JPS62170593U - - Google Patents

Info

Publication number
JPS62170593U
JPS62170593U JP5743986U JP5743986U JPS62170593U JP S62170593 U JPS62170593 U JP S62170593U JP 5743986 U JP5743986 U JP 5743986U JP 5743986 U JP5743986 U JP 5743986U JP S62170593 U JPS62170593 U JP S62170593U
Authority
JP
Japan
Prior art keywords
preload
moving stage
sliding piece
sample moving
fine movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5743986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5743986U priority Critical patent/JPS62170593U/ja
Publication of JPS62170593U publication Critical patent/JPS62170593U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP5743986U 1986-04-18 1986-04-18 Pending JPS62170593U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5743986U JPS62170593U (enrdf_load_stackoverflow) 1986-04-18 1986-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5743986U JPS62170593U (enrdf_load_stackoverflow) 1986-04-18 1986-04-18

Publications (1)

Publication Number Publication Date
JPS62170593U true JPS62170593U (enrdf_load_stackoverflow) 1987-10-29

Family

ID=30887139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5743986U Pending JPS62170593U (enrdf_load_stackoverflow) 1986-04-18 1986-04-18

Country Status (1)

Country Link
JP (1) JPS62170593U (enrdf_load_stackoverflow)

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