.
3 are arranged so that their outer peripheries overlap each other when the entire amount is rolled up, and they are also arranged close to each other so that their outer peripheries do not come into contact with each other during the unwinding and winding operation. This results in
The volume of the reduced pressure processing container 1 can be reduced, and the preparation time required to reach a predetermined degree of reduced pressure can be shortened.

The plasma irradiation means 22 includes two plate-shaped cathodes 6, 6; 6', 6' arranged opposite to each other, and a plurality of cathodes 6, 676', 6' disposed between each of the two plate-shaped cathodes 6, 6', 6'. The anodes 7 and 7' constitute an electrode. In the present invention, two or more electrode units are provided.

By employing such an electrode configuration, low-temperature plasma generated by discharge can be efficiently utilized, and the volume occupied by the electrodes can be reduced to a minimum. Furthermore, by employing such electrodes, it becomes possible for the first time to arrange the electrodes such that both sides of the object to be processed 23 can be processed at once within one reduced-pressure processing container 1.

Here, in order to further increase the discharge efficiency, the surface area (the total area of the surfaces corresponding to the anodes) of the plate-shaped cathodes 6.6゛ arranged opposite to each other is made larger than the total surface area of the rod-shaped anodes 7゜7゛. Stable discharge can be achieved by setting the ratio to preferably 1.5 times or more, more preferably 2.5 times or more.

In the present invention, in the configuration of the plasma irradiation means 22 as described above, in combination with a group of guide rollers constituting the conveying means 21, single-sided processing and double-sided processing of the long workpiece 23 can be selectively performed. It has become. Figures 1 and 3
In the figure, 8 and 9 indicate paths for single-sided processing and double-sided processing of the workpiece 23, respectively, and 16 and 17 forming the conveying means 21 are guide rollers for forming the path 8 for single-sided processing. A group of guide rollers 15 and 16 forming the conveying means 21 are a group of guide rollers for forming a path 9 for double-sided processing.

That is, in the present invention, a plurality of groups of guide rollers 15, 16 and 17 are provided at both ends of the electrode of the plasma irradiation means 22, and the group of guide rollers 16 provided at one electrode (disposed on the left side of the figure) is long. Whether the object 23 to be processed is treated on both sides or on one side, it is passed through in the same state in a U-shape. On the other hand, for the other electrode (disposed on the right side of the figure), a group of guide rollers 17 used for single-sided processing and a group of guide rollers 15 used for double-sided processing are provided in a mixed manner; When the object to be processed that has exited the front electrode is placed in the other (back) electrode, if it is single-sided processing, pass 8 is used to move the back electrode to the guide roller in the same way as the front electrode. U between 17
This can be done by passing it through the glyph. When double-sided processing is performed, the workpiece 23 is guided from the upper end of the front electrode to the lower end of the rear electrode using the path 9, and from there, the guide roller 15 is used to guide the object 23 inside the electrode in an inverted U-shape. Let it pass.

In the present invention, in order to switch and selectively use the path 8 and the path 9, appropriate guide means provided on each conveying means,
For example, this can be carried out by guiding a long workpiece using a guide chain or the like.

〔Effect of the invention〕

The apparatus of the present invention can be used to treat highly air-containing sheet materials, such as materials, nonwoven fabrics, tows, fibers, coated materials, porous films, etc., especially when the degree of vacuum in the reduced pressure processing chamber is reduced due to changes in processing speed. There is no change, the features of the batch type processing machine are retained, and it is possible to perform single-sided and double-sided processing of the workpiece with simple operations.

[Brief explanation of drawings]

FIG. 1 shows a sectional view of a plasma processing apparatus according to the present invention, and FIG. 2 shows a plan view thereof. FIG. 3 is an enlarged side view showing the plasma irradiation part of the apparatus of the present invention. 1... Decompression processing container, 2... Feeding roll, 3...
Winding roll, 4... Rotating shaft, 5... Rotating shaft, 6, 6
°...Cathode, 7,7゛...Anode, 8...(for single-sided processing) pass, 9...(for double-sided processing) pass, 15.16
．． 17... A group of guide rollers, 19... Feeding means,
20... Winding means, 21... Conveying means, 22...
Plasma irradiation means.

Claims (1)

[Claims] A plasma processing apparatus comprising a reduced pressure processing container, a feeding means, a winding means, and a plasma irradiation means for an object to be processed housed in the reduced pressure processing container, wherein the plasma irradiation means comprises a plurality of opposing flat plate-shaped An electrode is composed of a cathode of A plasma processing apparatus for long objects, characterized in that a guide roll group for forming a path for processing one side of an object and a group of guide rolls for forming a path for processing both sides of an object are arranged.