JPS62172034A - Plasma treating apparatus - Google Patents

Abstract

PURPOSE:An apparatus, having adjacent delivery means and winding means in a vacuum treating vessel and further a plasma irradiation means provided opposite thereto and capable of stably carrying out treatment even at a high treatment speed without changing the vacuum degree and minimizing the treating vessel. CONSTITUTION:An apparatus capable of feeding a material 15 to be treated in a state wound up around a shaft 4 as a delivery roll 2 which is a delivery means 16 to a plasma irradiation means 19 with combination of cathodes 6 and 6' anodes 7 and 7' through an one-side treating route 8 or both-side treating route 9 and winding onto a winding shaft 5 which is a winding means 17 and completing the treatment in a state of a roll 3. The delivery means 15 and winding means 17 are arranged in a very close vertical orientation and placed in an area 18 to prevent the contact of the material 15 to be treated in any stage of both means and further satisfy the formula D>=2A [0.343(B/A)<2>+0.707] (A is the radius of the delivery and winding rolls when the material 15 is completely wound up; B is the radius of both shafts; D is the distance between the central axes of both shafts).

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an AM for plasma-treating a continuous body such as a sheet-like material such as a film or a fabric, or a continuous material such as a yarn material.

[Prior art and its problems] Conventionally, there has been a strong demand for hydrophobic synthetic fibers to be treated to prevent recontamination (darkening) caused by washing textile products (hereinafter abbreviated as SR treatment). In conventional methods, the surface of hydrophobic fibers is made hydrophilic by applying a water-soluble resin to the fiber surface, thereby imparting SR properties. However, such resin processing methods lack durability against washing during wear. In addition, since it promotes transfer sublimation in which the dye dyed onto the resin attached to the fiber surface is transferred, the color fastness is reduced.

Furthermore, since the hydrophilic resin used is generally a polyethylene glycol resin or its derivative, the treated fabric has many drawbacks such as a strong stiff feel. Therefore, it has been desired to develop a technique that does not have such drawbacks and can impart SR properties to fiber fabrics, especially synthetic fiber fabrics, at low cost and on an industrial scale.

As a way to solve these problems, it has recently been discovered that instead of resin treatment, the fiber surface can be directly hydrophilized by plasma treatment, giving it superior SR properties equivalent to or better than that of cotton. It's here.

However, various problems have arisen with plasma processing apparatuses that can continuously process continuous objects such as sheet-like materials and fibers, and there are many methods for improving these problems. Broadly speaking, there are two types: a type in which a sheet-like material is fed out from the atmosphere, introduced into a depressurized processing chamber with a continuous sealing mechanism, and then rolled up again in the atmosphere; It is divided into bunch continuous type, all conducted in one vacuum vessel. The former type, which has a continuous sealing mechanism, has the advantage of being able to downsize the decompression chamber and being able to change the level without releasing the decompression state, making it easy to work with. When processing an air-containing sheet, volatile substances such as air contained in the sheet cannot be sufficiently removed by the sealing portion alone, which causes problems in sealing performance when the processing speed is increased.

In addition, in the latter batch continuous type processing machine, the means for feeding out and winding up sheet-like materials is built into the vacuum container, so the volume of the vacuum container becomes large, and it takes time to reach the desired degree of vacuum. There is a problem in that the processing efficiency becomes excessive and the processing efficiency decreases.

[Purpose of the invention]

The purpose of the present invention is to improve the above-mentioned drawbacks of the conventional plasma processing apparatus, and to avoid changes in the degree of depressurization even during high-speed processing.
It is an object of the present invention to provide a plasma processing apparatus that can perform processing under stable conditions and can minimize the volume of a vacuum vessel while taking advantage of the characteristics of a continuous batch system.

[Structure of the invention]

The present invention has the following configuration to achieve the above object. That is, a reduced pressure processing container, a feeding means and a winding means for the object to be processed stored in the reduced pressure processing container,
A plasma processing apparatus having a plasma irradiation means housed in the reduced pressure processing container, wherein a region where the feeding means and the winding means are arranged adjacent to each other and the plasma irradiation means are arranged opposite to each other. This is a characteristic feature.

In the plasma processing apparatus of the present invention, a means for feeding out the object to be processed, a winding means, and a plasma irradiation means are housed in a reduced pressure processing container, and in particular, the feeding means and the winding means are mutually arranged. The plasma irradiation means is arranged to face an area in which the feeding means and the winding means, which are arranged close to each other, are arranged adjacent to each other. In other words, in the conventional plasma irradiation apparatus, the plasma irradiation means was arranged between the means for feeding out the object to be treated and the means for winding it up, whereas in the present invention, one A feeding means and a winding means are arranged on the side.

The positional relationship between the above-mentioned area and the plasma irradiation means in the reduced pressure container is not particularly limited, and may be horizontally horizontal or vertically vertical. The object to be treated in the present invention may be any material such as woven fabrics, knitted fabrics, nonwoven fabrics, yarns (spun yarns, filament yarns), films, webs, etc.

In the present invention, it is preferable that the feeding means for the workpiece and the winding means are arranged as close as possible. It is necessary to maintain a state of no contact between comrades. Therefore, it is necessary to arrange the workpiece so that there is a clearance so that the outer surface of the workpiece being wound around the feeding means and the outside surface of the workpiece being wound around the winding means do not come into contact at any stage. preferable. The feeding means and the winding means are preferably driven by spindle-driven rotating means, and both rotating shafts are preferably configured to have approximately the same diameter.

