JPS6216677Y2 - - Google Patents
Info
- Publication number
- JPS6216677Y2 JPS6216677Y2 JP1980120903U JP12090380U JPS6216677Y2 JP S6216677 Y2 JPS6216677 Y2 JP S6216677Y2 JP 1980120903 U JP1980120903 U JP 1980120903U JP 12090380 U JP12090380 U JP 12090380U JP S6216677 Y2 JPS6216677 Y2 JP S6216677Y2
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- ion
- gate
- guard electrode
- fet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 230000005669 field effect Effects 0.000 claims description 3
- 239000003792 electrolyte Substances 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 13
- 239000010410 layer Substances 0.000 description 9
- 238000005259 measurement Methods 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 150000002739 metals Chemical class 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical class O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- -1 ion ion Chemical class 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980120903U JPS6216677Y2 (de) | 1980-08-25 | 1980-08-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980120903U JPS6216677Y2 (de) | 1980-08-25 | 1980-08-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5742945U JPS5742945U (de) | 1982-03-09 |
| JPS6216677Y2 true JPS6216677Y2 (de) | 1987-04-27 |
Family
ID=29481576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980120903U Expired JPS6216677Y2 (de) | 1980-08-25 | 1980-08-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6216677Y2 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3480430D1 (en) * | 1983-08-24 | 1989-12-14 | Cordis Europ | Apparatus for selectively measuring ions in a liquid |
| JPH0465273U (de) * | 1990-10-18 | 1992-06-05 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53109690A (en) * | 1977-03-07 | 1978-09-25 | Hewlett Packard Yokogawa | Temperatureecompensated los transistor type ph meter |
| JPS54128791A (en) * | 1978-03-30 | 1979-10-05 | Shingijutsu Kaihatsu Jigyodan | Ion sensor using semiconductor field effect |
-
1980
- 1980-08-25 JP JP1980120903U patent/JPS6216677Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53109690A (en) * | 1977-03-07 | 1978-09-25 | Hewlett Packard Yokogawa | Temperatureecompensated los transistor type ph meter |
| JPS54128791A (en) * | 1978-03-30 | 1979-10-05 | Shingijutsu Kaihatsu Jigyodan | Ion sensor using semiconductor field effect |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5742945U (de) | 1982-03-09 |
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