JPS6216549B2 - - Google Patents
Info
- Publication number
- JPS6216549B2 JPS6216549B2 JP2046178A JP2046178A JPS6216549B2 JP S6216549 B2 JPS6216549 B2 JP S6216549B2 JP 2046178 A JP2046178 A JP 2046178A JP 2046178 A JP2046178 A JP 2046178A JP S6216549 B2 JPS6216549 B2 JP S6216549B2
- Authority
- JP
- Japan
- Prior art keywords
- plating
- precious metal
- lead frame
- strike
- silver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007747 plating Methods 0.000 claims description 74
- 238000000034 method Methods 0.000 claims description 18
- 239000010970 precious metal Substances 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 238000009713 electroplating Methods 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 description 34
- 239000004332 silver Substances 0.000 description 34
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 33
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 8
- 229910052737 gold Inorganic materials 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 5
- 230000000873 masking effect Effects 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- -1 silver ions Chemical class 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Lead Frames For Integrated Circuits (AREA)
Description
【発明の詳細な説明】
本発明は部分的に貴金属めつきが施されたリー
ドフレームを用いて製造された半導体装置に関
し、特に半導体装置用リードフレームの部分めつ
きに於いて、特にマスキングなしで、部分的に銀
めつき又は、金めつき等を施すめつき方法に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a semiconductor device manufactured using a lead frame partially plated with a precious metal, and particularly to a method for partially plating a lead frame for a semiconductor device without masking. , relates to a plating method for partially applying silver plating, gold plating, etc.
半導体装置用リードフレームは、一般に比較的
低廉な鉄や銅又は、それらの合金等を素材とし
て、これを所定の寸法形状にプレス又は、エツチ
ング法等により成形し、これに素子の接着性や、
電極リードの金属細線のボンデイング性を良好な
らしめる為、所定めつき膜厚の銀、あるいは金
等、高価な貴金属のめつき膜を形成している。 Lead frames for semiconductor devices are generally made of relatively inexpensive materials such as iron, copper, or their alloys, and are formed into a predetermined size and shape by pressing or etching.
In order to improve the bonding properties of the thin metal wire of the electrode lead, a plating film of an expensive noble metal such as silver or gold is formed with a predetermined thickness.
従来、この銀又は、金等のめつき膜は、リード
成形されたリードフレーム基体の表面全体をめつ
き被覆していた為、リードフレームの価格はどう
しても高価にならざるを得なかつた。 Conventionally, this plating film of silver, gold, etc. has been applied to cover the entire surface of a lead frame substrate formed by lead molding, which inevitably increases the price of the lead frame.
現在、リードフレームの価格を大巾に低減する
方法として銀あるいは金等のめつき所要量を極力
減少させる部分めつき法が採用されつつある。す
なわちリードフレームのうち素子の接着部分や、
リード線のボンデイング部分等、機能的に必要な
箇所にのみ、銀あるいは金等のめつき膜を形成す
ることにより銀あるいは金等の所要量を減少させ
る部分めつき法の採用である。 Currently, as a method of drastically reducing the price of lead frames, a partial plating method is being adopted that minimizes the amount of plating required for silver, gold, etc. In other words, the adhesive part of the element in the lead frame,
This is a partial plating method that reduces the amount of silver or gold required by forming a plating film of silver or gold only at functionally necessary locations, such as the bonding portions of lead wires.
従来、部分めつき方法の一つとして、リードフ
レームのめつきの必要でない箇所を液状樹脂ある
いは、樹脂テープで被覆し、然る後リードフレー
ム全体をめつき浴中に浸漬し、めつきを行なつた
後、マスキングを剥離する方法がある。この様な
部分めつき方式は、コイル状リードフレームの連
続めつきで行なわれることが多い。バツチ式の部
分めつき方法としては、リードフレームの一部を
ゴム等により機械的に被覆し、被覆されていない
箇所にめつき液を噴き上げ等の方法により接触さ
せる方法がある。 Conventionally, one method of partial plating is to cover parts of the lead frame that do not require plating with liquid resin or resin tape, and then immerse the entire lead frame in a plating bath to perform plating. After that, there is a method to remove the masking. Such a partial plating method is often performed by continuous plating of a coiled lead frame. As a batch type partial plating method, there is a method in which a part of the lead frame is mechanically covered with rubber or the like, and a plating liquid is brought into contact with the uncovered portion by squirting or the like.
これらのめつき方式では、確かにめつき材料費
の節約にはなるが、マスキングの材料費や装置の
面で高価なものになる欠点がある。この様な欠点
に加えて、リードフレームの素材が鉄を主成分と
したものである場合、さびを防ぐ目的から、銀め
つきの前に、全面に銅あるいはニツケルめつきを
施す必要があり、然る後、上記のような部分めつ
き方式を行なつた場合、工数面でも多大の費用を
要することになる。 Although these plating methods certainly save on the cost of plating materials, they have the disadvantage of increasing the cost of masking materials and equipment. In addition to these drawbacks, if the lead frame material is mainly iron, it is necessary to apply copper or nickel plating to the entire surface before silver plating to prevent rust. If a partial plating method such as that described above is performed after the plating, a large amount of cost will be required in terms of man-hours as well.