Considering the above-mentioned clearance when the feeding means and the winding means are constituted by shafts having the same diameter, the clearance is possible if the following relationship is satisfied.

Here, A: Radius of the feeding means (roll) and the winding means (roll) when the workpiece is completely wound up.

B: Radius of the unwinding and winding shaft.

D: Distance between centers for feeding and winding.

Here, in the case of D≧2A, the effect of disposing the feeding and winding means of the present invention facing the plasma irradiation means and minimizing the volume of the vacuum processing chamber is halved, so preferably, It is desirable to place

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a side view of the plasma processing apparatus according to the present invention.
FIG. 2 is a plan view thereof. In FIGS. 1 and 2, reference numeral 1 indicates a reduced pressure processing container, and reference numerals 12 and 13 indicate a movable door constituting a part of the reduced pressure processing container 1. As shown in FIG. 8 and 9 are the object to be processed 1
5, 8 indicates a route when only one side of the object to be processed 150 is processed, and 9 indicates a route when both sides are processed.

The reduced pressure processing container 1 is connected to a reduced pressure pump 10 via an exhaust pipe 14 and is maintained at a reduced pressure of about 10" 3 Torr.
The object to be treated 15 is subjected to low-temperature plasma treatment under reduced pressure.

The workpiece 15 is supplied in a state where it is wound up on a shaft 4 as a feeding roll 2 serving as a feeding means 16, and is fed through a path 8 or 9.
After that, it is wound up on a winding shaft 5, which is a winding means 17, and is completed in the state of a roll 3.

The objects to be processed 15 are transported by driving the shafts 4 and/or 5 by the drive motor 11.

The feeding means 16 and the winding means 17 for the object to be processed 15 are arranged in a very close vertically adjacent arrangement in the area 18 . This arrangement is not limited to the vertical direction, but can also be arranged horizontally and horizontally.

As explained above, the shafts 4 and 5 are arranged so that when the entire amount of the workpiece 15 is wound around each shaft, their outer circumferences overlap each other, and their outer circumferences come into contact with each other during the unwinding and winding operations. It is best to place them close to each other to avoid them.

In the present invention, the area 18 and the plasma irradiation means 1
9 are placed facing each other in the vacuum processing container. The spacing between them is arbitrary, and although the direction in which they are arranged is horizontal in this embodiment, they may also be arranged in the vertical direction.

The plasma irradiation means 19 consists of two plate-shaped cathodes 6.6;6'', 6゛ and these two plate-shaped cathodes 6,6;6° arranged opposite to each other.
, 6. The electrode is constituted by a combination of a plurality of rod-shaped anodes 7, 7' arranged between 7' and 6'.

The feature of this electrode configuration is that the cathodes 6.6° are plate-shaped and the rod-shaped anode 7.7" is placed between the cathodes, making it possible to efficiently utilize the low-temperature plasma generated by the discharge. This makes it possible to reduce the volume occupied by the electrode to a minimum.By adopting such an electrode, it is possible to process both sides of the object at once in one vacuum processing container for the first time. become.

Here, in order to further increase the discharge efficiency, the surface area of the cathode plates (the total area of the surfaces facing the anode) placed opposite to each other needs to be larger than the total surface area of the rod-shaped anodes, preferably 1.5 Stable discharge can be achieved by increasing the amount by at least twice as much, more preferably by at least 2.5 times.

〔Effect of the invention〕

According to the apparatus of the present invention, when processing highly air-containing sheet-like materials such as woven and knitted fabrics, non-woven fabrics, tows, wedges, yarns, coated materials, porous films, etc., the reduced pressure processing chamber is There is no change in the degree of pressure reduction, and it is possible to process a large amount of objects while maintaining the characteristics of the Hutch 2 processing machine. Further, in the present invention, the volume of the reduced pressure processing container can be reduced, and the time required to reach a predetermined degree of reduced pressure can be shortened.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view of a plasma processing apparatus according to the present invention;
FIG. 2 is a side view of the plasma processing apparatus. 1... Decompression processing container, 2... Feeding roll, 3...
Winding roll, 4... Feeding shaft, 5... Winding shaft, 6
゜6′...Cathode, 7,7°...Anode, 15...Workpiece, 16...Feeding means, 17... Winding means, 1
9...Plasma irradiation means.

Claims (1)

[Scope of Claims] 1. A plasma comprising a reduced pressure processing container, a feeding means and a winding means for an object to be processed contained in the reduced pressure processing container, and a plasma irradiation means contained in the reduced pressure processing container. A plasma processing apparatus characterized in that an area in which the feeding means and the winding means are arranged adjacent to each other and the plasma irradiation means are arranged opposite to each other. 2. A patent claim in which the feeding means and the winding means, which are arranged adjacent to each other, are arranged opposite to each other with a clearance so that the objects to be processed that are engaged with each means do not come into contact with each other during processing. The plasma processing apparatus according to item 1. 3. The plasma processing apparatus according to claim 1, wherein the feeding means and the winding means are constituted by shafts having approximately the same diameter.