JPS6216463U - - Google Patents

Info

Publication number
JPS6216463U
JPS6216463U JP10691785U JP10691785U JPS6216463U JP S6216463 U JPS6216463 U JP S6216463U JP 10691785 U JP10691785 U JP 10691785U JP 10691785 U JP10691785 U JP 10691785U JP S6216463 U JPS6216463 U JP S6216463U
Authority
JP
Japan
Prior art keywords
laser beam
inspected
container
foreign matter
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10691785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH051814Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10691785U priority Critical patent/JPH051814Y2/ja
Publication of JPS6216463U publication Critical patent/JPS6216463U/ja
Application granted granted Critical
Publication of JPH051814Y2 publication Critical patent/JPH051814Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10691785U 1985-07-15 1985-07-15 Expired - Lifetime JPH051814Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10691785U JPH051814Y2 (enrdf_load_stackoverflow) 1985-07-15 1985-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10691785U JPH051814Y2 (enrdf_load_stackoverflow) 1985-07-15 1985-07-15

Publications (2)

Publication Number Publication Date
JPS6216463U true JPS6216463U (enrdf_load_stackoverflow) 1987-01-31
JPH051814Y2 JPH051814Y2 (enrdf_load_stackoverflow) 1993-01-18

Family

ID=30982717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10691785U Expired - Lifetime JPH051814Y2 (enrdf_load_stackoverflow) 1985-07-15 1985-07-15

Country Status (1)

Country Link
JP (1) JPH051814Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0178679U (enrdf_load_stackoverflow) * 1987-11-16 1989-05-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0178679U (enrdf_load_stackoverflow) * 1987-11-16 1989-05-26

Also Published As

Publication number Publication date
JPH051814Y2 (enrdf_load_stackoverflow) 1993-01-18

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