JPS642075U - - Google Patents
Info
- Publication number
- JPS642075U JPS642075U JP9316387U JP9316387U JPS642075U JP S642075 U JPS642075 U JP S642075U JP 9316387 U JP9316387 U JP 9316387U JP 9316387 U JP9316387 U JP 9316387U JP S642075 U JPS642075 U JP S642075U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- groove
- sealed tube
- substrate support
- cylindrical member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000007791 liquid phase Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9316387U JPS642075U (es) | 1987-06-16 | 1987-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9316387U JPS642075U (es) | 1987-06-16 | 1987-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS642075U true JPS642075U (es) | 1989-01-09 |
Family
ID=30955506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9316387U Pending JPS642075U (es) | 1987-06-16 | 1987-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS642075U (es) |
-
1987
- 1987-06-16 JP JP9316387U patent/JPS642075U/ja active Pending