JPS62168666U - - Google Patents

Info

Publication number
JPS62168666U
JPS62168666U JP5657286U JP5657286U JPS62168666U JP S62168666 U JPS62168666 U JP S62168666U JP 5657286 U JP5657286 U JP 5657286U JP 5657286 U JP5657286 U JP 5657286U JP S62168666 U JPS62168666 U JP S62168666U
Authority
JP
Japan
Prior art keywords
mixed gas
distance
oscillator
gas flow
upstream
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5657286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5657286U priority Critical patent/JPS62168666U/ja
Publication of JPS62168666U publication Critical patent/JPS62168666U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP5657286U 1986-04-15 1986-04-15 Pending JPS62168666U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5657286U JPS62168666U (enrdf_load_stackoverflow) 1986-04-15 1986-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5657286U JPS62168666U (enrdf_load_stackoverflow) 1986-04-15 1986-04-15

Publications (1)

Publication Number Publication Date
JPS62168666U true JPS62168666U (enrdf_load_stackoverflow) 1987-10-26

Family

ID=30885498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5657286U Pending JPS62168666U (enrdf_load_stackoverflow) 1986-04-15 1986-04-15

Country Status (1)

Country Link
JP (1) JPS62168666U (enrdf_load_stackoverflow)

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