JPS6217131U - - Google Patents

Info

Publication number
JPS6217131U
JPS6217131U JP10904885U JP10904885U JPS6217131U JP S6217131 U JPS6217131 U JP S6217131U JP 10904885 U JP10904885 U JP 10904885U JP 10904885 U JP10904885 U JP 10904885U JP S6217131 U JPS6217131 U JP S6217131U
Authority
JP
Japan
Prior art keywords
semiconductor
semiconductor element
sheet
measuring
masking sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10904885U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10904885U priority Critical patent/JPS6217131U/ja
Publication of JPS6217131U publication Critical patent/JPS6217131U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施装置の斜視図、第２図は
半導体素子の測定装置による半導体素子の測定方
法を説明する断面図、第３図は従来装置の斜視図
である。 ８…下測子ホルダ、９…センシング用下測子、
１０…フオーシング用下測子、１１…絶縁物、１
２…測定器、１４…アース、２０…半導体素子。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体素子が形成された半導体基板をダイシン
    グ用のマスキングシートに貼り、個々の半導体素
    子に切断した後、前記マスキングシートに貼り付
    けた状態で半導体素子の電気的特性を測定する装
    置であつて、マスキングシートを突き破つて半導
    体素子と接触する測子の接続をケルビン接続にす
    ることを特徴とする半導体素子の測定装置。
JP10904885U 1985-07-15 1985-07-15 Pending JPS6217131U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10904885U JPS6217131U (ja) 1985-07-15 1985-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10904885U JPS6217131U (ja) 1985-07-15 1985-07-15

Publications (1)

Publication Number Publication Date
JPS6217131U true JPS6217131U (ja) 1987-02-02

Family

ID=30986794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10904885U Pending JPS6217131U (ja) 1985-07-15 1985-07-15

Country Status (1)

Country Link
JP (1) JPS6217131U (ja)

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