JPS62166266U - - Google Patents
Info
- Publication number
- JPS62166266U JPS62166266U JP5311486U JP5311486U JPS62166266U JP S62166266 U JPS62166266 U JP S62166266U JP 5311486 U JP5311486 U JP 5311486U JP 5311486 U JP5311486 U JP 5311486U JP S62166266 U JPS62166266 U JP S62166266U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- liquid phase
- phase epitaxial
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 15
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 239000007791 liquid phase Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5311486U JPS62166266U (es) | 1986-04-08 | 1986-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5311486U JPS62166266U (es) | 1986-04-08 | 1986-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62166266U true JPS62166266U (es) | 1987-10-22 |
Family
ID=30878884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5311486U Pending JPS62166266U (es) | 1986-04-08 | 1986-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62166266U (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009144217A (ja) * | 2007-12-17 | 2009-07-02 | Toyota Motor Corp | 真空アーク蒸着装置 |
-
1986
- 1986-04-08 JP JP5311486U patent/JPS62166266U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009144217A (ja) * | 2007-12-17 | 2009-07-02 | Toyota Motor Corp | 真空アーク蒸着装置 |
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