JPS62169789U - - Google Patents
Info
- Publication number
- JPS62169789U JPS62169789U JP1986057448U JP5744886U JPS62169789U JP S62169789 U JPS62169789 U JP S62169789U JP 1986057448 U JP1986057448 U JP 1986057448U JP 5744886 U JP5744886 U JP 5744886U JP S62169789 U JPS62169789 U JP S62169789U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- laser beam
- laser
- optical path
- reflected light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 claims description 2
- 238000005286 illumination Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Description
図は本考案のレーザ加工装置の実施例を示す概
略構成図である。
２……レーザビーム、４……ダイクロイツクミ
ラー、１１……被加工物、３０……レーザ発信部
、４０……撮像部。
The figure is a schematic configuration diagram showing an embodiment of the laser processing apparatus of the present invention. 2... Laser beam, 4... Dichroic mirror, 11... Workpiece, 30... Laser transmitting section, 40... Imaging section.
Claims (1)
と、このレーザビームによつて加工される被加工
物を載置するテーブルと、このテーブルと一体に
固定されて前記レーザビームを反射してこれを被
加工物上に導く対物ミラーと、被加工物を照明す
る照明装置と、前記レーザビームと同一の光路を
逆にたどつて進む前記照明による反射光を、その
光路の途中で分離するダイクロイツクミラーと、
このダイクロイツクミラーにより分離された前記
反射光を受け入れて、前記被加工物の撮影を行う
撮像部とを有し、前記テーブルは、前記対物ミラ
ーに入射する前記レーザビームの入射方向にほぼ
平行にスライド可能に支持されていることを特徴
とするレーザ加工装置。 A laser transmitter that outputs a laser beam for processing, a table on which a workpiece to be processed by the laser beam is placed, and a table that is fixed integrally with the table and reflects the laser beam to cover the workpiece. An objective mirror that guides the workpiece onto the workpiece, an illumination device that illuminates the workpiece, and a dichroic mirror that separates the reflected light from the illumination that travels in the same optical path as the laser beam in the opposite direction in the middle of the optical path. and,
and an imaging unit that receives the reflected light separated by the dichroic mirror and photographs the workpiece, and the table is arranged substantially parallel to the direction of incidence of the laser beam incident on the objective mirror. A laser processing device characterized by being slidably supported.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986057448U JPS62169789U (en) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986057448U JPS62169789U (en) | 1986-04-18 | 1986-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62169789U true JPS62169789U (en) | 1987-10-28 |
Family
ID=30887157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986057448U Pending JPS62169789U (en) | 1986-04-18 | 1986-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62169789U (en) |
-
1986
- 1986-04-18 JP JP1986057448U patent/JPS62169789U/ja active Pending