JPS62170523U - - Google Patents

Info

Publication number
JPS62170523U
JPS62170523U JP5994786U JP5994786U JPS62170523U JP S62170523 U JPS62170523 U JP S62170523U JP 5994786 U JP5994786 U JP 5994786U JP 5994786 U JP5994786 U JP 5994786U JP S62170523 U JPS62170523 U JP S62170523U
Authority
JP
Japan
Prior art keywords
channel
recorder
controller
main body
memory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5994786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0526966Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986059947U priority Critical patent/JPH0526966Y2/ja
Publication of JPS62170523U publication Critical patent/JPS62170523U/ja
Application granted granted Critical
Publication of JPH0526966Y2 publication Critical patent/JPH0526966Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Recording Measured Values (AREA)
JP1986059947U 1986-04-21 1986-04-21 Expired - Lifetime JPH0526966Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986059947U JPH0526966Y2 (cs) 1986-04-21 1986-04-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986059947U JPH0526966Y2 (cs) 1986-04-21 1986-04-21

Publications (2)

Publication Number Publication Date
JPS62170523U true JPS62170523U (cs) 1987-10-29
JPH0526966Y2 JPH0526966Y2 (cs) 1993-07-08

Family

ID=30891924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986059947U Expired - Lifetime JPH0526966Y2 (cs) 1986-04-21 1986-04-21

Country Status (1)

Country Link
JP (1) JPH0526966Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010048813A (ja) * 2002-03-22 2010-03-04 Applied Materials Israel Ltd 移動レンズマルチビームスキャナを備えたウェハ欠陥検出システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61281317A (ja) * 1985-05-30 1986-12-11 Sanyo Electric Co Ltd 増設メモリカ−トリツジの使用可能な電子機器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61281317A (ja) * 1985-05-30 1986-12-11 Sanyo Electric Co Ltd 増設メモリカ−トリツジの使用可能な電子機器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010048813A (ja) * 2002-03-22 2010-03-04 Applied Materials Israel Ltd 移動レンズマルチビームスキャナを備えたウェハ欠陥検出システム
JP2010060563A (ja) * 2002-03-22 2010-03-18 Applied Materials Israel Ltd 移動レンズマルチビームスキャナを備えたウェハ欠陥検出システム

Also Published As

Publication number Publication date
JPH0526966Y2 (cs) 1993-07-08

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