JPS6217136U - - Google Patents
Info
- Publication number
- JPS6217136U JPS6217136U JP1985109988U JP10998885U JPS6217136U JP S6217136 U JPS6217136 U JP S6217136U JP 1985109988 U JP1985109988 U JP 1985109988U JP 10998885 U JP10998885 U JP 10998885U JP S6217136 U JPS6217136 U JP S6217136U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- storage jig
- handle
- wafer storage
- storing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985109988U JPS6217136U (enExample) | 1985-07-17 | 1985-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985109988U JPS6217136U (enExample) | 1985-07-17 | 1985-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6217136U true JPS6217136U (enExample) | 1987-02-02 |
Family
ID=30988601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985109988U Pending JPS6217136U (enExample) | 1985-07-17 | 1985-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6217136U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114975172A (zh) * | 2021-02-26 | 2022-08-30 | 东京毅力科创株式会社 | 基板收容装置和处理系统 |
-
1985
- 1985-07-17 JP JP1985109988U patent/JPS6217136U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114975172A (zh) * | 2021-02-26 | 2022-08-30 | 东京毅力科创株式会社 | 基板收容装置和处理系统 |
| JP2022131159A (ja) * | 2021-02-26 | 2022-09-07 | 東京エレクトロン株式会社 | 基板収容装置および処理システム |