JPS6217123U - - Google Patents

Info

Publication number
JPS6217123U
JPS6217123U JP10821385U JP10821385U JPS6217123U JP S6217123 U JPS6217123 U JP S6217123U JP 10821385 U JP10821385 U JP 10821385U JP 10821385 U JP10821385 U JP 10821385U JP S6217123 U JPS6217123 U JP S6217123U
Authority
JP
Japan
Prior art keywords
ozone
utility
model registration
removing organic
ozone chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10821385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10821385U priority Critical patent/JPS6217123U/ja
Publication of JPS6217123U publication Critical patent/JPS6217123U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP10821385U 1985-07-17 1985-07-17 Pending JPS6217123U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10821385U JPS6217123U (enrdf_load_stackoverflow) 1985-07-17 1985-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10821385U JPS6217123U (enrdf_load_stackoverflow) 1985-07-17 1985-07-17

Publications (1)

Publication Number Publication Date
JPS6217123U true JPS6217123U (enrdf_load_stackoverflow) 1987-02-02

Family

ID=30985198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10821385U Pending JPS6217123U (enrdf_load_stackoverflow) 1985-07-17 1985-07-17

Country Status (1)

Country Link
JP (1) JPS6217123U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109236A (en) * 1978-02-15 1979-08-27 Matsushita Electric Works Ltd Air pollution control apparatus
JPS6038542A (ja) * 1983-08-12 1985-02-28 Matsushita Seiko Co Ltd 自動換気扇

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109236A (en) * 1978-02-15 1979-08-27 Matsushita Electric Works Ltd Air pollution control apparatus
JPS6038542A (ja) * 1983-08-12 1985-02-28 Matsushita Seiko Co Ltd 自動換気扇

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