本発明は、鉄を主成分とする素材のリードフレ
ームに、さび等の不具合を生じさせることなく、
且つ、マスキングもなしに安価な方法で部分銀め
つき又は、部分金めつき等を行なう方法を提供す
ることにある。 The present invention enables lead frames made of iron as a main component to be used without causing defects such as rust.
Another object of the present invention is to provide a method for performing partial silver plating, partial gold plating, etc. at low cost without masking.
次に、部分銀めつきの実施例を図面を用いて詳
細に説明する。 Next, an example of partial silver plating will be described in detail with reference to the drawings.
第1図は、一般的に半導体装置に用いられるリ
ードフレームの一例である。三本一組となつたリ
ード11,12,13はその先端部は帯状帯14
で固定され他の先端は枠板10に連絡せしめられ
ている。7は素子のマウント及び細線のボンデイ
ングに必要な箇所であり、例えば、銀あるいは金
等の貴金属めつきが必要な範囲を示す。8は、半
導体製品としてプリント基板などに半田付される
箇所であり、一般に、予備半田が施される範囲で
ある。 FIG. 1 is an example of a lead frame commonly used in semiconductor devices. The ends of the three leads 11, 12, 13 are connected to a belt-like band 14.
The other end is connected to the frame plate 10. Reference numeral 7 indicates the area necessary for mounting the device and bonding the thin wire, and indicates the area where noble metal plating such as silver or gold is required, for example. Reference numeral 8 denotes a part to be soldered to a printed circuit board or the like as a semiconductor product, and is generally an area where preliminary soldering is applied.
次に、第1図の箇所7の範囲にのみ、所定の厚
さの銀めつきを施すめつき方法の実施例につい
て、第2図、第3図を用い説明する。ここで、第
2図、第3図のリードフレームは、第1図のA―
A′断面にて表わしてある。 Next, an embodiment of a plating method in which silver plating is applied to a predetermined thickness only in the area 7 in FIG. 1 will be described with reference to FIGS. 2 and 3. Here, the lead frames in FIGS. 2 and 3 are A-
It is shown in section A'.
第2図は、第1図に示す構造をした鉄を主成分
としたリードフレーム素材1に予め銅めつき2を
厚さ0.5μ以上施行したものの表面に、ストライ
ク銀めつき3をめつき浴の表面4の位置まで行な
うことを示したものである。 Figure 2 shows a lead frame material 1 whose main component is iron having the structure shown in Figure 1, which has been previously coated with copper plating 2 to a thickness of 0.5μ or more, and then a strike silver plating 3 is applied in a plating bath. This shows that the process is carried out up to the surface 4 of the surface.
第3図は、ストライク銀めつきの後、本銀めつ
き5をめつき浴の表面6の位置まで施行すること
を示す。ここで表面4と6の間は、数mm以上の距
離があるのが望ましい。 FIG. 3 shows that after the strike silver plating, main silver plating 5 is applied to the surface 6 of the plating bath. Here, it is desirable that there be a distance of several mm or more between the surfaces 4 and 6.
この理由を以下に述べる。 The reason for this will be explained below.
即ち、ストライク銀めつき浴の表面4の位置に
於いては、めつき液が表面張力によりリード線周
囲にはい上る。そしてこの部分は初期的には、銀
めつきがされても銀イオンの供給が悪い為、表面
が腐食され易い状態にあり、特に、銅や鉄は腐食
され易い。従つて、前記表面4の位置でも本銀め
つきを行なう等、長時間めつき浴に浸漬するのは
好ましくなく腐食を最小限に抑える為には、スト
ライク銀めつき程度の浸漬時間にとどめておく必
要がある。ここで、銅めつき層2の厚さは、0.5
μ以上を必要とし、表面は緻密な方が望ましく、
この為には、いわゆるPR法等の採用が適してい
る。 That is, at the surface 4 of the strike silver plating bath, the plating liquid creeps up around the lead wires due to surface tension. Initially, even if silver plating is applied to this part, the supply of silver ions is poor, so the surface is easily corroded, and copper and iron are particularly susceptible to corrosion. Therefore, it is not preferable to immerse the surface 4 in a plating bath for a long period of time, such as performing main silver plating at the position of the surface 4. In order to minimize corrosion, the immersion time should be limited to the time required for strike silver plating. It is necessary to keep it. Here, the thickness of the copper plating layer 2 is 0.5
μ or more is required, and a dense surface is preferable.
