JPS62168024U - - Google Patents

Info

Publication number
JPS62168024U
JPS62168024U JP5668486U JP5668486U JPS62168024U JP S62168024 U JPS62168024 U JP S62168024U JP 5668486 U JP5668486 U JP 5668486U JP 5668486 U JP5668486 U JP 5668486U JP S62168024 U JPS62168024 U JP S62168024U
Authority
JP
Japan
Prior art keywords
conveyance path
relay
packaging box
urging
stand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5668486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5668486U priority Critical patent/JPS62168024U/ja
Publication of JPS62168024U publication Critical patent/JPS62168024U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Intermediate Stations On Conveyors (AREA)
JP5668486U 1986-04-15 1986-04-15 Pending JPS62168024U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5668486U JPS62168024U (de) 1986-04-15 1986-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5668486U JPS62168024U (de) 1986-04-15 1986-04-15

Publications (1)

Publication Number Publication Date
JPS62168024U true JPS62168024U (de) 1987-10-24

Family

ID=30885719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5668486U Pending JPS62168024U (de) 1986-04-15 1986-04-15

Country Status (1)

Country Link
JP (1) JPS62168024U (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006096498A (ja) * 2004-09-29 2006-04-13 Shimadzu Corp 基板搬送装置およびこれを備える真空処理装置
JP2012060134A (ja) * 2010-09-13 2012-03-22 Nikon Corp 移動体装置、露光装置、デバイス製造方法、フラットパネルディスプレイの製造方法、及び物体交換方法
JP2014201426A (ja) * 2013-04-09 2014-10-27 株式会社小糸製作所 作業装置
JP2015124049A (ja) * 2013-12-26 2015-07-06 ダイハツ工業株式会社 搬送装置
JP2015182863A (ja) * 2014-03-25 2015-10-22 トヨタ紡織株式会社 下降式搬送装置
JP2015212197A (ja) * 2014-05-07 2015-11-26 有限会社イシガミ 搬送装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006096498A (ja) * 2004-09-29 2006-04-13 Shimadzu Corp 基板搬送装置およびこれを備える真空処理装置
JP4581602B2 (ja) * 2004-09-29 2010-11-17 株式会社島津製作所 真空処理装置
JP2012060134A (ja) * 2010-09-13 2012-03-22 Nikon Corp 移動体装置、露光装置、デバイス製造方法、フラットパネルディスプレイの製造方法、及び物体交換方法
TWI582538B (zh) * 2010-09-13 2017-05-11 尼康股份有限公司 移動體裝置、曝光裝置、元件製造方法、平板顯示器之製造方法、及物體交換方法
TWI665528B (zh) * 2010-09-13 2019-07-11 日商尼康股份有限公司 移動體裝置、曝光裝置、元件製造方法、平板顯示器之製造方法、及物體交換方法
JP2014201426A (ja) * 2013-04-09 2014-10-27 株式会社小糸製作所 作業装置
JP2015124049A (ja) * 2013-12-26 2015-07-06 ダイハツ工業株式会社 搬送装置
JP2015182863A (ja) * 2014-03-25 2015-10-22 トヨタ紡織株式会社 下降式搬送装置
JP2015212197A (ja) * 2014-05-07 2015-11-26 有限会社イシガミ 搬送装置

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