JPS6216455U - - Google Patents
Info
- Publication number
- JPS6216455U JPS6216455U JP10750385U JP10750385U JPS6216455U JP S6216455 U JPS6216455 U JP S6216455U JP 10750385 U JP10750385 U JP 10750385U JP 10750385 U JP10750385 U JP 10750385U JP S6216455 U JPS6216455 U JP S6216455U
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- measuring cell
- humidity
- gas
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000035945 sensitivity Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 1
- 239000003960 organic solvent Substances 0.000 claims 1
- 230000010355 oscillation Effects 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
Description
第１図は、この考案の水分測定セルを用いた湿
度測定装置を例示する構成説明図、第２図は、こ
の考案に用いる湿度センサの感度を説明するため
のグラフ、第３図及び第４図はそれぞれこの考案
の水分測定セルによる水分応答性を説明するため
のグラフである。
ａ，ｂ……湿度センサ、２……水分測定セル、
５……感湿膜、６……水晶発振子、２１……ガス
導入口、２２……ガス排出口、２３……差動演算
部、２４……レコーダ。
FIG. 1 is a configuration explanatory diagram illustrating a humidity measuring device using the moisture measuring cell of this invention, FIG. 2 is a graph for explaining the sensitivity of the humidity sensor used in this invention, and FIGS. Each figure is a graph for explaining the moisture responsiveness of the moisture measuring cell of this invention. a, b...humidity sensor, 2...moisture measurement cell,
5...Moisture sensitive film, 6...Crystal oscillator, 21...Gas inlet, 22...Gas outlet, 23...Differential calculation section, 24...Recorder.
Claims (1)
の感度は異なるが有機溶媒についての感度が実質
的に同一の二つの湿度センサを内蔵してなり、こ
れらの両湿度センサの出力差に基づいて導入ガス
中の水分濃度を決定しうる差動演算部を具備して
なる水分測定セル。 ２ 湿度センサが、圧電素子上にプラズマ重合膜
をベースとする感湿膜を形成してなる発振周波数
検知型のセンサである実用新案登録請求の範囲第
１項記載の水分測定セル。 ３ 二つの湿度センサが、ガスの導入方向に対し
てその感湿面が平行となるように内蔵されてなる
実用新案登録請求の範囲第１項記載の水分測定セ
ル。[Claims for Utility Model Registration] 1. A device that is equipped with a gas inlet and a gas outlet, and has two built-in humidity sensors with different sensitivities for moisture but substantially the same sensitivity for organic solvents; A moisture measuring cell comprising a differential calculation unit capable of determining the moisture concentration in introduced gas based on the output difference of the sensor. 2. The moisture measuring cell according to claim 1, wherein the humidity sensor is an oscillation frequency detection type sensor formed by forming a humidity sensitive film based on a plasma polymerized film on a piezoelectric element. 3. The moisture measuring cell according to claim 1, which is a utility model, and includes two humidity sensors built in so that their moisture-sensitive surfaces are parallel to the direction of gas introduction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985107503U JPH0446202Y2 (en) | 1985-07-12 | 1985-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985107503U JPH0446202Y2 (en) | 1985-07-12 | 1985-07-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6216455U true JPS6216455U (en) | 1987-01-31 |
| JPH0446202Y2 JPH0446202Y2 (en) | 1992-10-29 |
Family
ID=30983845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985107503U Expired JPH0446202Y2 (en) | 1985-07-12 | 1985-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0446202Y2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9789662B2 (en) | 2013-03-13 | 2017-10-17 | Cubic Tech Corporation | Engineered composite systems |
| CN107107533A (en) | 2015-01-09 | 2017-08-29 | 帝斯曼知识产权资产管理有限公司 | Lightweight laminated material and other products taken the backboard heart and be produced from it |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924234A (en) * | 1982-07-31 | 1984-02-07 | Shimadzu Corp | Humidity sensor and manufacture thereof |
| JPS6039530A (en) * | 1983-07-13 | 1985-03-01 | ラボラトワール・スイス・ド・ルシエルシユ・オルロジエール | Piezoelectric contamination detector |
| JPS61128138A (en) * | 1984-11-27 | 1986-06-16 | Matsushita Electric Ind Co Ltd | Humidity sensor |
-
1985
- 1985-07-12 JP JP1985107503U patent/JPH0446202Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924234A (en) * | 1982-07-31 | 1984-02-07 | Shimadzu Corp | Humidity sensor and manufacture thereof |
| JPS6039530A (en) * | 1983-07-13 | 1985-03-01 | ラボラトワール・スイス・ド・ルシエルシユ・オルロジエール | Piezoelectric contamination detector |
| JPS61128138A (en) * | 1984-11-27 | 1986-06-16 | Matsushita Electric Ind Co Ltd | Humidity sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0446202Y2 (en) | 1992-10-29 |
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