For this purpose, it is appropriate to adopt the so-called PR method.
次に、本銀めつきを行なう際には、リードフレ
ームを数mm、一例では、5〜10mm位引き上げてや
れば、本銀めつき液表面6の位置に於いては、ス
トライク銀層3があり、銀表面は、めつき液のは
い上りによる腐食を受け難い為、安定である。こ
こで腐食を受けない為のストライク銀層3の厚さ
は、0.2μ以上を必要とする。 Next, when performing main silver plating, if the lead frame is pulled up several mm, for example, about 5 to 10 mm, the strike silver layer 3 will be at the position of the main silver plating liquid surface 6. Yes, the silver surface is stable because it is less susceptible to corrosion due to plating solution creeping up. In order to avoid corrosion, the thickness of the strike silver layer 3 needs to be 0.2μ or more.
かようにしてめつきされたリードフレームは、
銀めつき層5の表面に素子及び細線のボンデイン
グが可能であり、銀めつき層5を除く表面部分は
銅めつき層2及びストライク銀めつき層3がある
為、溶融半田による被覆が可能であり、リードフ
レーム全面に銀めつき層を設けた場合と特性上何
ら遜色がない。これに加えて、マスキングも不必
要な為、加工工数も増えることなくめつきが可能
であり、大巾な銀めつき材料費の低減が可能であ
る。 The lead frame plated in this way is
Bonding of elements and thin wires is possible on the surface of the silver plating layer 5, and since the surface area other than the silver plating layer 5 has a copper plating layer 2 and a strike silver plating layer 3, it can be covered with molten solder. Therefore, there is no inferiority in characteristics to the case where a silver plating layer is provided on the entire surface of the lead frame. In addition, since masking is not required, plating can be performed without increasing the number of processing steps, making it possible to significantly reduce the cost of silver plating materials.
第1図は、一般的なリードフレーム形状を示す
平面図、第2図は、ストライク銀めつき中のリー
ドフレームの断面図、第3図は、本銀めつき中の
リードフレームの断面図を示す。
1……リードフレーム素材、2……銀めつき
層、3……ストライク銀めつき層、5……本銀め
つき層、10……枠板、11,12,13……リ
ード。
Figure 1 is a plan view showing a general lead frame shape, Figure 2 is a sectional view of the lead frame during strike silver plating, and Figure 3 is a sectional view of the lead frame during main silver plating. show. 1... Lead frame material, 2... Silver plating layer, 3... Strike silver plating layer, 5... Real silver plating layer, 10... Frame board, 11, 12, 13... Lead.
Claims (1)
ない、その他の箇所はめつき浴液面の外部に出し
てめつき層を設けない部分貴金属めつき方法に於
いて、前記リードフレームの所要部にストライク
貴金属めつきを行い、次いで該ストライク貴金属
めつきの必要とする箇所に本貴金属めつきを行う
に際し、前記ストライク貴金属めつきは前記必要
とする箇所よりやや深くめつき浴中に浸漬してめ
つきし、前記本貴金属めつきは前記ストライク貴
金属めつき時よりも浅く前記リードフレームを前
記めつき浴中に浸漬してめつきし、もつて前記必
要とする箇所に所定の厚さを有するように段差を
設けて貴金属をめつきすることを特徴とした半導
体装置用リードフレームの部分めつき方法。1. In a partial precious metal plating method in which a predetermined part is immersed in a plating bath and electrolytic plating is performed, and other parts are exposed outside the plating bath liquid level and a plating layer is not provided, the requirements for the lead frame are as follows: When applying strike precious metal plating to the area and then applying main precious metal plating to the areas where the strike precious metal plating is required, the strike precious metal plating is immersed in a plating bath slightly deeper than the areas where the strike precious metal plating is required. plating, and the main precious metal plating is performed by immersing the lead frame in the plating bath to a shallower depth than in the strike precious metal plating, so that the required part has a predetermined thickness. A partial plating method for a lead frame for a semiconductor device, which is characterized by plating precious metal with steps as shown in FIG.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2046178A JPS54113255A (en) | 1978-02-23 | 1978-02-23 | Partial plating method of lead frame for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2046178A JPS54113255A (en) | 1978-02-23 | 1978-02-23 | Partial plating method of lead frame for semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54113255A JPS54113255A (en) | 1979-09-04 |
JPS6216549B2 true JPS6216549B2 (en) | 1987-04-13 |
Family
ID=12027710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2046178A Granted JPS54113255A (en) | 1978-02-23 | 1978-02-23 | Partial plating method of lead frame for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54113255A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0425691A4 (en) * | 1989-05-01 | 1993-03-31 | Sumitomo Electric Industries, Ltd. | Lead frame for semiconductor devices |
-
1978
- 1978-02-23 JP JP2046178A patent/JPS54113255A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS54113255A (en) | 1979-09-04 |
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