JPH01140819U - - Google Patents

Info

Publication number
JPH01140819U
JPH01140819U JP3633688U JP3633688U JPH01140819U JP H01140819 U JPH01140819 U JP H01140819U JP 3633688 U JP3633688 U JP 3633688U JP 3633688 U JP3633688 U JP 3633688U JP H01140819 U JPH01140819 U JP H01140819U
Authority
JP
Japan
Prior art keywords
processing chamber
lamp house
lamp
light irradiation
irradiation window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3633688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0533004Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3633688U priority Critical patent/JPH0533004Y2/ja
Publication of JPH01140819U publication Critical patent/JPH01140819U/ja
Application granted granted Critical
Publication of JPH0533004Y2 publication Critical patent/JPH0533004Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP3633688U 1988-03-22 1988-03-22 Expired - Lifetime JPH0533004Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3633688U JPH0533004Y2 (enrdf_load_stackoverflow) 1988-03-22 1988-03-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3633688U JPH0533004Y2 (enrdf_load_stackoverflow) 1988-03-22 1988-03-22

Publications (2)

Publication Number Publication Date
JPH01140819U true JPH01140819U (enrdf_load_stackoverflow) 1989-09-27
JPH0533004Y2 JPH0533004Y2 (enrdf_load_stackoverflow) 1993-08-23

Family

ID=31262946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3633688U Expired - Lifetime JPH0533004Y2 (enrdf_load_stackoverflow) 1988-03-22 1988-03-22

Country Status (1)

Country Link
JP (1) JPH0533004Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0533004Y2 (enrdf_load_stackoverflow) 1993-08-23

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