JPS62170628U - - Google Patents
Info
- Publication number
- JPS62170628U JPS62170628U JP5923486U JP5923486U JPS62170628U JP S62170628 U JPS62170628 U JP S62170628U JP 5923486 U JP5923486 U JP 5923486U JP 5923486 U JP5923486 U JP 5923486U JP S62170628 U JPS62170628 U JP S62170628U
- Authority
- JP
- Japan
- Prior art keywords
- impurities
- forming
- tube
- diffusion
- semiconductor wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5923486U JPS62170628U (enExample) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5923486U JPS62170628U (enExample) | 1986-04-18 | 1986-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62170628U true JPS62170628U (enExample) | 1987-10-29 |
Family
ID=30890536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5923486U Pending JPS62170628U (enExample) | 1986-04-18 | 1986-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62170628U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008244088A (ja) * | 2007-03-27 | 2008-10-09 | Naoetsu Electronics Co Ltd | 熱処理方法及び熱処理装置 |
-
1986
- 1986-04-18 JP JP5923486U patent/JPS62170628U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008244088A (ja) * | 2007-03-27 | 2008-10-09 | Naoetsu Electronics Co Ltd | 熱処理方法及び熱処理装置 |